Electric Actuator Triple Axis P&P Unit 105 110 18 110 (T-slot pitch) 10 Stroke+300 60 61 (Refer to 6) 170 18 11.5 45 10 4.5 9.4 T-slot dimension 110 (T-slot pitch) The drawing is an example of the left side mount type. 1) When the entire base of the electric actuator (X axis) must be supported, use dedicated T nuts provided by P/A.
Metal Seal, Rubber Seal 3 port solenoid valve Series VQZ200/300 Piping specifications Solenoid valve Port size Effective area (mm2) (Cv) Flow characteristics C (dm3/(sbar)) VQZ215 VQZ235 VQZ225 VQZ245 VQZ315 VQZ335 VQZ325 VQZ345 1.7 2.3 1.7 2.5 3.0 4.5 2.9 4.4 VQZ 200 1 8 1 4 , Base mounted (With sub-plate) VQZ 300 , 1 4 3 8 Base mounted 3 port solenoid valve Series VK Compact size: Width
, 340 Reinforced pad to prevent deformation when transferring heavy or large work pieces How to Order ZP2 32 H N Pad unit Pad diameter Pad material Symbol Pad diameter 32 150 250 300 340 Symbol Material NBR Silicone rubber FKM CR N S F C 32 150 250 300 340 Note) Silicone rubber is only applicable to the 32 pad.
128 116 94 to 300 146 LJ1S202SC 90 130 118 96 to 300 LJ1H101SC to 500 6 48 LJ1H101PB 122 2 110 44 to 600 104 145 LJ1H101NB 4 46 to 600 LJ1H202SC 124 112 16 58 to 500 LJ1S303SC 146 132 120 92 98 to 300 to 300 to 300 LJ1H202PA 8 50 to 500 124 112 106 LJ1H202NA 12 54 to 500 LJ1H303SE 126 114 22 64 to 500 to 500 to 500 LJ1H202PC 10 52 to 1000 to 740 to 930 to 600 to 500 145 124 112 106
/50 Enclosure Dustproof Electrical entry Grommet Weight (g) Screw mount type 27 Quick disconnect type 29 Characteristics Pressure/Flow Rate Characteristics (without filter) Flow rate (L/min) [at 0.25 MPa] 50 100 150 Power consumption (W) 80 40 10 4 80 40 10 4 80 40 10 4 380 360 340 320 300 280 260 240 220 200 180 160 140 120 100 80 60 40 20 0 C [dm3/(s/bar)] 0.24 0.47 0.70 b 0.24 0.28 0.21
20 25 32 40 Bore size (mm) MK(2) 32 Piston speed (mm/s) 0.5 to 300 40 0.27 0.4 0.65 1.2 Allowable kinetic energy (J) RS Q G Note) Other intermediate strokes can be manufactured upon receipt of order.
1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
20 25 32 40 Bore size (mm) MK(2) 32 Piston speed (mm/s) 0.5 to 300 40 0.27 0.4 0.65 1.2 Allowable kinetic energy (J) RS Q G Note) Other intermediate strokes can be manufactured upon receipt of order.
Recommended proper torque Nm (kgfcm) 1/8 1/4 3/8 1/2 Connection thread 7 to 9 (70 to 90) 12 to 14 (120 to 140) 22 to 24 (220 to 240) 28 to 30 (280 to 300) Winding direction Torque Expose approx. 2 threads Pipe tape Operating Environment Warning 1.
