High Vacuum Angle Valve

Uniform baking temperature 108 300 10.6 300 138 315 18.5 800 Common to all series.

Table of Contents

Output specifications (Vacuum switch) NPN open collector, single output Analog, no output, 3 turn setting 14 Electrical entry 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC NPN open collector, single output Analog, no output, 200 degree setting 15 G H L LN LO M MN MO Lead wire length 300 mm Lead wire length 600 mm With lead wires (Length 300 mm) Without lead wires Without connector With lead

LEF-OM006xx

0 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 0 100 200 300 400 500 600 V (mm/s) LEFS 16 LEFS 25 LEFS 32 50 12 20 W(kg) W(kg) 10 W(kg) W(kg) W(kg) W(kg) 6 40 6 15 8 30 8 6 8 10 5 5 20 4 5 12 10 16 10 12 16 10 2 0 0 0 0 100 200 300 400 500 600 V (mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) -9- (1)(DC24V) LEFS40 (mm) 1) 200

Proposals for Energy Saving

D Outside diameter L1 1.5 2 2 2.5 2.5 3 1.5 2 2 2.5 2.5 3 6 6 8 8 10 10 6 6 8 8 10 10 300 300 300 300 300 300 600 600 600 600 600 600 KNL3-06-150 KNL3-06-200 KNL3-08-200 KNL3-08-250 KNL3-10-250 KNL3-10-300 KNL6-06-150 KNL6-06-200 KNL6-08-200 KNL6-08-250 KNL6-10-250 KNL6-10-300 O.D.

MGG

(mm) Bore size (mm) Stroke range (mm) AL AK AP AJ AI AH AG N AB M AA L K J I V B U T A O P S 63 80 100 12 14 60 180 158 250 228 100 25 66 25 180 135 117 65 108 228 192 30 M12 x 1.75 depth 23 Rc 1/4 200 72 75, 100, 125 150, 200, 250 300 16 14 70 200 178 284 262 115 27 76 30 214 160 138 75 128 262 224 M12 x 1.75 depth 28 Rc 3/8 35 230 89 16 16 80 226 200 326 300 125 30 80 32 245 190 153 85

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Note 2) DIN is applicble to VQZ 200 and 300. Note 3) Electrical entry of pilot valve for VQZ100(L and M) is opposite side of valve body part number.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Piston speed mm/s Piston speed mm/s Features 6 Series MY2H Maximum Allowable Moment/Maximum Allowable Load Moment/MY2HT (Double axis) MY2HT/M3 MY2HT/M1 MY2HT/M2 300 300 300 200 200 200 100 100 100 Moment Nm Moment Nm Moment Nm 50 50 50 MY2H40 40 40 40 MY2H40 MY2H40 30 30 30 MY2H25 20 20 20 MY2H25 MY2H25 MY2H16 10 10 10 MY2H16 MY2H16 8 8 8 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500

2 Phase Stepper Motor/Without Motor Brake Series LXP

34 44 52 120 90 4-M6 x 1 Section C 30 D Refer to page 300 for mounting.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

18 353 365 387.5 398 11 220 232 262.5 273 12 239 251 275 285.5 13 258 270 300 310.5 6 125 137 162.5 173 7 144 156 187.5 198 8 163 175 200 210.5 9 182 194 225 235.5 10 201 213 237.5 248 3 68 80 100 110.5 4 87 99 125 135.5 5 106 118 137.5 148 L1 L2 L3 L4 2.10-16 VQZ100/200/300 Body Ported Manifold Options Blank plate VVQZ100-10A-2 VVQZ200-10A-2 VVQZ300-10A-2 This is used when removing the

CA2

Bore size (mm) Standard stroke (mm) 2040 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Data 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Intermediate strokes not listed above are also available.

Refrigerated Air Dryers

VAC (50 Hz) *5 Single-phase/Three-phase: 200/220 VAC (60 Hz) Three-phase: 200 VAC (50 Hz) Three-phase: 200/220 VAC (60 Hz) Single-phase 200 V 810/940 810/940 Power consumption [W] Electric specifications 50/60 Hz *6 Three-phase 200 V 850/1070 850/1070 1450/1890 2000/2500 Single-phase 200 V 4.3/4.7 4.3/4.7 Operating current [A] Refrigerant R407C (HFC) IDF F 50/60 Hz *6 Three-phase 200

C95

63 63 100 80 CP95 200 200 50 40 50 50 100 100 C95 63 Load weight: m [kg] Load weight: m [kg] 32 50 40 50 40 30 50 40 30 C92 32 20 20 CA1 [Example] 10 10 CS1 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 s] Maximum speed: V [m m/ s] Maximum speed: V [m m/ Graph 7 Graph 4 0.5MPaP 0.5MPaP 1000 1000 100 80 500 400 300 500 400 300 63 100 80 50 40 200 200 63 100 100 Load

Series VQ Base Mounted Metal Seal/Rubber Seal

219 275 285.5 13 208.5 262.5 273 12 198 262.5 273 9 166.5 225 235.5 8 156 212.5 223 7 145.5 200 210.5 6 135 200 210.5 5 124.5 187.5 198 4 114 175 185.5 3 103.5 162.5 173 2 93 150 160.5 L1 L2 L3 Dimensions/Side entry connector [-FS] (mm) L n 11 262.5 273 10 250 260.5 16 312.5 323 15 312.5 323 14 300 310.5 13 287.5 298 12 275 285.5 9 250 260.5 8 237.5 248 7 225 235.5 6 212.5 223 5 200 210.5

LEY-OM007

250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg) 0.580.62 0.73 0.87 0.98 1.09 1.20 1.181.25 1.42 1.68 1.86 2.03 2.21 2.382.56 2.09 2.20 2.49 2.77 3.17 3.46 3.74 4.03 4.32 4.60 4.89 LEY 16 D LEY 25 D LEY 32 D [mm] 1) 30 50 100 150 200 250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg) 0.580.62 0.73 0.87 0.98 1.09

smcmaintenancepartslist

NBR Valve seal Tube gasket Standard (non-lube) Piston gasket 125 140 160 180 200 250 300 CS1N125A-PS CS1N140A-PS CS1N160A-PS CS1N180A-PS CS1N200A-PS CS1N250A-PS CS1N300A-PS Retaining plate gasket Guide gasket Component part numbers: @3, @5, @6, @7, @8, #0. Seal kit includes a grease pack (125 to 160: 40 g, 180 and 200: 50 g, 250 and 300: 60 g).

MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

Series AP500

Flow rate (slpm, N2) AP1400T 2000 psig (13.8 MPa) 200 psig (1.4 MPa) Inlet pressure: 600 psig (4.1 MPa) 1.5 (38.1) 0.55 80 0.48 70 Delivery pressure (MPa) 2.62 (66.5) Delivery pressure (psig) 0.41 60 0.34 50 0.28 40 0.69 (17.5) 0.21 30 0.14 20 A B 0.07 10 0.88 (22.4) 0.00 0 0 100 200 300 400 500 600 700 800 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.3 (7.6) (Mounting hole) AP1402TA Inlet

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

D Spacer (Ym-D) Spacer with bracket (YmT-D) V q Body size [Applicable size] Symbol Description 200 [JSXM20] 300 [JSXM30] 400 [JSXM40] V w Bracket Nil Spacer V V V T Spacer with bracket V V V Standard Specifications Fluid Air Ambient and fluid temperatures 5 to 60C (No freezing) Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Replacement Parts Description Material Part number Y200-

70astamb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

mb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175