SMC Corporation of America
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Controller side PLC side For 4 Axes JXC73/83 L JXC C2 (Terminal no.) (R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.

B L1 W M2 B side Inch Size 6 4 Model A side B side B C1 C2 E1 E2 H1 H2 L1 L2 M1 M2 Min. port size W Applicable tubing O.D.

Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage

Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.

To the communication connector ( C2 ) or ( 1 ) of SI unit, connect the branch cable with M12 connector from GW. To the communication connector ( C1 ) or ( 0 ), connect the branch cable with M12 connector from Input unit. To the communication connector of Input unit, connect the branch cable with M12 connector from SI unit.

Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Basic style: CM2YB Width across flats B2 2-P (Port size) (Rc, NPT, G) 2-NN H1 H2 G G RE A B Width across flats B1 I REC 2-Eh8 D CX MM AL A F F NA 1.5 1.5 CY N N K H S + Stroke ZZ + Stroke MQQ M RHC Boss-cut MK(2) RS Q G RS H A RZQ ZZ + Stroke MI W S CEP1 CE1 (mm) CE2 AL B1 B2 D E F G H H1 H2 I K MM N NA NN P S ZZ A Bore size (mm) 20 25 32 40 0 0.033 0 0.033 0 0.033 0 0.039 18 15.5 13 26 8

A C Auto switch mounting dimensions Note 2) A3 Note 3) B1 A2 B2 (mm) Bore size 6, 10 0.4 0.3 0.4 0.3 A1 Symbol Auto switch model A1 A2, A3 B1 B2 D-A93 D-A93 (Reed switch) D-M9 (Solid state switch) D-M9 Specific product precautions Be sure to read before handling.

Basic style: CM2YB Width across flats B2 2-P (Port size) (Rc, NPT, G) 2-NN H1 H2 G G RE A B Width across flats B1 I REC 2-Eh8 D CX MM AL A F F NA 1.5 1.5 CY N N K H S + Stroke ZZ + Stroke MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC Boss-cut MK(2) RS

1362213623Description Individual Note 1) In the case of A1 and B1, a pressure gauge or a plug is mounted on the body side, while in case of A2 and B2, on the manifold side.

Note 1) A C Auto switch mounting dimensions Note 2) A3 Note 3) B1 A2 B2 (mm) Bore size 6, 10 0.4 0.3 0.4 0.3 A1 Symbol Auto switch model A1 A2, A3 B1 B2 D-A93 D-A93 (Reed auto switch) D-M9 (Solid state auto switch) D-M9 Specific Product Precautions Be sure to read this before handling.

Cable type (TT) 3 02 03 52-SY7440 (R) -TTMax.10 5 L 204.2 (Lead wire length) Lead wire marking No.1 (+), No.2 () 5.9 0.75 mm2 39 108.6 19 ATEX Compliant Base Mounted Type Series 52-SY9000 Dimensions 2-position single L plug connector 52-SY9140 (R) -L03 04 29 30 17.5 109.3 16.8 51.2 86.5 2 x 5.4 (Mounting holes) Manual override 1/8" (External pilot port) Insulation Black () 25 27 5 15.5 A4 B2

1361213613PVQ Note 1) In the case of A1 and B1, a pressure gauge or a plug is mounted on the body side, while in case of A2 and B2, on the manifold side.

L /IZN10-B1 P /IZN10-B2 DIN /IZN10-B3 P PNP -6- 4 4 4 4 4 4 4 4-1 1 1 1 !

Table 9 Port size Size Port size Size Port size A1, B1 A2, B2 10 M5x0.8 10 20 20 A1 30 Rc1/8 30 50 50 M5x0.8 B2 B1 G1/8 70 70 NPT1/8 100 100 Fig. 8 NPTF1/8 200 200 Rotary table ports and plate have a fixed orifice. Do not make the diameter of this hole larger by additional processing.

Force OUT 1 ON Pin No. 0 [ ] Pin No. 1 OFF Pin No. 2 [ ] b2 Force Output(pin) Output pin No.0 keykey Output pin No.1 Last Output pin No. 78 - (6) TB Ver2.1*LECPA (6-1) SET AX IS.

9 @0 @1 @2 @3 @4 @5 Description Material Note PBT Body A U seal HNBR Electroless nickel plated Brass Body B Body C Brass Electroless nickel plated Electroless nickel plated Brass Seat ring Adjustment plug Brass Electroless nickel plated Electroless nickel plated Brass Body B1 Needle Brass Electroless nickel plated Electroless nickel plated Brass Body B2 Knob PBT Lock nut Note 1) Electroless

9 @0 @1 @2 @3 @4 @5 Description Material Note PBT Body A U seal HNBR Electroless nickel plated Brass Body B Body C Brass Electroless nickel plated Electroless nickel plated Brass Seat ring Adjustment plug Brass Electroless nickel plated Electroless nickel plated Brass Body B1 Needle Brass Electroless nickel plated Electroless nickel plated Brass Body B2 Knob PBT Lock nut Note 1) Electroless

Graph (3) 20 x 9.8 x (0.07 + 0.05) x 10/1000 = 0.24 20 x 9.8 x (m1 + m2) x H/1000 0.24 Nm < Effective torque OK < Effective torque (Nm) Find the moment of inertia, "IR" for the load + attachments (2 pcs.) 7 IR = K x (a2 + b2 + 12h2) x (m1 + m2)/(12 x 106) IR = 2 x (202 + 302 + 12 x 102) x (0.07 + 0.05)/(12 x 106) = 0.05 kgm2 (K = 2: Safety factor) Kinetic energy 8 Confirm that the kinetic