Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

F.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Stroke range (mm) Bore size (mm) J K D L C E M I H P M5 x 0.8 A A B F 5.5 Q 11.5 B P F Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 23 32 40 M8 x 1.25 4.5 33 7.5 Rc 1/8 14 10.5 16 7 13 45 34 60 Rc 1/8 10.5 7.5 40 36.5 46.5 38.5 48.5 33 29.5 39.5 30.5 40.5 40 Rc 1/8 46.5 39.5 M8 x 1.25 5 8 Rc 1/8 14 11 16 7 13 52 40 69 11 8 M10 x 1.5 50 Rc 1

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

50 60 70 0 0 20 30 40 50 0 0 0 0 20 40 60 80 100 Allowable end load F (N) 10 Allowable end load F (N) Allowable end load F (N) MGGM40Stroke 6 (Slide bearing type) 5 800 st 700 st 4 600 st 3 500 st 2 300 st 400 st st: Stroke (mm) 1 200 st 100 st 0 0 20 40 60 80 100 120 140 160 Allowable end load F (N) MGGM50Stroke 8 (Slide bearing type) 7 Deflection Y (mm) 6 1000 st 5 900 st 4 800 st 700

CLA

lor 9~re lock- tAB ~ 01 9xhaust lockU>l: blank plug .H:h bre&li'lerj with Rod Boot p p p BN Z+ t+Stroke ZZ .. t f S f(Q/(e Stroke ra ~ (mmt ,-.ow "",.f I Bore size (mm) A DB BN BP BO DC 00 oE F GA GB GC GO GL GR J K LZ MM Without boot With boot 40 500 25-500 27 30 60 96 '/. y. 44 16 32 10 85 15 26 54 10 10 M8Xl.25 6 71 M14X1 .S 50 600 25-600 32 35 70 108 'I, 'I< 52 20 40 10

Mechanical Valves Series NVM, NVFM, NVZNI

(40) 1.06 (27\ 1.42 (36) 1.26 432) 1.20 '30.51 ) 2 4 (6) Millimelers in Parentheses 1-N015 151-N01-35 "(@ NVM120-N01-36 130-N01-36 F O , F 3 31 lbs (1 5kg.)

IIIIIII

(40) 1.06 (27\ 1.42 (36) 1.26 432) 1.20 '30.51 ) 2 4 (6) Millimelers in Parentheses 1-N015 151-N01-35 "(@ NVM120-N01-36 130-N01-36 F O , F 3 31 lbs (1 5kg.)

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

RY RT [mm] Bore size [mm] Stroke range [mm] A AL B B1 BN BP BQ C D E F GA GB GC GD GL GR Without rod boot With rod boot 40 Up to 800 20 to 800 30 27 60 22 96 1/4 1/4 44 16 32 10 85 15 26 54 10 10 50 Up to 1200 20 to 1200 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 63 Up to 1200 20 to 1200 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 80 Up to 1400 20 to 1400 40 37 102 32

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

style: CG1FN Bore size (mm) Stroke range (mm) B E F FX FD FT H 20 25 32 40 Up to 125 6 5.5 28 2 12 40 35 Up to 200 7 5.5 32 2 14 44 40 Up to 200 7 6.6 38 2 18 53 40 Up to 200 8 6.6 46 2 25 61 50 End boss is machined on the flange for E.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

CL

Symbol Bore size 40 to 100 125 to 160 40 to 160 CLQ Rod boot Note) Nil MLGP F Cushion Note) Auto switches are not available with steel tube.

C76

Series C76: 32, 40 Operating pressure Mounting style Maximum stroke that can be used according to buckling strength 100.0 Nominal symbol C76 Mounting bracket diagram 32 40 (MPa) Lateral load applied to the rod end fR (N) Foot: L Rod side flange: F Head side flange: G 0.3 58 54 10.0 L C7640 44 0.5 40 W W W F 36 0.7 33 C7632 24 0.3 23 G 17 0.5 16 1.0 13 0.7 13 Clevis: C, D Rod side trunnion

C76

40 0.5 35 33 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W W F (100) (100) 0.7 83 77 0.3 G 63 58 0.5 52 48 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W F W (100) (100) 0.7 (100) (100) 0.3 G 92 86 0.5 77 71 0.7 6-10-4 5 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Series C76 32,

