C76

C76F40B C76F32B Standard stroke (mm) 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 Bore size (mm) 32 40 Max. stroke (mm) Mounting bracket 1000 C76T40 C76C40 KJ12DA GKM12-24A JA40-12-175 C76T32 C76C32 KJ10DA GKM10-20A JA25-10-150 Trunnion Clevis Single knuckle joint Double knuckle joint Floating joint 20Example of How to Order Data Accessory 1.

Non-contact Gripper

Size: 120/150 300 200 120 Consumption flow rate [L/min (ANR)] Consumption flow rate [L/min (ANR)] Consumption flow rate [L/min (ANR)] 250 100 160 ZP3 200 80 120/150 120 150 60 ZP3E 40/60/80 80 100 40 ZP2 40 50 20 ZP2V 0 0 0 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 0.4 0.45 Supply pressure (MPa) 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 0.4 0.45 Supply pressure (MPa) 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 0.4

VQZ1000/2000/3000

Body Ported Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB/CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQZ1121-C6 Courtesy of Steven Engineering,

0.4

Bore size CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ1101 Port size: 6 One-touch fitting 800 700 600 500

PF2A/PF2W

mA; Internal voltage drop: 1 V or less (With load current of 80 mA) Maximum applied voltage: 30 V; Two outputs Resistance Output specifications Note 4) Switch output NPN open collector Maximum load current: 80 mA Internal voltage drop: 1.5 V or less (With load current of 80 mA); Two outputs Accumulated pulse output NPN or PNP open collector (same as switch output) Lights up when output is

MY1

500 400 300 L-unit Air cushion 200 200 Caution 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 1.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196 Up to 300 122 1/2 100 196 Up to 300 13

CQS

CQ2 Mounting Bolt for CDQSK MU Mounting bolt Mounting bolt C' D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 Model C D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 Special long bolt for through hole mounting is available as an option. How to Order: Specify the required bolts.

SV

-02 AS420-02 AS3201F -03-10 200 400 200 100 0 0 SV400 AN300 -KM12 T1209 SV300 ANA1 -C12 T1075 800 400 MB 100 MB 80 600 300 Stroke (mm) AS5000-02 AS420-02 AS4000-03 400 200 200 100 0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04 200 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600

7ND9071en

Table 17 Ambient temperatures, ND9_Z Inmetro Variant type Ex ia IIC T4/T5/T6 Ga Ex ia IIC T4/T5/T6 Gb Ambient temperature ranges T6 T5 T4 ND91_Z -40 to +50 C -40 to +65 C -40 to +80 C ND91_Z/I02 -40 to +50 C -40 to +64 C -40 to +80 C ND91_Z/I09 -25 to +50 C -25 to +65 C -25 to +80 C ND91_Z/I45 -25 to +50 C -25 to +64 C -25 to +80 C Table 18 Ambient temperatures, ND9_Z Inmetro Variant type

MXS

10 5 30 13+0.15S 160 190 235 285 150 35 15 45 9 40 40 415 26+0.17S 340 340 400 500 340 50 30 60 20 80 90 930 690 43+0.21S 600 610 670 800 600 80 50 105 30 120 160 1800 1450 1150 55+0.21S 1020 1050 1150 1300 1000 170 100 205 71 140 310 3350 2800 2250 1700 166+0.45S 1740 1750 1900 2160 1720 215 150 300 125 240 540 4900 4300 3400 2750 240+0.45S 3.11-7 Series MXS Table Deflection Table deflection

MVGQ

Built-in magnet for auto-switches CE1 CE2 Maximum Driving Speed of Cylinders ML2B 1000 1000 900 900 C J G5-S Load factor: 10% Load factor: 50% 800 800 Cylinder speed (mm/s) Cylinder speed (mm/s) 700 700 600 600 CV 500 500 400 400 MVGQ 300 300 200 200 CC 100 100 0 0 12 16 20 25 32 40 50 63 80 100 RB SYJ3000 VZ3000 VZ5000 VF3000 Bore size (mm) J Series Variations DDetailed specifications

MXS Series Air Slide Table

80 80 92 112 158 212 H 40 40 40 25 36 36 38 NN 2 2 2 3 3 4 5 I 10 10 10 10 22 43 52 J 40 40 40 52 60 85 130 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 Note) Refer to "Dimensions" of MXS 12 on P. 58 for one with shock absorber as symmetric.

