When working with delicate materials such as Silicone wafers, magnetic disks, or LCD substrates, non-shock actuation must be balanced with high speed/throughput. The REA provides the features needed to allow rapid transfer with a speed of up to 300mm/sec but virtually eliminates shock impact. Integrated cushion spears allow smooth acceleration and deceleration, while also simplifying construction

with standard stroke options between 20 – 100mm.Large allowable kinetic energy, Noise reduction (27% noise reduction compared to CQ2 without cushion), Good stroke repeatability (Metal to metal at stroke end), Manual override mechanism allows unlocking with simple tools, Bypass piping type is available for applications requiring drop prevention, LOCK CYLINDER, COMPACT CYLINDER W/LOCK, F79

MRQB-OM0002

Ta 10 STa(S 10) = & I Ta (Nm) I: & 2 = & (rad/s2) 2 t 5.2 5.3 22 5.4 P A F 1 1 = (1) P A F 2 2 = (2) 2 1 D 4 A = (3) ) d D ( 4 A 2 2 2 = (4) F=[N] F=[N] = A=[mm] A=[mm] D=[mm] d=[mm] P=[MPa] 5.6 () 5.7 () 5.5 23 6. 6. 6. 6. ,, , ,, 6-1. 6.1 (m) DC AC 0.5 3 5 (L) (Z) (N) 3 (NPN) F7NV F79 3 (PNP) 5V,12V F7PV F7P IC F7BV J79 2 12V J79C 24V 3 (NPN) F7NWV F79W PLC 3 (PNP) 5V,

MHT2

IC circuit A76H A96V A96 5V Yes A72 A73 A72H A73H 200V MHQ Reed switch Grommet 100V 12V A93 A90 A93V A90V Relay, PLC MHL2 2-wire A80 A73C A80C A79W F7NV A80H IC circuit No 5V, 12V 100V or less 24V 12V Yes Connector IC circuit 5V, 12V No 24V or less MHR Diag. indicator (2 color) Grommet Yes F79 5V, 12V 3-wire (NPN) F9N F9NV 12V MHK IC circuit 5V, 12V F7PV F7P 3-wire (PNP) Grommet F9P

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

-wire A90 24V Note 2) Note 1) Bore size (mm) Foot type Flange type 32 40 50 63 80 100 A73C 12V Yes Double clevis type Connector 24V or less No A80C 5V, 12V IC circuit Diagnostic indication (2-color display) CQ-D032 CQ-D040 CQ-D050 CQ-D063 CQ-D080 CQ-D100 CQ-F032 CQ-F040 CQ-F050 CQ-F063 CQ-F080 CQ-F100 CQ-L032 CQ-L040 CQ-L050 CQ-L063 CQ-L080 CQ-L100 Yes A79W Grommet 3-wire (NPN) F9NV F79

Solid State Switch with Prewired Connector Series D– mmPC

(between connectors), leakage current 1mA or less Applicable Auto Switches Lead wire length (m) Lead wire length (m) Function Electrical entry Applicable model number Mounting Electrical entry Function Applicable model number 0.5 1.0 3.0 Mounting 0.5 1.0 3.0 P P P P M5N, M5P, M5B F79, F7P, J79 Grommet in-line Grommet in-line Grommet perpendicular P P P P Y59A, Y7P, Y59B F7NV, F7PV, F7BV

Compact Cylinder with Air Cushion Series RQ

IC circuit 5V A76H A96V A96 200V A72H A72 Yes Grommet Reed switch A73H A73 12V 100V A93 A93V Relay, PLC No 2 wire 5V, 12V 100V or less A90 A90V A80H A80 IC circuit 24V Yes 12V A73C Connector No 5V, 12V 24V or less A80C IC circuit Diagnostic indication (2 color indicator) Yes Grommet A79W 3 wire (NPN) Bracket part numbers F9N F9NV F79 F7NV 5V, 12V IC circuit Note 5) Note 3) 3 wire

options between 20 – 100mm.Large allowable kinetic energy, Noise reduction (27% noise reduction compared to CQ2 without cushion), Good stroke repeatability (Metal to metal at stroke end), Manual override mechanism allows unlocking with simple tools, Bypass piping type is available for applications requiring drop prevention, Cyl, Compact, Air Cushion & Lock, Sw Cap, COMPACT CYLINDER W/LOCK, F79

