Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

G H C4,N3 C6,N7 4 3.5 19.5 3.5 B A P R1 16 15 10.6 R2 One-touch fitting (A, B port) Applicable tubing O.D.: 4 and 5/32" : 6, 1/4" 32.3 (3.2) 21 M5 x 0.8 (P, R1, R2 port) (2.3) L plug connector (L): 10-SYJ5123-L-M5(-F) M plug connector (M): 10-SYJ5123-M-M5(-F) DIN Terminal (D): 10-SYJ5123-D-M5(-F) M8 connector (WO): 10-SYJ5123-WO-M5(-F) Approx. 300 (Lead wire length) Applicable cable O.D.

REC

90 0.5 W W W 0.5 F 117 108 95 76 0.7 C J G5-S 0.1 0 500 1000 1500 81 75 66 51 0.3 CV G 60 55 49 37 0.5 Cylinder stroke (mm) The above curve in the graph refers to P = 0.5 MPa of supply pressure.

CXS

0.7 with depth 6 2-M5 x 0.8 with depth 8 38.5 58 20 56 18 9 2-M5 x 0.8 45 25 5 10 30 8 48 10 10 M6 x 1.0 x 5 CXS15 Strokes Symbol SS Z ZZ Stroke 10, 15 20, 25 30, 35, 40, 45, 50 60, 70, 75 90, 100 25 20 15 100 80 10 30 35 40 45 50 60 70 75 80 90 100 10 15 20 25 30 35 40 45 50 60 70 75 80 90 Model 30 40 50 100 105 115 125 130 65 70 75 80 85 90 95 CXS10 97 92 87 82 102 107 112 117 122 132

Environment

: 75% 15000 15000 Duty ratio: 100% 12500 12500 10 10 7500 7500 Duty ratio: 100% 5000 5000 2500 2500 0 0 0 2 4 6 8 0 5 10 15 20 Work load [kg] Work load [kg] LEFS25SlB/Ball Screw Drive LEFS25SlB/Ball Screw Drive Horizontal Vertical 20 20 Duty ratio: 50% Duty ratio: 50% Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] 17500 17500 Duty ratio: 75% Duty ratio: 75% 15000 15000

MY1

8 MY1HG-F (W) Component Parts Description Material Note No.

Compact Cylinder with Air Cushion

Mounting bolt C D Mounting bolt Mounting bolt D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

VFS

01 02 2 position double: VFS2200-F-01 02 3 position closed center: VFS2300-F-01 02 3 position exhaust center: VFS2400-F-01 02 3 position pressure center: VFS2500-F-01 02 2-5 mounting hole Manual override 150.5 (3 position: 158) (Non-locking) 2-5 mounting hole Manual override (Non-locking) With light/surge voltage suppressor 163.5 (3 position: 171) With light/surge voltage suppressor 1 8 (

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Refer to page 100 for part numbers. 75 Non-standard Motor High Rigidity Direct Acting Guide Series LJ1H20 Ground Ball Screw Motor Output 100W 15mm/10mm lead Vertical Mount How to Order Stroke 2 LJ1H20 F K W X10 PA 1 G Cable entry direction Top entry Power supply voltage Motor specification Cable entry direction Switch Left entry N.C. (B contact) 2 pcs.

MK

C B A Model MK32-F MK40-F MK -F Model MKG32 MKG40 MKG50 MKG63 RHC 0 0.052 0 0.052 0 0.062 0.1 0.15 5.5 48 65 8 0.1 34 0.15 56 21 M6 x 1.0 5.5 54 72 8 40 62 28 M6 x 1.0 MK(2) 35 50 63 0.1 0.15 6.6 67 89 9 0.1 50 0.15 76 M8 x 1.25 9 80 108 9 60 92 M10 x 1.5 RS Q G Arm for width across flats RS H A Rod end width across flats With arm RZQ F + Clamp stroke C + Clamp stroke MI W S CEP1 CE1 CE2

RQ

, 100 30, 40, 50, 75, 100 40, 50, 75, 100 RQ MU DManufacture of Intermediate Stroke -X Description Part no.

Vacuum Unit

C C1 L L1 L2 L3 L Individual wiring V V V V F D-sub connector V V P Flat ribbon cable connector V V 8 (Common PV) 6 (Common PS) P Vacuum pump system PN 5/16"(Common PV) 1/4" (Common PS) 10 10 stations 1 Common wiring F/P is available only for solenoid valve wiring. Individual wiring is specified for vacuum switches and sensors.

MGC

View A-A Bore size (mm) Stroke range (mm) AF AE AD AC AB AA A G F E D C B AP H 20 25 32 40 50 75, 100, 125, 150, 200 25 62 15.5 13 11 84 5.6 90 45 24 106 M5 x 0.8 depth 10 9.5 depth 6 22 M6 x 1 depth 10 30 65 16.5 13 15 89 6.8 103 45 26.5 120 11 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 14 27 75, 100 125, 150 200, 250 300 35 70 16.5 13 15 94 6.8 118 50 26.5 135 11 depth 8 M6 x 1 depth 12 M8

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

side 55 75 n=2, 4, 6, 8, 75+30(n2) 90+30(n2) n=2, 4, 6, 8, 35+30(n2) n=2, 3, 4, 80+30(n2) Dif. sides Precautions n=2, 4, 6, 8, D-A44 n 90+50(n2) n=2, 4, 6, 8, 55+50(n2) n=2, 3, 4, 80+50(n2) 75+50(n2) Same side n=2, 4, 6, 8, n=2, 4, 6, 8, 80 75 90 10 1 Dif. sides Be sure to read before handling.

CLK1

For CLK1P (Example) CLK1PA50-100Y-B For CLK1G (Example) CLK1GA50-100Y-B-P Cylinder stroke (mm) 40, 50, 63 50, 75, 100, 125, 150 End bracket Without fitting Single knuckle joint Double knuckle joint Nil I Y Port and switch rail position Cylinder type B F ( ) ( ) Position Symbol Clamp side lock Unclamp side lock Locking position Clamp side lock Unclamp side lock B F Nil Port on top Rail on

Clamp Cylinder with Lock Series CLK1

For CLK1P (Example) CLK1PA50-100Y-B For CLK1G (Example) CLK1GA50-100Y-B-P Cylinder stroke (mm) 40, 50, 63 50, 75, 100, 125, 150 End bracket Without fitting Single knuckle joint Double knuckle joint Nil I Y Port and switch rail position Cylinder type B F ( ) ( ) Position Symbol Clamp side lock Unclamp side lock Locking position Clamp side lock Unclamp side lock B F Nil Port on top Rail on

2–4

-30 -35 -40 -45 -50 -75 -100 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 30 35 40 45 50 55 60 65 70 75 30 35 40 45 50 55 60 65 70 75 110 135 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 115 x 140 M6 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 120 x 145 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65

•

(mm ) . 100 125 150 I 50 75 100 125 150 75 ~ 50 I 75 50 100 125 150 107 40 70 B3 83 97 11 5 128 128 194 52 62 204 212 225 225 1 83 107 50 70 83 ! 97 115 128 I 128 52 62 204 19' 212 2.?

VQZ1000/2000/3000

4 One-touch fitting for 6 F N Manifold Note) When two or more symbols are specified, indicate them alphabetically.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Standard Stroke Bore sizes (mm) Standard strokes (mm) Long strokes (mm) 75, 100, 125, 150, 175 350, 400, 450, 500, 600 40, 50, 63 200, 250, 300 700, 800, 900,1000 Intermediate strokes and strokes shorter than 75 mm are also available.