7

9 100 12 100 12 100 15 100 15 100 Note 1) Apparent power: The value at ambient temperature of 20C and when the rated voltage is applied.

SV

300 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS2201F -02-08 AS2200-02 100 200 50 100 0 0 SV100 ANA1 -C08 T0604 SV200 ANA1 -C10 T0806 200 CM2 32 400 MB 50 300 150 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS3201F -02-08 AS3000-02 200 100 100 50 0 0 200 CM2 40 400 MB 63 150 300 Stroke (mm) Stroke (mm) AS2201F -02-06 AS2200-02 100 AS4000-03 200 50 100 0 0 Solenoid valve Silencer

SYJ300/500/700

Bracket AC (50/60 Hz) Nil: Without bracket F: With bracket 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] 3 port For type W, DC voltage is only available.

Thermo-con/Rack Mount Type

Overcurrent protector 10 A 14 A Current consumption 5 A (100 V) to 2.5 A (240 V) 9 A (100 V) to 4 A (240 V) 10 A (100 V) to 4 A (240 V) 8 A (200 V) Power consumption 440 W*1 850 W*1 900 W*2 1500 W*2 Alarm Refer to Alarm.

Series AK1000

40 60 80 Flow rate (slpm, N2) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

New

For Air 1.0 Downstream pressure of valve (P2) [MPa] Upstream pressure of valve P1z1.0 MPa 0.8 Subsonic 0.9 0.6 Critical pressure 0.8 0.7 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 3/64 (1.2) 50 100 150 3/32 (2.4) 100 200 300 400 1/8 (3.2) 300 200 100 400 500 600 700 5/32 (4) 200 1, 000 800 400 600 7/32 (5.6) Series VXN2 250 500 7/32 (5.6) Series VXN3 500 1, 000 1, 500 2, 000 Flow rate Q [L/min

Applicable Auto Switch Model

(Tolerance 30%) 5.3-36 Solid State Switch/Tie-rod Mounting D-F5l/D-J5l Applicable Actuator Series Grommet Series Bore size (mm) CDA1, CDBA1, CDV3, CDVS1, 40, 50, 63, 80, 100 CDLA, CNA CDL1 40, 50, 63, 80, 100, 125, 140, 160 CDS1 125, 140, 160, 180, 200 CE2 40, 50, 63, 80, 100 MDB 32, 40, 63, 80, 100 Specifications D-F5l/D-J5l PLC: Programmable Logic Controller D-F59 D-F5P D-J59 D-J51 Auto

JA/JAH/JB/JS

125, 140 160 12 16 20 25 40 63 80 100 140 160 3-050 4-070 5-080 6-100 8-125 10-150 16-200 20-250 22-250 24-300 Precautions 2.

JA/JAH/JB/JS

125, 140 160 12 16 20 25 40 63 80 100 140 160 3-050 4-070 5-080 6-100 8-125 10-150 16-200 20-250 22-250 24-300 Precautions 2.

Table of Contents

Inch size ARJ310F-N01 5/32" 1/4" 03 07 14-4-11 9 Series ARJ310 Flow Characteristics Inlet pressure: 0.7 MPa ARJ310-01 ARJ310F-01-04 ARJ310F-01-06 0.7 0.7 0.7 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0.0 0.0 0.0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow

Air-hydro Unit

800 400 30 Capacity of converter (cm3) 300 CC CC 25 600 500 400 100 CRA1H100-180 200 20 CRA1H100-90 300 300 100 CRA1H80-180 200 200 150 CRA1H80-90 50 CRA1H63-180 100 100 80 CRA1H63-90 CRA1H50-180 60 50 40 50 CRA1H50-90 30 Selected model of rotary actuator 160 100 63 40 20 100 200 300 400 500 600 700 800 Nominal size of converter (mm) Cylinder stroke (mm) How to read the graph (ex: when using

