Applicable Auto Switch Model

(Tolerance 30%) 5.3-30 Solid State Switch/Band Mounting D-H7C Applicable Actuator Series Connector Series Bore size (mm) CDJ2 6, 10, 16 CDVJ3, CDVJ5 10, 16 CDLJ2 16 CDM2, CDBM2, CDVM3, CDVM5, CDLM2, CDLG1, REC 20, 25, 32, 40 CDG1, MGG 20, 25, 32, 40, 50, 63 RSDG 40, 50 MGC 20, 25, 32, 40, 50 RHC, MLGC 20, 25, 32, 40 Specifications PLC: Programmable Logic Controller D-H7C (With indicator light

CNA

50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 100 80 50 40 80 200 200 63 63 100 100 Load weight: m (kg) Load weight: m (kg) 50 50 50 40 30 50 40 30 40 40 20

CNA

90 75 80 90 1 Different sides 2 ML1C Same side 35 + 30 (n 2) n = 2, 3, 4, 75 + 30 (n 2) n = 2, 4, 6, 8, 80 + 30 (n 2) n = 2, 4, 6, 8, 90 + 30 (n 2) n = 2, 4, 6, 8, 90 + 50 (n 2) n = 2, 4, 6, 8, 55 + 50 (n 2) n = 2, 3, 4, 75 + 50 (n 2) n = 2, 4, 6, 8, 80 + 50 (n 2) n = 2, 4, 6, 8, Different sides DD-A44 n Same side -X 10 20 100 75 80 90 75 80 90 100 100 100 1 Different sides

Slider Type Ball Screw Drive/11-LEFS Series

16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

CM2

20 33.5 5.5 M10 X 1.25 1 to 300 19.5 17 6 M26 X 1.5 137 146 30 15 30 9 14 22 30 62 9 10 10 13 25 8 45 26 34.5 37.5 5.5 M10 X 1.25 1 to 300 19.5 17 6 M26 X 1.5 139 148 30 15 9 14 22 30 64 9 10 12 13 32 8 45 26 21 7 M14 X 1.5 21.5 M32 X 2 42.5 46.5 1 to 300 22 8 177 188 39 11 18 24 38 88 10 15 14 16 40 11 50 32 With rod boot (mm) Symbol Z h l Stroke f e 1 to 50 51 to 100 1 to 50 51 to 100

IDG

173 30 45 50 11 Drain Discharge With float type auto-drain (N.C.)

MB1

MM L1 E1 E1 L1 NDH10 NX U1 ND H10 NZ MM R1 U1 R1 NX A A1 32 40 50, 63 80 100 32 40 50, 63 80 100 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 20 22 28 40 40 30 40 50 65 65 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 12 16 19 24 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14

SY

(Connector, socket x 2pcs. only) 2 200VAC 50/60Hz Lead wire length Note 2) "R" and U" specifications are only available for DC. 110VAC 50/60Hz [115VAC 50/60Hz] 3 300mm Nil Electrical entry 4 220VAC 50/60Hz [230VAC 50/60Hz] 6 600mm G Grommet (lead wire length: 300mm) H Grommet (lead wire length: 600mm) 1000mm 10 15 20 25 30 50 1500mm 2000mm 2500mm 3000mm 5000mm L With lead wire L type plug

C85

40 4.5 22 26 11 25 73 68 3.2 16 12.8 4.5 12.8 35 23.8 5 3.2 10 65.2(72.2) 30 40 4.5 22 26 11 25 73(80) 68(75) 3.2 16 12.8 4.5 12.8 35 23.8 5 3.2 12 76(80) 40 52 5.5 30 33 14 32 86(90) 78(82) 4 20 18 5.5 18 42 32 6 4 16 82(82) 40 52 5.5 30 33 14 32 92(92) 84(84) 4 20 18 5.5 18 42 32 6 4 20 91 50 66 6.6 40 42 17 40 103 96 5 25 19 6.6 19 54 36 8 5 25 98 50 66 6.6 40 42 17 40 110 99 5 25 23

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

For details, refer to page 8-30-52. Wide range detection type, solid state auto switch (D-G5NBL type) is also available. For details, refer to page 8-30-50.

Thermo-chiller/Rack Mount Type

0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20 [50 Hz] [60 Hz] 400 400 35C Heating capacity [W] Heating capacity [W] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature Facility water temperature Facility water temperature Facility water temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35

Compact Guide Cylinder

/MGPKM Horizontal Mounting m m MGPKFM12 to 50 L = 50 mm, V = 200 mm/s or less L = 100 mm, V = 200 mm/s or less 100 100 50 50 50 50 32, 40 32, 40 32, 40 10 10 32, 40 25 25 Load mass m [kg] Load mass m [kg] 20 20 25 20 16 16 25 20 12 12 16 1 1 16 12 12 0.1 10 30 50 51 100 200 0.1 10 30 50 51 100 200 Stroke [mm] Stroke [mm] L = 50 mm, V = 400 mm/s L = 100 mm, V = 400 mm/s 100 100 50 50 50 50

Possible to transfer a workpiece at low-speed.

Low-Speed Rotary Actuator CRQ2X/MSQX Series CRQ2 Size: 10, 15, 20, 30, 40 MSQX Size: 10, 20, 30, 50 Possible to transfer a workpiece at low-speed. CRB2 CRB1 MSU CRJ CRA1 Realized a stable motion at 5 s/90.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

Same side 75 90 120 (n 4) 2 120 + 50 (n 2) 2 90 + 50 (n 4) 2 20 + 50 Different sides D-B59W n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6 120 + 5 (n 2) 75 + 50 (n 2) Same side n = 2, 4, 6, 8 120 90 1 pc. 15 35 80 90 Different sides 75 100 Same side 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 90 + 30 (n 2) D-A3 D-G39 D-K39 Different

Secondary Batteries

, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50,7 5, 100, 125, 150 *90and 91-series MXQ6 products do not have shock absorbers.

Rotary Table/

Size: 10 to 50 Size: 1 to 7 Size: 70 to 200 Note) Only sizes 10, 20, 30 and 50 are available in clean series.

Table of Contents

to 30 5 to 7 11 to 13 14 to 16 20 to 22 VMG Connecting Female Thread: G Approx. spanner tightening angle after tightened by hand Recommended tightening torque (Nm) Nominal size of Uni thread 1 8 1 4 3 8 1 2 30 to 45 15 to 30 15 to 30 15 to 30 3 to 4 4 to 5 8 to 9 14 to 15 2.

LEY-OM007

] [mm] 1) 30 50 100 150 200 250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg) 0.580.62 0.73 0.87 0.98 1.09 1.20 1.181.25 1.42 1.68 1.86 2.03 2.21 2.382.56 2.09 2.20 2.49 2.77 3.17 3.46 3.74 4.03 4.32 4.60 4.89 LEY 16 D LEY 25 D LEY 32 D [mm] 1) 30 50 100 150 200 250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg)

REA/REB

(N) 500 400 CEP1 500 300 300 CE1 200 200 Usable range CE2 100 100 Usable range ML2B 30 40 50 50 40 30 C J G5-S 20 20 CV 10 1 0 2 3 4 5 6 7 8 9 101112131415 10 1 0 2 3 4 5 6 7 8 9 101112131415 MVGQ Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CC RB 100 80 REA63 REA50 50 40 30 J REA40 REA32 DLoad weight W