Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

-04 AS121F-M5-03 5/32" M5 x 0.8 M5 x 0.8 8 17.3 22.2 7 9.3 22.1 9.6 4 25 25.8 22.1 28.6 9.3 17.3 AS121F-U10/32-04 AS121F-U10/32-03 5/32" 10-32UNF 10-32UNF AS121F-M5-06 AS121F-M5-05 3/16" M5 x 0.8 M5 x 0.8 11.4 21.3 26.1 7 16.5 13.5 11.7 22.9 11.6 18.1 6 AS121F-U10/32-06 AS121F-U10/32-05 3/16" 10-32UNF 10-32UNF 8 11.7 28.6 25.8 22.2 25 9.6 AS221F-01-23 AS2 1F-M5-07 20.4 16 9.3 27.5 3.2 1/4

Series AS-FM/AS-M/ASD-FM

100 200 205 Inch size M5 standard 1/8 standard 1/4 standard 3.2 23 04 06 08 01 03 05 07 09 1/8" 5/32" 3/16" 1/4" 5/16" 4 6 8 Use a 1/8" tube.

VFR

wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS131FM-M5-23 AS131FM-M5-04 AS131FM-M5-06 AS231FM-01-23 AS231FM-01-04 AS231FM-01-06 AS231FM-01-08 AS231FM-02-04 AS231FM-02-06 AS231FM-02-08 AS231FM-02-10 3.2 19.8 8.4 17.5 28.7 12.7 M5 x 0.8 8 8 4 20.3 33.8 28.8 30.1 25.1 9.3 9.6 9.3 10.8 6 21.4 20.6 31.8 13.5 11.6 3.2 24.4 8.4 17 17.5 30.9 12.7 9.3 13.1 4 24.9 9.3 35.2 30.2 32.1 27.1 12 R 1/8 14.2 18 22.9 36.3 13.5 10.9 6 14 26.9 11.6 21

VQC

SUP block plate VVQ2000-16A EXH block plate VVQ2000-19A Port plug Note 1) A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B C4 (N3) With 4 (5/32") One-touch fitting Side port Cylinder port sizes Fill out in case of mixed sizes (CM/LM/NM).

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

ASS Dimensions ASR AS220M-01 02 AS120M ASF H 8 (Hexagon width across flats) L1 T2 24.8 (MAX. 29.8) 28.2 (MAX. 33.2) M5 x 0.8 L2 A L3 D1 9 10.3 10 M5 x 0.8 10-32 UNF D2 T1 9 Dimensions A L2 L3 T1 T2 H L1 D1 D2 Model Min. Min. Max. Max.

5 Port Solenoid Valve, Series VQC

B A B A B A B A A A B 143 80 34.5 Mounting hole for 2-M5 101 n 1 2 3 4 5 6 7 Stations D-side 8 U-side 2-Rc 3/4 3(R) port 2-Rc 1/2 1(P) port 12 20.5 43.5 77.5 95.5 2-Rc 1/8 (External pilot port) 2-Rc 1/4, 3/8, C8, C10, C12 (2(B), 4(A) port) 11.5 21.5 (6.5) 2-Rc 1/8 (Pilot EXH port) 27 31 38.7 (mm) Formulas: L1 = 25n + 106, L2 = 25n + 192 n: Stations (maximum 20 stations) n L L1 L2 20 606 692

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

F

R E A C O D E A P P L I C A B L E T U B E OD Japan, Asia, Australia, UK N Canada, USA MM 23 3.2 04 4 06 6 08 8 10 10 12 12 Inch 01 1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 B O D Y S I Z E 1 M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard T H R E A D P O R T S I Z E M5 ...M5 U01 ..1/8 U02 ..1/4 U03 ..3/8 U04 ..1/2 U32 ..10-32UNF 01 ... 1/8 02 ... 1/4 03 ... 3/8 04 ... 1/2 W I

REC

Screw-in Piping M5 X 0.8 Relieving port size 50 to 500mm/s Piston speed Mounting Basic, Axial foot, Front flange, Rear flange *Auto switch attachable Dimensions REC B/Basic H2 2-Rc(PT)P Width across flats B2 2-NN G G H1 Width across flats B1 Relieving port M5 X 0.8 Standard port I Relieving port 2-Eh8 D MM AL K A N N F lNA S+Stroke H F ZZ+Stroke (mm) A AL B1 B2 D E F G H H1 H2 I K MM N NA