2 Phase Stepper Motor/Without Motor Brake Series LXS

X12 100/110VAC Tamagawa Seiki Co., Ltd 113.5 82.5 X13 200/220VAC MSD3A1P1E MSD3A1P1E MSD3A3P1E MSD3A3P1E MR-C10A1 MR-C10A1 MR-C10A MR-C10A SGDE-A3BP SGDE-A3BP SGDE-A3AP SGDE-A3AP X15 100/115VAC Matsushita Electric Industrial Co., Ltd. 120.5 88.5 X16 200/230VAC 30W X18 100/115VAC Mitsubishi Electric Corporation 117 89 X19 200/230VAC X21 100/115VAC Yaskawa Electric Corporation 124.5 93 X22

V

) Operating Pressure 2 Position Double 0.1 ~ 0.7 (14.5 ~ 100) Range MPa (PSI) 3 Position 0.2 ~ 0.7 (30 ~ 100) External Pilot 2 Position Single 0.25 ~ 0.7 (37 ~ 100) Operating Pressure 2 Position Double 0.25 ~ 0.7 (37 ~ 100) Range MPa (PSI) 3 Position 0.25 ~ 0.7 (37 ~ 100) Ambient & Fluid Temperature C / F Max 50C / 122F Max Operating 2 Position Single 10 5 Frequency Hz 3 Position 3 3 Manual

CNG

CNG 2 2 MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 1 CNA 0.5 100 500 400 300 200 100 0.5 500 400 300 200 1000 1000 Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CLS 200 200 CLQ 100 100

Refrigerated Air Dryer

VAC (50 Hz), 100 to 110 VAC (60 Hz) Single phase: 200 VAC (50 Hz), 200 to 220 VAC (60 Hz) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50/60 Hz Power consumption (W) 350/405 208/236 180/202 100 V 5.5/5.6 3.0/3.1 2.4/2.5 Operating current (A) 50/60 Hz 200 V 2.8

HRL

Cooling capacity Power supply CH1 CH2 100 9 kW 1 kW 200 19 kW 1 kW 300 26 kW 1 kW 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) Pipe thread type Nil Rc F G (with Rc-G conversion fitting) N NPT (with Rc-NPT conversion fitting) Cooling method A Air-cooled refrigeration Specifications Model HRL100-Am-20 HRL200-Am-20 HRL300-Am-20 CH1 CH2 CH1 CH2 CH1 CH2 Cooling method Air-cooled

53

Protection Circuit Item Unit Standard value Influence Corrosion Scale generation Caution pH (at 25C) 6.5 to 8.2 v v Electric conductivity (25C) [S/cm] 100* to 800* v v Chloride ion (Cl) [mg/L] 200 or less v Sulfuric acid ion (SO42) [mg/L] 200 or less v If operating in the below conditions, the protection circuit will activate and an operation may not be performed or will stop.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Lead 20: LEKFS40EA Lead 30: LEKFS40EH 20 10 10 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] 5 Model Selection LEKFS Series Battery-less Absolute (Step Motor 24 VDC) SpeedWork Load Graph (Guide) For Battery-less Absolute (Step Motor 24 VDC), Motor Parallel Type * The following graphs show the values when the moving force is 100%.

Uniaxial Electric Actuator Series LJ1

100% Horizontal load 50% Horizontal load 100% Horizontal load 50% 50 100 200 50 100 200 20 20 10 10 5 5 Lateral load 100% Lateral load 50% Lateral load 100% Lateral load 50% 1 2 1 2 0.5 0.5 Horizontal empty weight deflection Lateral empty weight deflection Horizontal empty weight deflection Lateral empty weight deflection 0.1 0.2 0.1 0.2 100 200 300 500 1000 100 200 300 500 1000 Load point

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

. *2 Excludes the PF2M725 *3 Made to order (Produced upon receipt of order) Flow ratio*2 100: 1 25 50 100 200 Flow range [L/min] Port size Smallest settable increment 0.1 0.01 0.05 0.02 0.3 0.5 1 2 3 5 10 0.01 1 0.001 PF2M701 0.02 2 C43, C6, 1/8 PF2M702 0.05 5 PF2M705 0.01 0.1 10 PF2M710 0.3 25 PF2M725 C6, N7, 1/8 0.5 50 PF2M750 0.1 1 100 PF2M711 C8, N7, 1/4 2 200 1 PF2M721 New New Compatible