End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

300 6.8 25 102 3.2 131 400 300 34 30 37 107 30 9 14 133 142 8 10 32 32 52 36 108 116 118 40 4 40 55 20 8 21 7 4 60 75 9 10 19 450 300 300 6.8 28 102 3.2 135 450 300 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 47 4 40 55 20 8 25 7 4 60 75 9 10 19 450 300 300 6.8 28 104 3.2 137 450 300 40 37 41 113 30 9 14 139 148 9 10 40 40 60 40 114 122 124 47 4 40 55 20 8 25 7 4 60 75 9

Air Catch Sensor

50 50 0.1MPa Hysteresis (m) Hysteresis (m) Hysteresis (m) 0.1MPa 40 40 40 Supply pressure 30 30 30 0.1MPa 20 20 20 0.15MPa 0.15MPa 0.15MPa 10 10 10 0.2MPa 0.2MPa 0.2MPa 100 200 300 0 100 200 300 0 100 200 300 0 Detection distance (m) Detection distance (m) Detection distance (m) Example 1) When requiring 300m detection, select the detection nozzle of 1.0 with supply pressure 0.2MPa.

IR1000/2000/3000

55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 100 0 20 40 60 80 100 120 57.0 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV3000 IRV3000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0 100 95 90 85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160 VAC side pressure (kPa) Flow rate

SMC Pneumatic Clean Series

Up to 300 Up to 300 50 35 32 Up to 300 63 80 100 50 40 40 35 H A 8 6 6 5 H1 47 38 31 26 I 13<10> 20<18> 20 20 GA 19 17 17 13 B1 6 5.5 5.5 5 K 44 35.5 29 24 NA 9 7 7 7 RA 26 20 16.5 14 C 130 121 119 114 ZZ 14 10 8 6 KA 78 79 77 77 S 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 40 32 25 20 30 22 22 18 23 0<23> 0 0 10 0 0 0 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M14 x 1.5 M6 x 1 depth 12 12 12 1/4 1/4

Series AK1000

0.48 30 0.21 60 25 0.17 0.41 20 0.14 50 0.34 15 0.10 10 0.07 40 0.28 0 5 0.00 0.03 30 0.21 0 100 200 300 400 500 600 700 800 900 1000 Flow rate (slpm, N2) 0 50 100 150 200 250 300 350 400 450 500 550 600 650 700 Flow rate (slpm, N2) AK1200HF 150 psig (1.0 MPa) 50 psig (0.34 MPa) Inlet pressure: 100 psig (0.69 MPa) AK1200FC Inlet pressure: 150 psig (1.0 MPa) 3/4 inch connections ) 100 0.69

Free Mount Cylinder

(g) Stroke (mm) Model 5 10 15 20 25 30 40 50 60 70 80 90 100 33 (38) 36 (46) 40 (50) 43 (53) 46 (56) 50 (60) 57 (67) 64 (74) 71 (81) C(D)UKW6-D 51 (56) 56 (66) 60 (70) 65 (75) 69 (79) 74 (84) 83 (93) 92 (102) 101 (111) C(D)UKW10-D 84 (109) 91 (121) 98 (128) 105 (135) 112 (142) 119 (149) 133 (163) 147 (177) 161 (191) C(D)UKW16-D 150 (185) 163 (203) 177 (217) 191 (231) 205 (245) 219 (259) 247

Sine Rodless Cylinder Series REBR Direct Mount Type

70 100 300 500600 70 100 300 500600 Maximum speed U (mm/s) Maximum speed U (mm/s) 72 Sine Rodless Cylinder High Precision Guide Type Series REBH Moment generated by the self weight of the load even when the cylinder is stopped Static moment Pitch moment M1 = WL Yaw moment M3 = W(LA) Roll moment M2 = WL (mm) Model REBH15 REBH25 REBHT25 REBHT32 A 17.5 23.5 0 L L A L

70astamb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

mb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

HRX-OM-S004

5.21.1 Communication function . 5-70 5.21.2 Setting/checking of communication function . 5-70 Chapter 6 Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm buzzer stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release the thermal relay trip and circuit protector . 6-8 6.3.3 How to release the pump thermal

air-filter-e

Fiber Paper Micromesh Specifications Model 4 65 to 70 x L250 FGETB FGETC FGETA FGESA Note 1) FGESB Note 1) FGESC Note 1) FGELA Note 1) FGELB Note 1) FGELC Note 1) Number of elements 8 65 x L250 12 65 x L250 4 Note 2) 8 4 Note 2) 12 4 65 to 70 x L250 4 Note 2) 8 4 Note 2) 12 4 65 x L250 4 Note 2) 4 Note 2) 65 to 70 x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 to 70 x L500 65 to

Air Preparation Equipment

Fiber Paper Micromesh Specifications Model 4 65 to 70 x L250 FGETB FGETC FGETA FGESA Note 1) FGESB Note 1) FGESC Note 1) FGELA Note 1) FGELB Note 1) FGELC Note 1) Number of elements 8 65 x L250 12 65 x L250 4 Note 2) 8 4 Note 2) 12 4 65 to 70 x L250 4 Note 2) 8 4 Note 2) 12 4 65 x L250 4 Note 2) 4 Note 2) 65 to 70 x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 to 70 x L500 65 to

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

With air cushion FT F 4 x FD 0 E0.05 FX0.15 B B FX0.15 (mm) Bore size 40 B 61 E 25 F 2 FX 46 FD 6.6 FT 8 50 63 76 92 30 32 2 2 58 70 9 11 9 9 Note) End boss is machined on the flange for E. Other dimensions are the same as basic type.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

With brake: 150 Without brake: 115 Housing 36.5 32 Thread size M4 x 0.7 6 4 70 M5 x 0.8 6 4 70 Effective thread length (mm) Quantity P.C.D. B 89 A A B Section BB Coupling P.C.D.

HRX-OM-X037

Status (2): The temperature is in the "High/Low range, but no TEMP READY signal is generated since Ready Time is set at 300 sec at this point. Status (3): The 300 sec count for Ready Time is reset since the temperature is now outside of the Low range. Status (4): The 300 sec count for Ready Time starts since the temperature is now within the High/Low range.

17

0.1 0.06 1 0.1 0.02 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Technical Data Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s 1187 Mechanically Jointed Rodless Cylinder Basic Type 25, 32, 40 MY1B Series RoHS How to Order M9BW 25 Z 300 MY1B Basic type Made to Order Refer to page 1189 for details

SYJ3000/5000/7000

Standard length is 300 mm, but the following lengths are also available.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

size Lubrication Model Rubber Air M3 x 0.5 12-CY3B6 6 300 50, 100, 150, 200 M5 x 0.8 12-CY3B10 10 500 50, 100, 150, 200, 250, 300 12-CY3B15 15 1000 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rc1/8 NPT1/8 G1/8 12-CY3B25 25 (Both sides) Non-lube 12-CY3B32 32 1300 Rc1/4 NPT1/4 G1/4 12-CY3B40 40 100, 150, 200, 250