VQ7-6/7-8

Applicable solenoid or air operated valve VV71-FPG Series VQ7-6 R1 R2 R1 R2 R1 R2 One solenoid energized (One pilot pressurized) 130 P Leakage cm/min (ANR) 130 Both solenoids unenergized (Both pilots unpressurized) P B A 0 Interface regulator P A B ARB250-00By mounting an interface regulator on a manifold block, it is possible to regulate each valve. 1 1 2 4 1 2 4 4 2 3 5 3 5 5 3 P reduced

CJ2X/CUX/CQSX/CQ2X/CM2X

Low Speed Cylinder Double Acting, Single Rod Series CJ2X 10, 16 How to Order Bore size 10 16 10 mm 16 mm Standard stroke (mm) 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate stroke other than above is manufactured upon receipt of order.

CJ2X/CUX/CQSX/CQ2X/CM2X

Low Speed Cylinder Double Acting, Single Rod Series CJ2X 10, 16 How to Order Bore size 10 16 10 mm 16 mm Standard stroke (mm) 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate stroke other than above is manufactured upon receipt of order.

Microspeed Cylinder

Bore size (mm) Standard strokes (mm) 10 15, 30, 45, 60, 75, 100, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting Precautions Caution Mounting and Accessories 1. When mounting, hold the rod cover and apply an appropriate tightening force to the mounting nut, or fasten by applying the appropriate tightening force to the rod cover body.

Precision Cylinder Series MTS

MT-S16 16 Weights MT-S20 20 (g) MT-S25 25 End lock additional weight 50 157 222 400 547 1,000 1,533 Standard stroke (mm) MT-S32 32 Model 200 699 912 1,495 2,208 25 52 138 186 350 487 918 1,420 175 649 851 1,412 2,095 5 36 150 599 790 1,330 1,983 10 40 125 549 729 1,247 1,870 15 44 100 194 294 500 669 1,165 1,758 20 48 75 175 258 450 608 1,083 1,645 30 56 MT-S40 40 MTS8 MTS12 MTS16 MTS20

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Station n L1 L2 Station 2 50 41 Station 20 338 329 3 66 57 4 82 73 5 98 89 6 114 105 7 130 121 8 146 137 9 162 153 10 178 169 11 194 185 12 210 201 13 226 217 14 242 233 15 258 249 16 274 265 17 290 281 18 306 297 19 322 313 Port size One-touch fitting 26 Series SYJ500 Type 41 Manifold: Side Ported/SS3YJ5-41Stations -M5, 01 [ ] for AC For 1/8 Grommet (G) For M5 (Pitch) P=16 18 (Pitch) P

EX500-GPR1A.eng

L3 [mm] 67 88 109 130 151 172 193 214 L2 [mm] 72 93 114 135 156 177 198 219 L1 [mm] 83 104 125 146 167 188 209 230 M3 18 : 2 pcs. ( Hexagon socket head cap screw ( with spring washer )) Note NOTE Holding with hand so that there will be no gap between units and tighten the bolts.

Table of Contents

128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 14-3-9 10 Series AV2000/3000/4000/5000 Connecting Spacer for Modular Style F.R.L.

Compact Cylinder with Air Cushion

Mounting bolt C D Mounting bolt Mounting bolt D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

RQ

Mounting bolt C D Mounting bolt Mounting bolt Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

Heatless Desiccant Compressed Air Dryers

55 36.0 IDW65N 141 65 7 43.5 IDW85N 85 165 1" 55.8 IDW105N 105 200 20.5 63.5 IDW135N 135 224 1-1/4" 79.5 IDW175N 175 271 55.8 IDW215N 215 378 13.5 63.5 Duplex 1-1/2" IDW275N 275 422 79.5 IDW365N 365 510 1.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

supply By-pass Strainer Silencer Throttle Transfer fluid 4 Series PA3000/5000 Process Pump Automatically Operated Type Dimensions/Automatically Operated Type (mm) 1in = 25.4mm PA3000 68 85 105 4-7 7.5 (185) Reset button FLUID OUT 3/8 5.5 AIR SUP (pilot air supply port) 1/4 FLUID OUT PROCESS PUMP AIR SUP 2 115 90 74.5 FLUID I N AIR EXH AIR EXH (pilot air exhaust port) 44.5 3 32 1/4 100 130