Series SV

21 22.5 13.5 M5 x 0.8 (External pilot port) 99.2 84.9 23.4 M5 x 0.8 (Pilot EXH port) 2-4.3 (Mounting hole) 21 21.5 A B PE 38 46 A B A B SMC B A X Manual override (non-locking) A side: Orange B side: Green EA EB P 21.5 21 61 69 19.4 (Light/Surge voltage suppressor) (L = 300 to 5000) 134.4 128.8 M12 waterproof connector 60.5 58.7 26.5 13.5 5-Rc 3/8, 1/4 (Piping port

VQ5000

pilot port) With connector on D side (FD) 12 Base Mounted Type Series VQ5000 Dimensions (mm) 1in 25.4mm Bottom port diagram With connector on U side (FU) 106 46.8 59.2 83.5 9 9 55.5 M5 ground screw 2n-1/2 (ports A, B) 34.5 n U side X 12 B 2 A 4 6 B A B 2 A 4 5 SMC SMC SMC SMC SMC B A B 2 A 4 4 B A P=41 L1 L2 B 2 A 4 3 B A B 2 A 4 2 B A 34.5 46 68.5 P = 41 A 4 B 2 1 B A 58.5 X 12 Stations

Series KC Self-seal Fittings

Tube size/ Connecting female thread size Body size Type KBV1-M5 KBV1-M6 KBV2-M5 M5 0.8 M6 1 M5 0.8 M6 1 KBV1-04 KBV1-06 KBV2-06 4 6 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2 KBV4-R2 KBV4-R3 KBV2-08 KBV3-08 8 Branch elbow module: KBZ 1 8 Rc(PT) KBV3-10 10 Applicable tube O.D. KBV3-12 12 KBV4-12 KBV4-16 Part No.

CL

a guide, use a solenoid valve with a large effective area for the unlocking solenoid.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 21 22.5 13.5 86.2 M5 x 0.8 (External pilot port) 71.9 10.4 21 21.5 M5 x 0.8 (Pilot EXH port) 2 x 4.3 (For mounting) A B PE SMC 38 46 A B A B B A X Manual override P A side: Orange B side: Green EA EB 21.5 21 61 69 6.4 (Light/surge voltage suppressor) (L = 300 to 5000) 121.4 115.8 M12 waterproof connector 60.3 58.5

Prevents Micro-Bubbles

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2 LVA3 LVA4 LVA5 LVA6 66.5 11.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 Dimensions (mm) A B Q R P C E F G H K L N Model LVA1 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3 36 47 13 M6 x 1.0 42.5

Table of Contents

-ASD330F-01-08 10-ASD230F-M5-06 2.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Reference figure 136 Base Mounted 10-SY3000/5000/7000 Type 41P 10-SY3000: 10-SS5Y3-41PStations -M5, C4, N3 C6, N7 [ ]: AC For M5 x 0.8 One-touch fitting (Pitch) 15 P = 12.5 7 (Pitch) : 6, 1/4" Applicable tubing O.D.: 4, 5/32" (A, B port) 15 P = 12.5 7 (A, B port) M5 x 0.8 6.5 20.7 6.5 20.7 B B B B A A A A L2 L1 4 + 13.6 8.5 + + (3.2) (For mounting) 4 x 4.5 50 5.6 2.9 82.1 [84.3] 117.1 [121.5

Table of Contents

2-P Port size A B 2-P Port size A B M M 2-J, thread depth K 2-J, thread depth K G1/2 Specifications with bracket Orifice 2, 3, 4.5, 6 Orifice 8, 10 7.5 2.3 Bracket Y 29 Mounting hole 2-5.3 Bracket 22 5.5 52 28 W U 67 X (mm) Grommet Conduit DIN terminal Electrical entry Mounting dimensions Bracket mounting Port size P Model Orifice size A B C D E F H Conduit terminal J M4 M5 M5 M5 M5 K M