SMC Pneumatic Clean Series

With air cushion WB 2-P (Rc, NPT, G) WA GB Relief port M5 x 0.8 10 GA W W RA Relief port Width across flats B1 MM H1 D MAX.

15

Motor Top Mounting LEYG25, 32 Motor flange Y2 Motor Rod operating range Note 1) (Stroke + 4 mm) 4 x NA Section XX1 4 x OA through thread depth NB H M EV S Q U GA J Y (EB) EA M C EH T EB X 0.5 XA H9 depth XA EC ED B + Stroke Y1 L + Stroke 4 x OA thread depth OB XA H9 DB X Section XX1 (2:1) Bottom hole G through Note 2) depth XA 2 x NA thread depth NC (R2) XAH9 DA P XB (0.5) K Section XX2 WA

Output Specification: L2 (IO-Link/Switch output 1 + Switch output 2), Units specification: M (SI units only), Piping Specification: 01 (R 1/8), Option 1: w/o Lead Wire, Option 2: B (Panel Mount Adapter)

Output Specification: L2 (IO-Link/Switch output 1 + Switch output 2), Units specification: M (SI units only), Piping Specification: 01 (R 1/8), Option 1: W (Lead Wire w/Connector, 2m Waterproof)

C76

WA WB 8 CA2 45 CS1 C76 N N Rail mounting type (A) Band mounting type (B) or non-magnet C85 C95 With rod boot CP95 Wh K KK NCM NCA C e DAM 9 9 -X f I h 20Data (mm) AM 20 24 BE C 12 14 D 37.5 46.5 Eh8 EE FA G H KK KV WB KW N TDH9 TW WH WA HR K NB S SW TC XB ZZ Bore 10 +0.036 0 12 +0.043 0 0 0.033 9 30 38 32 40 M30 x 1.5 G 1/8 11 M8 x 1 30 58 23.8 10 38 7 17(19) 34.5 68 17 34.5 38 47 184 15.3

C76

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MB Cushion needle MB1 HR WA WA WB 8 CA2 45 CS1 C76 N N Rail mounting type (A) Band mounting type (B) or non-magnet C85 C95 With rod boot CP95 Wh K KK NCM NCA C e DAM 9 9 -X f I h 20Data (mm) AM 20 24 C 12 14 Eh8 EE FA KK KV TDH9 TW WA BE D 37.5 46.5 G

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

the page 8-19-8 for details on components and replaceable parts for flat cylinders with guides (MGPM, MGPL). 8-24-6 7 Cylinder with Turntable Series MGT Dimensions 4-YY depthYL XAH7 depth XL XB XAH7 a b c d e XAH7 MX XC XL (mm) X X0.02 a b c d e Bore size (mm) MTS XX section detail drawing 63 80 100 11 17.8 10 7 18.5 13.3 20.3 12 8 22.5 MY 2-R3 15.3 23.3 13.5 10 30 8 CY 6+0.05 0 6 WB Z WA

End Lock Cylinder Series CBG1

The minimum stroke with rod boot is 20mm. 5 Series CBG1 Air Cushion Type: CBG1BA With rear lock: CBG1BA Bore size Stroke H With front lock: CBG1BA Bore size Stroke R WA WB 2-P W 10 Max.

Clean Rodless Cylinder Series CYP

R 4-J Depth JK Inner cover holding screw TA TA WB WA TB TB R W (mm) C ED A EK B F E G H HA HB HG HI HL HP HS HT J JK K Model +0.030 0 CYP15 5.4 9.5 8 4 9.5 12.5 4H9 6.5 45 19.5 8.5 8.5 23 38.6 44 27 19.5 M6 x 1 10 21 +0.030 0 CYP32 8.6 6H9 13 12 14 6 25 8.5 75 39 19 19 39 64.9 73.5 49.5 39 M10 x 1.5 12 20 LD LW MM M N L P PA PB Q QW R T TA TB W WA WB Y Z Model CYP15 5.6 69 M4 x 0.7 6 4.5

