V

) YO Terminal without Connector (VQZ200/300) YZ DIN Connector (VQZ200/300) YOS DIN Terminal without Connector (VQZ200/300) Note 1) Applicable to DC Specification Note 2) Optional Specification Note 3) When specifying more than one option, combine symbols in alphabetical order.

CM2

When exceeding 300 stroke, the allowable maximum stroke length is determined by the stroke selection table.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

weight kg Load weight kg MY2H40 MY2H40 MY2H40 10 10 10 MY2H25 MY2H25 MY2H25 5 5 5 4 4 4 3 3 3 MY2H16 MY2H16 MY2H16 2 2 2 1 100 200 300 400500 1000 1500 1 100 200 300 400500 1000 1500 1 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s 8-13-8 9 Model Selection Series MY2 Moment/MY2HT (Double axis) MY2HT/M3 MY2HT/M1 MY2HT/M2 300 300 300 MX 200 200 200 MTS MY

MY2

speed mm/s Piston speed mm/s 5 Model Selection Series MY2 Moment/MY2HT (Double axis) MY2HT/M3 MY2HT/M1 MY2HT/M2 300 300 300 200 200 200 100 100 100 Moment Nm Moment Nm Moment Nm 50 50 50 MY2HT40 MY2HT40 MY2HT40 40 40 40 30 30 30 MY2HT25 20 20 20 MY2HT25 MY2HT25 MY2HT16 10 10 10 MY2HT16 MY2HT16 8 8 8 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400 500 1000

Air Slide Table Series MXQ

0 100 200 300 100 200 300 (1N = Approx. 0.102kgf) Load N Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) 25 25 25 Lr = 200mm 0.08 MXQ25-50 MXQ25-75 MXQ25-10 MXQ25-20 MXQ25-30 MXQ25-40 MXQ25-150 MXQ25-40 0.12 0.10 MXQ25-75 MXQ25-125 MXQ25-100 MXQ25-75 MXQ25-40 MXQ25-150 MXQ25-100 MXQ25-100 MXQ25-125 MXQ25-150 Table displacement mm Table displacement mm Table displacement mm

MXS Series Air Slide Table

0.025 MXS2540 MXS2550 0.04 0.03 MXS2550 MXS2540 0.020 0.03 MXS2530 0.02 0.015 MXS2530 MXS2520 MXS2510 MXS2520 MXS2510 0.02 0.010 0.01 0.01 0.005 0 100 200 300 400 0 100 200 300 400 50 100 150 200 250 300 0 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 50 Air Slide Table MXS Series Option Specifications Dimensions of Stroke Adjuster at Extension End (mm) Adjustable

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Speed*1 [mm/s] 501 to 600 30 to 1200 20 to 850 10 to 300 Actuator specifications Parallel Stroke range Up to 500 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 501 to 600 30 to 750 20 to 550 10 to 300 Max. acceleration/deceleration [mm/s2] 3000 Positioning repeatability [mm] 0.01 (Lead H: 0.02) Lost motion [mm]*2 0.05 Lead [mm] 20 12 6 24 16 8 30

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Piston speed mm/s Piston speed mm/s Features 6 Series MY2H Maximum Allowable Moment/Maximum Allowable Load Moment/MY2HT (Double axis) MY2HT/M3 MY2HT/M1 MY2HT/M2 300 300 300 200 200 200 100 100 100 Moment Nm Moment Nm Moment Nm 50 50 50 MY2H40 40 40 40 MY2H40 MY2H40 30 30 30 MY2H25 20 20 20 MY2H25 MY2H25 MY2H16 10 10 10 MY2H16 MY2H16 8 8 8 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500

Title not found

SCFM Flow Length of Run Feet Compressor HP 25 50 75 100 150 200 300 500 100 6 1/2 1/2 1/2 1/2 1/2 1/2 1/2 3/4 3/4 1 18 1/2 1/2 1/2 3/4 3/4 3/4 3/4 1 1 3 30 3/4 3/4 3/4 3/4 1 1 1 1-1/4 1-1/4 5 45 3/4 3/4 1 1 1 1 1-1/4 1-1/4 1-1/4 7-1/2 60 3/4 1 1 1 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 10 90 1 1 1-1/4 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 2 15 120 1 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 1-1/2 2 2 20 150 1-1/4 1-1