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Circuit example (1) 3 port solenoid valve Process pump PAX112 Regulator Ball valve Air filter FLUID OUT AIR SUP FLUID IN Air supply AIR EXH Strainer Silencer Throttle Transfer fluid 14 Series PAX1000 Dimensions 4-M8 (M6 hexagon socket head screw can be inserted) 10.5 105 7.5 Mounting hole detail 69 Reset button 100 125 23 RESET (175) AIR SUP (pilot air supply port) Rc 1/4 FLUID IN Rc 1/4

PA3000/5000/PAX1000

pump Regulator AIR SUP FLUID OUT AIR EXH FLUID IN Air supply By-pass Strainer Silencer Throttle Transfer fluid 4 Series PA3000/5000 Dimensions/Automatically Operated Type PA3000 68 85 105 4-7 7.5 (185) Reset button FLUID OUT Rc 3/8 5.5 AIR SUP (pilot air supply port) Rc 1/4 FLUID OUT PROCESS PUMP AIR SUP 2 115 90 74.5 FLUID I N AIR EXH AIR EXH (pilot air exhaust port) 44.5 3 32 Rc 1/4 100 130

VXP21/22/23

0.7 0.7 1.0 0.7 1.0 1.0 1 4 740 500 740 420 420 VXP2130-03 VXP2140-03 VXP2130-04 VXP2140-04 VXP2150-06 0.04 0.04 0.04 0.04 0.04 0.04 0.5 0.5 1.0 0.5 1.0 1.0 0.9 0.9 1.0 0.9 1.0 1.0 0.7 0.7 1.0 0.7 1.0 1.0 0.9 0.9 1.0 0.9 1.0 1.0 2.0 2.4 5.0 2.4 5.5 9.2 0.5 0.5 0.7 0.5 0.7 0.7 0.35 0.35 0.35 0.35 0.35 0.30 8.5 9.2 18 9.2 20 38 0.4 0.4 0.7 0.4 0.7 0.7 1.9 2.4 4.2 2.4 5.3 9.2 46 58 100 58 130

SMC Pneumatic Clean Series

0.8 GA RA H1 GA 2-P (Rc, NPT, G) MM Rod side air port Relief port Relief port Head side air port RA MM H1 Width across flats B1 1 2 1 2 Width acros flats B1 D D E-0.05 0 E-0.05 0 I H + Stroke K A AL AL C0.1 KA H A K F F 8-J S + Stroke ZZ + 2 Stroke NA (mm) 26 20 16.5 14 C 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 13<10> 20<18> 20 20 GA 50 40 40 35 H 8 6 6 5 H1 19 17 17 13 B1 47 38 31 26 I 187 175

MLU

Piston rod Standard stroke (mm) Locking direction Bore size (mm) Series 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 LOCK LOCK Load direction Fulcrum FREE 25 Extension lock 32 MLU Pivot 40 Retraction lock Clearance 50 9-13-2 9-13-3 3 Series MLU Specific Product Precautions 1 Be sure to read before handling. Selection Selection Warning Allowable Load Weight 1.

MXF

31-1.) 220 188 157 126 94 63 OUT 314 20 10 165 142 118 94 71 47 IN 236 Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm2) Symbol Specifications -X42 Anti-corrosive specifications for guide unit Standard Stroke Standard stroke (mm) Model MXF8 10, 20, 30 MXF12 20, 30, 50 MXF16 30, 50, 75 MXF20 30, 50, 75, 100 Weight (g) Standard stroke (mm) Model 100 75 50 30 20 10 MXF8 170 130

Plate Cylinder with Lock Series MLU

Foot type Flange type Knuckle joint Clevis type Flexible mounting: Possible to mount on all surfaces except for the one with ports Bottom mounting type Side mounting type Axial surface mounting Series Variations Standard stroke (mm) Locking direction Bore size (mm) Series 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 25 Extension lock 32 MLU 40 Retraction lock 50 Features 2

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Inch sizes 1/4", 5/16" 3/16" 5/32" 3/16", 1/4" 1/8", 5/32", 3/16", 1/4" l/min (ANR) {Nl/min} Flow rate 12 38 7 Controlled flow Effective area mm 0.2 0.6 0.1 l/min (ANR) {Nl/min} Flow rate 460 100 290 130 230 Free flow Effective area mm 7 1.5 4.5 2 3.5 Note) Flow rates are values measured with pressure at 0.5MPa and temperature at 20C.