CXS

mm/s CXSM CXSL 0.1 1 Weight m (kg) MX 0.05 0.5 MTS Weight m (kg) 32 MY 25 CXSM6 CXSL6 0.1 0 0.01 20 CY 20 40 60 80 100 0.05 Overhang l (mm) 15 MG Graph (8) Up to 30 st CX 10 0 0.01 V = Up to 100 mm/s V = Up to 300 mm/s 20 40 60 80 100 D0.05 Overhang l (mm) Weight m (kg) -X Graph (11) V = Over 400 mm/s; Up to 10 st 202 CXSM CXSL 1 Data CXSL6 CXSM6 0.5 0 0.01 20 40 60 80 100 32 Weight m (kg

CXS

/s 20 40 60 80 100 D0.05 Overhang l (mm) Weight m (kg) -X Graph (11) V = Over 400 mm/s; Up to 10 st 202 CXSM CXSL 1 Data CXSL6 CXSM6 0.5 0 0.01 20 40 60 80 100 32 Weight m (kg) Overhang l (mm) 25 Graph (9) Up to 50 st 0.1 20 0.05 V = Up to 100 mm/s V = Up to 300 mm/s 0.05 0.04 15 10 0.03 0 0.01 Weight m (kg) 20 40 60 80 100 Overhang l (mm) 0.02 Graph (12) V = Up to 400 mm/s; Up to 30 st 2

0.4

(packaged together) 50 80 650 F 40 550 G 10 300 H 4 200 J Filter (IN port) Nil Without filter F With filter Note) 100 Note) Flow reduction rate 50 L/min: 5% or less 100 L/min: 5 to 10% 150 L/min: 10 to 15% 80 600 K 40 500 L 10 250 M 4 150 150 Specifications Flow rate (L/min) [at 0.25 MPa] 50 100 150 Power consumption (W) 80 40 10 4 80 40 10 4 80 40 10 4 Type of actuation 2-position 2 port

MXQ

120 20 40 60 80 100 20 40 60 80 100 Load (N) Load (N) Load (N) 8-5-12 13 Air Slide Table Series MXQ Table Displacement due to Pitch Moment Load Table Displacement due to Yaw Moment Load Table Displacement due to Roll Moment Load Displacement at A when a load is applied to F with the slide table retracted.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Standard length is 300 mm, but the following lengths are also available.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

5H10 depth 8 8-M5 x 0.8 thread depth 8 45 20 Cable entry side Body mounting reference plane 5H10 depth 6 Z section detail 100 201 60 50 Z section 43 Stroke + 125 (table movement range) 192 3.3 30 A section 90 83 5.8 1.7 4.8 80 Stroke + 360 A section detail (Switch groove) 11.5 40 (T-slot pitch) 36 45 3-5H10 depth 5 9.4 4.5 10 18 Stroke + 145 80 40 30 T-slot dimensions The body mounting

Basic Type/Direct Mount Type

Standard stroke (mm) Max. stroke without switch (mm) Max. stroke with switch (mm) Bore size (mm) Symbol Specifications 300 300 6 50, 100, 150, 200 -X116 -X160 -X322 -X1468 Hydro specifications 500 500 10 50, 100, 150, 200, 250, 300 High speed specifications 50, 100, 150, 200, 250, 300 350, 400, 450, 500 Outside of cylinder tube with hard chrome plating 15 1000 750 Interchangeable specification