options between 20 – 100mm.Large allowable kinetic energy, Noise reduction (27% noise reduction compared to CQ2 without cushion), Good stroke repeatability (Metal to metal at stroke end), Manual override mechanism allows unlocking with simple tools, Bypass piping type is available for applications requiring drop prevention, Cyl, Compact, Air Cushion & Lock, Sw Cap, COMPACT CYLINDER W/LOCK, F79

options between 20 – 100mm.Large allowable kinetic energy, Noise reduction (27% noise reduction compared to CQ2 without cushion), Good stroke repeatability (Metal to metal at stroke end), Manual override mechanism allows unlocking with simple tools, Bypass piping type is available for applications requiring drop prevention, Cyl, Compact, Air Cushion & Lock, Sw Cap, COMPACT CYLINDER W/LOCK, F79

stroke options between 20 – 100mm.Large allowable kinetic energy, Noise reduction (27% noise reduction compared to CQ2 without cushion), Good stroke repeatability (Metal to metal at stroke end), Manual override mechanism allows unlocking with simple tools, Bypass piping type is available for applications requiring drop prevention, CYL, COMPACT W/LOCK, SW CAP, COMPACT CYLINDER W/LOCK, F79

stroke options between 20 – 100mm.Large allowable kinetic energy, Noise reduction (27% noise reduction compared to CQ2 without cushion), Good stroke repeatability (Metal to metal at stroke end), Manual override mechanism allows unlocking with simple tools, Bypass piping type is available for applications requiring drop prevention, CYL, COMPACT W/LOCK, SW CAP, COMPACT CYLINDER W/LOCK, F79

standard stroke options between 20 – 100mm.Large allowable kinetic energy, Noise reduction (27% noise reduction compared to CQ2 without cushion), Good stroke repeatability (Metal to metal at stroke end), Manual override mechanism allows unlocking with simple tools, Bypass piping type is available for applications requiring drop prevention, COMPACT LOCK CYLINDER, COMPACT CYLINDER W/LOCK, F79

Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket: Through-hole (standard), Port thread type: Rc, Body Options: With rubber bumper, Auto Switches: F79

Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: None, Specification: Built-in magnet, Support bracket: Through-hole (standard), Port thread type: Rc, Body Options: With rubber bumper / Rod-end male thread, Auto Switches: F79

options between 20 – 100mm.Large allowable kinetic energy, Noise reduction (27% noise reduction compared to CQ2 without cushion), Good stroke repeatability (Metal to metal at stroke end), Manual override mechanism allows unlocking with simple tools, Bypass piping type is available for applications requiring drop prevention, Cyl, Compact, Air Cushion & Lock, Sw Cap, COMPACT CYLINDER W/LOCK, F79

options between 20 – 100mm.Large allowable kinetic energy, Noise reduction (27% noise reduction compared to CQ2 without cushion), Good stroke repeatability (Metal to metal at stroke end), Manual override mechanism allows unlocking with simple tools, Bypass piping type is available for applications requiring drop prevention, Cyl, Compact, Air Cushion & Lock, Sw Cap, COMPACT CYLINDER W/LOCK, F79

options between 20 – 100mm.Large allowable kinetic energy, Noise reduction (27% noise reduction compared to CQ2 without cushion), Good stroke repeatability (Metal to metal at stroke end), Manual override mechanism allows unlocking with simple tools, Bypass piping type is available for applications requiring drop prevention, Cyl, Compact, Air Cushion & Lock, Sw Cap, COMPACT CYLINDER W/LOCK, F79

options between 20 – 100mm.Large allowable kinetic energy, Noise reduction (27% noise reduction compared to CQ2 without cushion), Good stroke repeatability (Metal to metal at stroke end), Manual override mechanism allows unlocking with simple tools, Bypass piping type is available for applications requiring drop prevention, Cyl, Compact, Air Cushion & Lock, Sw Cap, COMPACT CYLINDER W/LOCK, F79

options between 20 – 100mm.Large allowable kinetic energy, Noise reduction (27% noise reduction compared to CQ2 without cushion), Good stroke repeatability (Metal to metal at stroke end), Manual override mechanism allows unlocking with simple tools, Bypass piping type is available for applications requiring drop prevention, Cyl, Compact, Air Cushion & Lock, Sw Cap, COMPACT CYLINDER W/LOCK, F79