Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Vertical upward: Lifter Vertical downward: Press Horizontal: Chucking l l m m F m Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F Maximum speed (mm/s) Load center of gravity position l (mm) Maximum speed (mm/s) up to 300 up to 500 up to 700 up to 300 up to 500 up

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Table displacement due to yaw moment load Displacement at A when load is applied at F . Table displacement due to roll moment load Displacement at A when load is applied at F .

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com High precision type MSQ B 10 A M9B Basic type Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

JIS Standard Hydraulic Cylinder

F F H H Note) Male thread effective length should be no more than 100 mm.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting B L F G BZ FZ Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange Solid state Auto switch M9B, M9BW Reed

Tie-rod Type Hydraulic Cylinder

T T V V 2 x Rc P 4 x J GA F GA A MA a CHM A MA a Cushion adjustment screw Air release R (max.)

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

h11 (Shaft) f H9 (Hole) a (Max.) c (Min.) e b d l1 Part no.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Calculation of applied lateral load The lateral load F equals the total load of the workpiece. Thus, F= 5 x 0.05 x 9.8 = 2.5 (N) 1. Calculation of applied lateral load F F = N m g (N) = 0.2 x 10 x 0.1 x 9.8 = 2.1 (N) CC 70 Lateral load F (N) RB 60 0.4 MPa 50 J 40 2.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Calculation of applied lateral load The lateral load F equals the total load of the workpiece. Thus, F= 5 x 0.05 x 9.8 = 2.5 (N) 1. Calculation of applied lateral load F F = N m g (N) = 0.2 x 10 x 0.1 x 9.8 = 2.1 (N) CC 70 Lateral load F (N) RB 60 0.4 MPa 50 J 40 2.

Rotary Actuator

Note) Flange type F is not available. Air cushion Number of auto switches Nil None C With air cushion Shaft type Nil 2 pcs. S 1 pc.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Directional Control Valves Air Grippers Modular F.

Compact Cylinder with Solenoid Valve/

Example) Lead wire length 2000 mm Electrical entry When ordering cylinder with valve CVQM32-30-M9B-5MOZ SY100-30-4A-20 M-type plug connector with lead wire (Lead wire length 300 mm) M MO M-type plug connector without connector 5 Series CVQM Dimensions 32 to 63 EXH 2 x P2 F SUP P1 S S Q 2 x HB through Manual button 2 x HA through V W 2 x 2 x OA effective length RA KA 2 x N through Y EB (KB

XLAQ/XLDQ

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

QL 6 13.5 Prepared hole diameter 3.3 2 x M3 x 0.5 (Plug: M-3P) 170.05 6 (fitting seat surface dimension) M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port A 2 x M3 x 0.5 A 5 5.5 3.2 J 2.4 Z Section AA 3.5 depth 2 2.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL 11-/22-MXPJ6-10 4 x M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28 8 5 44 11-/22-MXPJ6-51

Environment

Load: F [N] LEY32 10 LEY25 LEY16 1 Based on the above calculation result, the LEY16B-200 is selected. Stroke [mm] 0 100 200 300 400 500 600 223 LEY Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Refer to page 225 for the LECPA and page 226 for the LECA6.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

2-M3 x 0.5 (Plug: M-3P) 6 (fitting seat surface dimension) 170.05 M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port 2-M3 x 0.5 A 5 5.5 A 3.2 J 2.4 Z Section AA 3.5 Depth 2 2.5 +0.030 0 7 +0.030 0 Depth 2 2.5 Q QL 11-/22-MXPJ6-10 4M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28 8 5 44 11-/22-MXPJ6-51 30 35 53 42 47 37 11 10 59 11-/22-MXPJ6-10

2

, 60C (F and FS type only)] IDF IDU IDF FS Refer to SMC website for details.

MXQ

F A F MX MTS Lr MY 16 16 16 Lr = 120 mm MXQ16-10 MXQ16-10 MXQ16-10 0.04 MXQ16-75 MXQ16-100 MXQ16-125 MXQ16-75 MXQ16-100 MXQ16-125 MXQ16-125 MXQ16-125 MXQ16-125 CY MXQ16-50 MXQ16-50 MXQ16-50 0.06 MXQ16-75 MXQ16-20 MXQ16-30 MXQ16-20 MXQ16-20 MXQ16-30 MXQ16-30 0.12 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXQ16-75 MXQ16-40 MXQ16-75 MXQ16-75

Compact Hydraulic Cylinder

F I D M E Z K M E J B + Stroke A + Stroke L Note) The auto switches above are shown for a D-M9(W) solid state auto switch.