Stability of suction position,

0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50UM ZP3E-125UM 4 8 Displacement [mm] Displacement [mm] 3 6 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-63UM 6 Displacement [mm] 4 N, S, U, F, CL 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure

Proposals for Energy Saving

32, 40, 50, 63 40, 50, 63, 80, 100 125, 140, 160, 180, 200, 250, 300 20, 25, 32, 40, 50, 63, 80, 100 20, 25, 32, 40, 50, 63, 80, 100 20, 25, 32, 40, 50, 63, 80, 100 32, 40, 50, 63, 80, 100 32, 40, 50 Wiper ring SCB scraper CVM5: Rubber bumper CV3, CVS1: Air cushion None Rubber bumper Rubber bumper (base cylinder unit) Air cushion (base cylinder unit) Rubber bumper Air cushion Rubber bumper

Integrated Controller

Motor Maintain a space of 40 mm or more. e-Actuator rod type built-in magnet portion (Piston) 40 40 40 Maintain a space of 40 mm or more. 40 40 e-Actuator slider type built-in magnet portion (Table unit) An air cylinder with an auto switch cannot be installed in the shaded area. 63 These safety instructions are intended to prevent hazardous situations and/or equipment damage.

AC

Model Port size M B B A B C D P E F G H J K L 8, 1 4 1 40 53 70 75 97.5 129 165 169 11 14 18 20 40 53 70 70 40 56 73 73 17 16 17 14 30 41 50 50 27 40 54 54 22 23 26 25 5.4 6.5 8.5 8.5 8.4 8 10.5 10.5 40 53 70 70 2.3 2.3 2.3 2.3 120.5 AFD2000 AFD3000 AFD4000 AFD4000-06 4, 1 8 3 170 206 210 4 3 2 1 4, 1 8, 3 AFD2000 AFD3000 SAC2000, #1 SAC2503, #1 AFD4000 AFD4000-06 SAC4000, #1 SAC4006,

Cylinder with Lock Series MNB

L1 E1 R1 U1 A1 U1 R1 A MM NDH10 NZ MM NDH10 NX NX E1 L1 30 40 50 60 60 20 22 28 40 40 12 12.5 16.5 23.5 23.5 16 19 24 34 34 32 40 50, 63 80 100 32 40 50, 63 80 100 14 19 24 26 26 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 M10x1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

0.02 0.01 63 80 100 Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

0.02 0.01 63 80 100 Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod

CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-XC8 to XC11 1 2 Reversed Shaft Change of Rotating Range -XC7 CRB2 CRBU2 CRA1 Refer to How to Order on page 11-7-40. XC8 CRA1 Refer toHow to Order on page 11-7-40.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-XC8 to XC11 1 2 Reversed Shaft Change of Rotating Range -XC7 CRB2 CRBU2 CRA1 Refer to How to Order on page 11-7-40. XC8 CRA1 Refer toHow to Order on page 11-7-40.

V

(i) Side Entry Single Sub-base for use with the Base Mounted Valve (Type 40). (ii) 2-10 Station Type 20 Mmanifold for use with the Body Ported Valve (Type 20). (iii) 2-10 Station Type 40 Side Entry Manifold for use with the Base Mounted Valve (Type 40). (iv) 2 10 Station Type 40 Bottom Entry Manifold for use with the Base Mounted Valve (Type 40).

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

25, 50, 75 100, 125, 150, 175 200, 250, 300, 350 11 12 14 107 44 20 16 47 64 148 M8 35 64 6.8 19 50 7 13.5 16.5 115 49 20 16 50 78 162 M10 38 77 7.5 19 63 16.5 6.5 Bore size (mm) J K L MM ML NN OA OB OL P PA PB PW Q R S T U VA 18 27 27 40 20 6.6 11 7.5 1/8 13 38 30 104 44 118 86 106 40 M8 x 1.25 M8 x 1.25 21.5 32 32 46 22 8.6 14 9 1/4 9 47 40 130 60 146 110 130 50 M10 x 1.5 M10 x 1.5 28

Rotary Actuator

6 0 0.030 30 80 Rc1/4 92 72 70 20 35 3 50 M12 1.75 depth 13 5 199 (243) 1.5 5 29.5 33 186 (230) 142 22.5 23.5 12 8 13 9 6 0 0.030 40 100 Rc3/8 112 85 85 25 40 4 60 M12 1.75 depth 14 5 259 (325) 1.5 5 39.5 33 245 (311) 172 28 25 12.5 8 14 10 8 0 0.036 45 Note 1) In addition to Rc, G, NPT and NPTF are also available.

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

0.02 0.01 63 80 100 Standard Stroke Table Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40

Lubrication Equipment

A 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 ALBA90-10 ALBA90-20 1.17-24

30

50/63 5 Semi-standard/Thread nominal size JC20-8-100 JC25-10-150 JC32-10-100 JC40-12-125 JC40-12-150 JC40-12-175 JC50-16-150 JC63-16-200 0.5 0.5 0.5 0.75 0.75 0.75 1 1 300 800 800 1250 1250 1250 3100 3100 M8 x 1 M10 x 1.5 M10 x 1 M12 x 1.25 M12 x 1.5 M12 x 1.75 M16 x 1.5 M16 x 2 20 25 32 32/40 40 32/40 50 50/63 5 How to Order 14-150 JC 40 Thread nominal size (Standard) Applicable cylinder

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Type 40 Applicable solenoid valve SYJ514-SYJ514M-SYJ524-SYJ524M-How to Order SS3YJ5--40-05 -M5 R port 1/8 P port 1/8 P, R port thread type Stations A port size 02 : 20 2 stations : 20 stations Applicable blanking plate assembly SYJ500-10-3A Nil A A Rc G NPT NPTF M5 01 M5 x 0.8 1/8 F N T A port M5 x 0.8, 1/8 Note) For more than 9 stations, supply air to both sides of P port and exhaust air

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Note 3) For the inch-size One-touch fittings, refer to page 4-14-40.

Electric Slide Table / High Precision Type 《 AC servo motor 》

Operating humidity range [%RH] 90 or less (No condensation) Regeneration option May be required depending on speed and work load Motor output/Size 100W/40 200W/60 Electric specifications Motor type AC servo motor (100/200 VAC) Encoder Incremental 17-bit encoder (Resolution: 131072 p/rev) Horizontal 45 65 Power consumption [W] *5 Vertical 145 175 Horizontal 2 Standby power consumption when

EX500-GPR1A.eng

TS M12 connector ( socket ) /10 pcs. 40 41 Item No. Solution/Corrective action PROFIBUS DP compatible communication Field wireable connector Communication cable (With one side connector) Terminal plug PCA-1557727(Plug, B-coded) SOL LED is turned on 4 Check the power for solenoid valves/output ( DC24V ) is supplied.