Title not found

SCFM Flow Length of Run Feet Compressor HP 25 50 75 100 150 200 300 500 100 6 1/2 1/2 1/2 1/2 1/2 1/2 1/2 3/4 3/4 1 18 1/2 1/2 1/2 3/4 3/4 3/4 3/4 1 1 3 30 3/4 3/4 3/4 3/4 1 1 1 1-1/4 1-1/4 5 45 3/4 3/4 1 1 1 1 1-1/4 1-1/4 1-1/4 7-1/2 60 3/4 1 1 1 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 10 90 1 1 1-1/4 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 2 15 120 1 1-1/4 1-1/4 1-1/4 1-1/2 1-1/2 1-1/2 2 2 20 150 1-1/4 1-1

IR1000/2000/3000

160 200 0 50 100 150 200 250 300 350 Flow rate ( /min (ANR)) Relief flow rate ( /min (ANR)) Supply pressure P1 (MPa) IR1020-01 IR1020-01 IR1020-01 Back pressure: 1.0 MPa Supply pressure: 1.0 MPa 1.0 0.8 0.204 0.9 0.7 Set pressure P2 (MPa) 0.8 Set pressure (MPa) Set pressure (MPa) 0.202 0.6 0.7 Set point 0.5 0.6 0.200 0.5 0.4 0.4 0.3 0.198 0.3 0.2 0.2 0.1 0.196 0.1 0 100 200 300 400 500 0

CG1

300 Up to 300 Up to 300 Up to 500 Up to 500 Up to 600 Up to 600 Up to 600 Up to 600 Z Front Z Rear ZZ Bore (mm) TZ TY TX TW Without rod boot With rod boot Without rod boot With rod boot Without rod boot With rod boot 20 25 32 40 50 63 28 28 28 30 36 46 16 20 22 30 36 46 47.6 53 42 42 48 56 64 74 66+l 73+l 73+l 82+l 91+l 91+l 46 51 51 62 71 71 93 98 101 113+l 120+l 123+l 114 119 125 134+l

MXW

200 100 400 500 100 200 300 400 600 500 100 200 300 400 600 Load (N) Load (N) Load (N) 8-7-5 6 Long Stroke Slide Table Series MXW 8, 12, 16, 20, 25 How to Order MXW 16 100 B M9N S Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

MTS

80 100 120 140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph (21) Stroke: Up to 200 stroke Graph (17) Stroke: Up to 200 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 20 25 20 0.1 0.1 100 120 140 160 180 200 0 40 60 80 100 120 140 160 180 200 0 40 60 80 20 20 Overhang L (mm

HRX-OM-W060

Status (2): The temperature is in the "High/Low range, but no TEMP READY signal is generated since Ready Time is set at 300 sec at this point. Status (3): The 300 sec count for Ready Time is reset since the temperature is now outside of the Low range. Status (4): The 300 sec count for Ready Time starts since the temperature is now within the High/Low range.

HRX-OM-Y098

Status (2): The temperature is in the "High/Low range, but no TEMP READY signal is generated since Ready Time is set at 300 sec at this point. Status (3): The 300 sec count for Ready Time is reset since the temperature is now outside of the Low range. Status (4): The 300 sec count for Ready Time starts since the temperature is now within the High/Low range.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

mm L = 120 mm L = 120 mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N) 300 200 8-8-10 10

CG5-S

80 291 257 CG-E080SUS 100 22 235 14 23 6 40 80 87.2 57 9 144.5 120 80 292 258 CG-E080SUS Plug bolts are installed before shipment from factory.

Table of Contents

M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Applicable tubing O.D.

CP95

80 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 16 12 126 153 100 60 100 120 75 35 16 205 14 20 140 25 230 110 60 20 75 16 6.5 230 220 71 14.5 150 178 120 6-13-10 10 Series CP95 ISO/VDMA Cylinder: Standard Type Double Acting w/ End of Stroke Cushioning Dimensions: Cylinder Mounting Accessory C, D, E and CR [First angle projection] Mounting style (C) Mounting style (