CNG

Load in direction of rod extension Load in direction of rod retraction m 0.3MPa Graph 5 F 0.4MPa Graph 6 m 0.5MPa Graph 7 F 19 Model Selection Series CNG Selection Graphs Graph 5 Graph 2 0.3MPaP<0.4MPa 0.3MPaP<0.4MPa 200 200 100 100 40 30 40 50 30 40 50 32 40 25 Load weight: m (kg) Load weight: m (kg) 20 20 20 32 10 10 25 20 5 4 3 5 4 3 2 2 1 1 100 500 400 300 200 100 0.5 500 400 300 200

Cylinder with Lock Series CNG

Load in direction of rod extension Load in direction of rod retraction m 0.3MPa Graph 5 F 0.4MPa Graph 6 m 0.5MPa Graph 7 F 19 Cylinder with Lock Series CNG Model Selection Selection Graphs Graph 5 Graph 2 0.3MPaP<0.4MPa 0.3MPaP<0.4MPa 200 200 100 100 40 30 40 50 30 40 50 32 40 25 Load weight: m (kg) Load weight: m (kg) 20 20 20 32 10 10 25 20 5 4 3 5 4 3 2 2 1 1 0.5 100 500 400 300 200

SYJ3000/5000/7000

G H C4, N3 C6, N7 4 3.5 19.5 3.5 B A P R1 16 15 10.6 R2 One-touch fitting (A, B port) 32.3 (3.2) 21 M5 x 0.8 (P, R1, R2 port) 1.4 (PE port) Applicable tubing O.D.: 4, 5/32" : 6, 1/4" (2.3) L plug connector (L): SYJ5120-L-M5(-F) M plug connector (M): SYJ5120-M-M5(-F) DIN terminal (D): SYJ5120-D-M5(-F) M8 connector (WO): SYJ5120-WO-M5(-F) Approx. 300 (Lead wire length) Applicable cable O.D

CNG

Load in the direction of rod extension Load in the direction of rod retraction m 0.3 MPa Graph (5) F 0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 9-5-6 7 Model Selection Series CNG Selection Graph Graph (5) Graph (2) 0.3 MPa P < 0.4 MPa 0.3 MPa P < 0.4 MPa 200 200 100 100 40 30 40 50 30 40 50 32 Load weight: m (kg) 40 25 Load weight: m (kg) CL 20 20 20 32 CL1 10 10 25 20 MLGC 5 4 3 5 4 3

Fluoropolymer Piping Equipment

Connection threads Rc/NPT E E H L L M Min. port size W Y L, L H W M LQ3H11-F 4 1/8" 10 9 11 35 34 14 2.5 10 18.5 LQ3H12-F 3 2 LQ3H21-F 6 1/8" 17 16 16 40 39 20 4 14 18.5 LQ3H22-F 1/4" 45 44 21.5 LQ3H31-F 10 1/8" Y (E, E) 7.5 18.5 LQ3H32-F 8 6.4 LQ3H33-F 10 1/4" 55 52 7.5 21.5 LQ3H34-F 8 6.4 LQ3H35-F 10 3/8" 55.5 52.5 7.5 25 LQ3H36-F 8 6.4 LQ3H41-F 12 1/4" 24 22 24 55.5 53 29 9.5 22 21.5 LQ3H42

HRX-OM-S004

Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Over flow port Rc1 (Symbol F: G1, Symbol N: NPT1) Wetted material Stainless, Cupper(Heat exchanger brazing), Brass, Bronze PTFE, PU, EPDM, PVC, NBR, PE, NR, PBT, POM, PP, Carbon, Ceramic Temperature range oC 5 to 40 Pressure range MPa 0.3 to 0.5 Required flow 50/60Hz 5 L/min 33 / 34 38 / 40 Facility water system Facility water

VFS

1 Hexagon socket head screw Steel M4 x 40 M4 x 40 M4 x 40 !2 Detent assembly VF4000-12A Refer to How to Order Pilot Valve Assembly on page 3-8-70. Pilot valve assembly !

PF2A/PF2W

.S. or less 2% F .S. or less 0.35 to 4.5 l/min 0.35 to 4.5 l/min 0.5 to 4 l/min 0.05 l/min 0.05 l/pulse 3.5 to 45 l/min 3.5 to 45 l/min 5 to 40 l/min 0.5 l/min 0.5 l/pulse 7 to 110 l/min 7 to 110 l/min 10 to 100 l/min 1 l/min 1 l/pulse IF Data 5% F .S. or less 3% F .S. or less 5% F .S. or less (0 to 50C, based on 25C) 70 mA or less 80 mA or less 460 g 3/8 700 g 1/2, 3/4 520 g 3/8, 1/2 1150