Square Tube Type Air Cylinder Series MB1

75 75 75 75 75 136 144 152 152 164 164 41 23 51 25 51 25 56 29 61 29 Standard Type/with Mounting Brackets Dimensions not shown are the same as the basic type (drawing above).

Air Cylinder Series MB

B TA TL TU TC TX TE TO TT TR TS TH TF TDH10 MB-S03 32 40 50 63 80 100 125 32 40 50 63 80 100 125 +0.070 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 +0.084 0 46 52 65 75 95 114 136 45 60 60 70 70 90 105 8.5 10 10 15 15 15 18.5 62 80 92 110 130 158 186 50 63 75 90 110 132 160 74 97 109 130 150 184 212 12 17 17 20 20 26 26 13 17 17 22 22 24 24 10 12 12 14 14 17 25 35 45 45 60 60 75 85 89

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

LJ1H

12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

Free Mount Cylinder

14 16 20 24 22 24 32 40 50 62 3 4 6 8 10 12 8 8 8 8 10 12 7 7 7 9 10 11 20.5 22 28 33 43.5 51.5 11 12 13 16 20 24 9 12 17 20 22 29 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 16.5 16.5 Note) 19 21.5 23 Without auto switch With auto switch Bore size (mm) 6 10 16 20 25 32 SA Y P Q QA R W T S 38 36 30 36 40 42 Z 75 79 79.5 93 105 121 S 38 36 40 46 50 52 Z 75 79 89.5 103

CLS

50 50 56 63 63 71 47 47 53 60 60 67 1/4 1/4 1/4 3/8 3/8 1/2 17 17 20 23 25 30 36 36 40 45 50 60 59 59 59 70 74 86 43 43 43 48 48 60 15 15 17 20 20 25 31 31 36 41 46 56 145 75 18 110 136 115 90 90 90 115 115 140 16 107 58 110 M14 x 1.5 65 Up to 1000 32 36 40 50 50 63 64 72 80 100 100 126 +0.084 0 +0.084 0 3 5 30 46 28 0 0.2 161 78 18 110 146 128 16 114 64 110 M14 x 1.5 75 Up to 1000 +0.3

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

x 1.5 30 22 1/4 37 17 45 50 25 9 73 53 20 28 11 10 95 53 115 17 17 13 M10 x 1.5 20 22 22 M16 x 1.5 30 26 3/8 43 19 50 63 28 8 80 60 22.4 30 11 12 102 60 122 17 17 13 M10 x 1.5 22 20 25 M18 x 1.5 30 26 3/8 47 21 55 80 32 8 100 75 28 32 13 12 130 75 155 22 20 15 M12 x 1.75 26 26 29 M22 x 1.5 35 30 1/2 57 26 65 100 38 6.5 118 90 35.5 35 13 16 145 90 172 27 19 16 M12 x 1.75 27 26 34 M27 x 2

7

20 15 15 2 x M6 thread depth 11 (for YA type) 2 x M6 thread depth 11 (for IA type) 35 15 18 2 x M6 thread depth 11 (for IA type) 2 x M6 thread depth 11 (for YA type) 20 20 20 20 57 40 17 17 A 19.5 0.2 0.5 25 15 45 45 60 60 Material: Cast iron Unit: mm Material: Cast iron Part no.

•

(mm) 42 18 M1 6x 1.5 15 20 ,Bore size LT LX LV MM N P S (mm) X I V Without rOO boot" With rod bOot H ZZ f h t ZZl 133 l,t. stroke 296 45 I 20 110 273 75 40 125 8 1{)() 156.5 M30 x 1.5 305 1/2 98 45 1 30 110 283 75 40 140 9 112 178.5 M30 x 1.5 30,S 1/2 98 133 I ; stroke 306 so l 25 120 301 75 40 160 9 118 194.5 M36 x 1.5 345 3/4 106 141 I, ,,"slroke 322 ..

VQZ1000/2000/3000

Without light AXT100-20-1 With Indicator Light DIN Rail Removal/Mounting Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC Voltage symbol 24V 12V 100V 200V 110V 220V Part no. AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Circuit with indicator light Removing 1. Loosen the clamp screw on the (A) side of both ends of the manifold. 2.

Table of Contents

220 55 114 89 75 56 M6 x 1 9 50 msec Analog output 1 to 5 VDC PF2A7H--68 69(-M) 4 to 20 mADC 5 20 Analog output [mA] Analog output [V] 1 4 Min. measured flow rate value Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Max. measured flow rate value Real-time flow rate [l/min] Minimum measured flow rate value [l/min] Maximum measured flow rate value [

Table of Contents

+ #$ G C D T . %. .* $ %$* / % 0 1* $ %2 2 20 21* +," # $ %&"'(" )* ,# $ %&"'(" )* ++" # $ %&"'(" )* +, #$ 17-3-75 6 The VX series will be revised shortly.

C85

6 40 75{81} 30 70{76} 12.8 4.5 16 3.2 22 13 4.5 12.8 26 38 35 23.8 11 26 5 3.2 25 4 10 20 6 40 75(80) 30 70(75) 12.8 4.5 16 3.2 22 13 4.5 12.8 26 38 35 23.8 11 26 5 3.2 25 4 12 25 8 52 88(90) 40 80(82) 18 5.5 20 4 30 18 5.5 18 33 58 42 32 14 38 6 4 32 6 16 25 8 52 88(90) 40 80(82) 18 5.5 20 4 30 18 5.5 18 33 58 42 32 14 38 6 4 32 6 20 32 8 66 103 50 96 19 6.6 25 5 40 20 6.6 19 42 66 54 36

ITV

Output pressure (kPa) G 20 0.5 0.5 Return PPA 40 0 0 Out AL 60 0.5 0.5 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (% F.S.) Input signal (% F.S.)

Compact Cylinder with Air Cushion

Mounting bolt C D Mounting bolt Mounting bolt D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

2 Phase Stepper Motor/Without Motor Brake Series LXP

(A contact) 50mm 75mm 100mm 125mm 150mm 170mm 200mm 50 75 100 125 150 170 200 N.O. (A contact) Use a driver with CE marking.

ISO Standard Hydraulic Cylinder

CHQ (n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) 2 (Different surfaces and same surface), 1 20 65 95 85 80 75 CHK (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 D-M9V/M9WV 20 + 30 65 + 30 75 + 30 80 + 30 85 + 30 95 + 30 "n" pcs.

CS1

50 36 59 16 15 35 14 19 14 30 98 47 90 43 31 to 1400 Lube Non-lube Air-hydro 128 M30 X 1.5 1/2 161 75 40 160 212 112 255 M14 X 1.5 110 232 133 255 50 36 59 16 15 35 20 47 90 43 14 19 31 24 98 to 1400 0.2 X Stroke 144 M36 X 1.5 3/4 182 18.5 106 75 40 180 236 118 275 M16 X 1.5 120 252 141 273 20 19 56 53 40 90 59 43 14 17 36 26 39 to 1400 162 3/4 M40 X 1.5 204 85 45 18.5 111 200 115 265 132

MXF

specifications for guide unit Standard Stroke Standard stroke (mm) Model MXF8 10, 20, 30 MXF12 20, 30, 50 MXF16 30, 50, 75 MXF20 30, 50, 75, 100 Weight (g) Standard stroke (mm) Model 100 75 50 30 20 10 MXF8 170 130 120 MXF12 360 250 210 MXF16 690 500 360 MXF20 1370 1060 750 600 8-6-3 4 Series MXF Table Deflection (Reference values) Table Displacement due to Pitch Moment Load Table