Valve Type: N.C. Base Mounted, Voltage: 24VDC, Electrical Entry: Grommet, Orifice Size: 1.6mm, Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: G, Body/Seal Material: Body SUS, Seal FKM, Option: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 4 [350 (3 Port) ø4], Port Size: 01 [1/8 (6A)], Thread: G, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: G, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: G, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)], Thread: G, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 4 [350 (3 Port) ø4], Port Size: 01 [1/8 (6A)], Thread: F (G), Material: H (Stainless Steel Body, FKM Seal, Class B Coil)

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: F (G), Material: H (Stainless Steel Body, FKM Seal, Class B Coil)

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: F (G), Material: H (Stainless Steel Body, FKM Seal, Class B Coil)

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)], Thread: F (G), Material: H (Stainless Steel Body, FKM Seal, Class B Coil)

Base Mounted), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Orifice Size: 23 (2.3mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: F (G), Body/Seal Material: H (Body SUS, Seal FKM)

Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: DC24V, Specification: Standard, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: -, Port Size: -, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal, Plumbing

Base Mounted), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Orifice Size: 40 (4mm), Port Size: w/o Sub-Plate w/Mounting Screw, Thread Type: Rc, Body/Seal Material: H (Body SUS, Seal FKM)

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber

ZQ-OM01401

-40 10 -20 -20 5 0 0 0 0.2 0.3 0.4 0.5 0 1 2 3 4 5 6 [MPa] [L/min (AMR) ] ZQ07A 0.43MPa -100 40 -100 35 -80 [L/min (AMR) ] -80 [L/min (AMR) ] 30 [kPa] [kPa] -60 25 -60 20 -40 -40 15 10 -20 -20 5 0 0 0 0 2 4 6 8 10 12 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] ZQ10A 0.43MPa -100 70 -100 60 -80 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 50 -60 -60 40 -40 30 -40 20 -20 -20 10 0 0 0

Microspeed Cylinder: Double Acting/Single Rod Series CM2X ø 20, ø 25, ø 32, ø 40 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

UZ Without auto switch L 40 150 CM2X With auto switch CDM2X C73 Number of auto switches L 40 150 2 pcs. 1 pc.

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 8

Current proportional valve, PROPORTIONAL VALVE

Valve Type: N.C. Body Ported, Voltage: 12VDC, Electrical Entry: Grommet, Orifice Size: 2.3mm, Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: G, Body/Seal Material: -, Option: -

Valve Type: N.C. Body Ported, Voltage: 12VDC, Electrical Entry: Grommet, Orifice Size: 1.6mm, Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: G, Body/Seal Material: -, Option: -

Valve Type: 31 (N.C. Body Ported), Voltage: 6 (12VDC), Electrical Entry: G (Grommet), Orifice Size: 23 (2.3mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: F (G)