12 or less 12 or less 260 (0.57) Double 7.2 Rubber seal VQC4201 7.3 0.43 2.1 0.38 2.0 15 or less 15 or less 1 (P) 5 (R1) 3 (R2) 5.9 Metal seal VQC4300 6.3 0.23 1.5 0.18 1.6 45 or less 47 or less Closed center VQC4000 7.0 Rubber seal VQC4301 6.4 0.34 1.9 0.42 1.9 50 or less 52 or less 3-position pressure center (A) 4 (B) 2 6.2 Metal seal VQC4400 6.9 0.18 1.5 0.17 1.7 45 or less 47 or less 280
seal VQC4200 260 Double 7.2 7.3 0.43 2.1 0.38 2.0 15 or less 15 or less Rubber seal VQC4201 1 (P) 5 (R1) 3 (R2) 5.9 6.3 0.23 1.5 0.18 1.6 45 or less 47 or less Metal seal VQC4300 Closed center VQC4000 7.0 6.4 0.34 1.9 0.42 1.9 50 or less 52 or less 3-position pressure center Rubber seal VQC4301 (A) 4 (B) 2 6.2 6.9 0.18 1.5 0.17 1.7 45 or less 47 or less Metal seal VQC4400 Exhaust center 280
(Mounting position: Horizontal) W 1000 500 400 Allowable lateral load W (N) 300 Allowable kinetic energy 200 Piston speed 200 180 200 100 180 Piston speed Allowable kinetic energy 20 to 400mm/s 12.4J 50 40 30 (m1 + m2) V Kinetic energy E (J) = 2 m1: Weight of moving cylinder parts kg m2: Load weight kg V: Piston speed m/s 20 10 0 20 40 60 80 100 120 140 160 180 200 220 260 240 280 300 Kinetic
Maintenance check Model Connect(Flange) 2B/3B 8B C 2B/3B/4B 500 A 300 B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 X l 400 Anchor bolt Caution M20 X l 500 AMD800 AMD900 400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 q The replacement interval for the element for models AMD150 to AMD850 is when the pressure drop reaches 0.1MPa or after 2 years of operation, whichever comes first.
Double acting 125, 140 160, 180 200 Double rod CQ2W 7-6-115 10 to 300 Long Stroke 32, 40, 50 63, 80, 100 Single rod CQ2 Double acting 7-6-121 125 to 300 Anti-lateral Load Single rod CQ2S 32, 40, 50 63, 80, 100 Double acting 32 to 40/5 to 100 50 to 100/10 to 100 7-6-132 With End Lock 20, 25, 32 50, 63, 80 100 Single rod CBQ2 Double acting 20 to 63/10 to 100 80, 100/25 to 100 7-6-142 Air-hydro
In-line style How to Order 1F 12 K 400 AS JIS Symbol Option Body size K N None Hexagonal lock nut Electroless nickel plated 100 200 205 300 400 M5 1/8 1/4 3/8 1/2 Indicate symbols in alphabetical order if two options or more desired. Applicable tube O.D.
Model Position /No. of solenoid Type Port size {NPTD Cv factor MaKOperating cycle CPM Response time (ms) Weight lbs (ks0 Plug-in Non Piug-in 2 position Single wFR2100 NVFR2110 Va 300 20 or less 0.75 (0.34) V1 Double wFR2200 NVFR2210 la 0.9 300 20 or less o.92 (0.421 Y.
Model Position /No. of solenoid Type Port size {NPTD Cv factor MaKOperating cycle CPM Response time (ms) Weight lbs (ks0 Plug-in Non Piug-in 2 position Single wFR2100 NVFR2110 Va 300 20 or less 0.75 (0.34) V1 Double wFR2200 NVFR2210 la 0.9 300 20 or less o.92 (0.421 Y.
W Fulcrum L Front matter 5 Series CKZ3 Model Selection Model Selection CKZ3N North American Type Made to Order European Type CKZ3T 3 Clamp arm 50 63 300 150 280 140 Distance from pivot point L(mm) Distance from pivot point L(mm) 260 130 240 120 220 110 200 100 180 90 160 80 140 70 120 60 100 0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0 7.5 8.0 50 0 0.5 1.0 1.5 2.0 2.5 3.0 3.5
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Label Model Connection (Flange) 2B 2B, 3B, 4B 400 A 280 B 760 D 150 E 270 F 1033 G 3 H 887 J 6B C 620 AMD801 AMD901 445 795 300 520 1318 3 972 12B AMD800/900/1000 ORIENTATION holes Label Drain Model Connection (Flange) 2B, 3B 8B C 2B, 3B, 4B 500 A 300
Bore size (mm) 20 25 32 40 50 63 Accessory Bore size (mm) Clamp stroke (mm) 20 25 32 40 50 63 MK-A020 Clamp bolt Hexagon socket head cap screw Hexagon nut Spring washer RB 10 20 50 260 295 353 635 MK-A032 300 335 555 680 1170 1620 J 1420 1890 MK-A050 DMounting Bracket Part No./Flange Additional Weight (g) -X Part no.