Turntable Cylinder Series MGT

XX section T groove dimensions QQ section detail drawing Notch spring force adjustment bolt 4-OA through L 4-MM depth ML QQ section 22.5 4-OB counter bore depth OL B-NN depth NL XX section Z WA Q 45 RA X0.02 RB RC T VB U X PW VA H NL HB HA: T groove for hex. bolt XAH7depth XL DB 2-P GB GA GC 6+0.05depth 6 o PB K J G (Plug) 30 S PA + Stroke C + Stroke FA FB SB SA FC B + Stroke A + Stroke

Compact Guide Cylinder End Lock Type SeriesMGP

Series MGP Dimensions 4-MM depth ML 4-OA through 4-OB depth of counter bore OL Section XX HA:T-slot for hexagon bolt Section XX Z WA L 4-YY depth YL 4-NN through Section XX DL X0.02 X T R X0.02 X0.02 DA VB VA H 24 11 PW X U DB End lock mechanism non-locking type manual release ( ) XAH7 depth XL XAH7 depth XL GC XAH7 depth XL 2-P (plug) 2-P Q GA LL GB PB J K WB WA Z G PA + Stroke C + Stroke

Stations: 9 Stations, Port Size: N3 (5/32" One-touch Fitting), Cable Length: 0 (w/o Cable 25 Pin), Option 1: D (DIN Rail Mounting), Option 2: RT (External Pilot, Branched P & R Ports on U Side)

Input Specifications: 0 (Voltage Input), Output Specification: RT [2 Outputs (NPN/PNP Switching Type) + Analog Voltage Output], Unit Specification: Units selection Function; for Overseas use only; SI Unit provided for Use in Japan, Lead Wire: L (Power Supply/Output Connection Lead Wire, 2m), Bracket/Panel Mount: A2 (Bracket B, Horizontal Mounting), Sensor Connector: C (Sensor Connector, for

76

RT -RRD-5M

Solid State Auto Switches

D-B35 Reed switch Contacts protection resistance () () Current limiting resistance DDLight emitting diode (LED) Diode 1649 Series D-B3 Dimensions (mm) Terminal conduit type D-B3 Terminal conduit type D-B3J 42 42 500 G 1/2 59 38 59 38 6 41.5 41.5 85 69 35 35 42 8 8 59 1 2 85 Recommended minimum bending radius for lead wire RT : 25 mm or more 120C : 50 mm or more Terminal part Dimensions for

Aluminum High Vacuum Angle Valve

This time is characterized as =0 exp(E/RT) where R is the ideal gas constant and 0=(approx.) 10-13 sec. Residence time of water at 20C is 5.5 x 10-6 sec, whereas at 150C, it is 2.8 x 10-8 sec, or about 200 times shorter. The objective of baking is to exhaust water with long adsorption residence time more quickly.

High Vacuum Angle Valve

This time is characterized as =0 exp(E/RT) where R is the ideal gas constant and 0=(approx.) 10-13 sec. Residence time of water at 20C is 5.5 x 10-6 sec, whereas at 150C, it is 2.8 x 10-8 sec, or about 200 times shorter. The objective of baking is to exhaust water with long adsorption residence time more quickly.

EXxx-OMQ0015CN

(M)/ :(26 ) -17No.EX-OMQ0015CN PROFINET PLCOFF PLC SF PLC EX600 BF PLCOFF PLCSI PLC SI PLC SI Device Name BF SI Node flashing test SF BUS IN No Link / No Activity BUS IN Link / No Activity () BUS IN Link / Activity BUS OUT No Link / No Activity BUS OUT Link / No Activity () BUS OUT Link / Activity :(26 ) -18No.EX-OMQ0015CN EX600-SPN1 EX600-SPN2 PROFINET IO(PROFINET RT

Size: 80, Voltage: 30 (Three-phase; 200 VAC (50 Hz), 200/220 VAC (60 HZ), Options: RT (R + T)

Size: 60, Voltage: 30 (Three-phase; 200 VAC (50 Hz), 200/220 VAC (60 HZ), Options: RT (R + T)