Check Valve Series AK 1

R thread Applicable tubing O.D.

VQC

Individual EXH spacer VVQ1000-R-1-C6 EXH shutoff position: Specify 2 positions.

SQ1000/2000

O-ring R R R P R P SUP passage shut off SUP/EXH passages shut off EXH block plate Approx. 10 P R SSQ2000-B-R 9.2 5.2 When the exhaust from a valve interferes with other stations in the circuit, this is used between stations to separate exhausts. Also, it is used with an individual EXH spacer to shut off the exhaust of individual valves.

VP300/500/700

VQZ 3(R) 3(R) VZ (G) (E) (T) (D, Y) VS N.C.

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

0 o u r e !3 !1 u u TMH r t r t ASD e !3 e !3 AS q AS-FE !1 !1 i !4 y q q KE i !5 i !5 AS-FG AS-FP AS-FM AS321F-02 Meter-out type AS3201F-02 Meter-in type AS3211F-02 AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

Hydraulic

B-series rod A 13.5 14.5 Piston seals are NBR for both types R and V.

Dual Speed Controller with One-touch Fitting Series ASD 1

Port size 10 8 6 12 1/8" 1/4" 3/8" 5/32" 3/16" 5/16" 4 ASD230F-M5 ASD330F-01 ASD430F-02 ASD530F-02 ASD530F-03 ASD630F-04 M5 x 0.8 R 1/8 R 1/4 R 1/4 R 3/8 R 1/2 ASD230F-U10/32 ASD330F-N01 ASD430F-N02 ASD530F-N02 ASD530F-N03 ASD630F-N04 10-32 UNF NPT 1/8 NPT 1/4 NPT 1/4 NPT 3/8 NPT 1/2 Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1 MPa Min. operating pressure

ASD

Metric Inch Model Port size 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 ASD230F-M5 ASD330F-01 ASD430F-02 ASD530F-02 ASD530F-03 ASD630F-04 M5 X 0.8 R(PT)1/8 R(PT)1/4 R(PT)1/4 R(PT)3/8 R(PT)1/2 ASD230F-U10/32 ASD330F-N01 ASD430F-N02 ASD530F-N02 ASD530F-N03 ASD630F-N04 10-32 UNF NPT1/8 NPT1/4 NPT1/4 NPT3/8 NPT1/2 Specifications Proof pressure 1.5MPa Max. operating pressure 1MPa JIS symbol

Smooth Cylinder/Low Speed Cylinder

Through-hole: CQ2YB/CDQ2YB Both ends tapped style: CQ2YA/CDQ2YA CDQ2YA Both Ends Tapped (mm) O1 thread Bore size (mm) R R O1 R 32 M6 x 1.0 10 40 M6 x 1.0 10 50 M8 x 1.25 14 2 x P (Rc,NPT,G) (Port size) H thread effective depth C Auto switch Lead wire min. bending radius 10 4 x N through 8 x O counterbore F Q D Z M E J W E M K L B + Stroke A + Stroke Rod end male thread Width across flats

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF ASV220F-U10/32 1.3 1.3 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

3 Port Solenoid Valve Metal Seal Series VZ200 1

BG-VZ402 BG-VZ403 VQ VKF BG-VZ405 VQZ How to Order Manifold Base VZ 1 06 30 VV3Z4 VS VFN A port size on base side Series VZ400 Manifold Model Symbol VV3Z4-S50 VV3Z4-50 Symbol Stations Symbol Porting specifications 2(A) Passage Specifications Without 2(A) port (Body ported type 20, 30) Nil Applicable base 02 2 stations 3(R) 1(P) 01 02 Rc 1/8 1 Common Common Top, Side Type 20, 30 and 50

F

36.4 31.4 14.1 14.3 18 12 1/8 (N)AS2200-01 P O R T T H R E A D 19.5 40.8 35.8 18 18 27.2 17 1/4 (N)AS2200-02 R(PT) N NPT 24.3 46.9 41.9 20.8 22.6 30 19 3/8 (N)AS3200-03 P O R T S I Z E 28.5 55.6 49.4 26.7 27.5 33.5 24 1/2 (N)AS4200-04 M3 M3x0.5 M5 M5x0.8 01 18 02 14 03 38 04 12 Courtesy of Steven Engineering, Inc. !

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,

Fieldbus System

Connector for unit (Plug) 5 t r t r EX600-AXA EX600-AYA EX600-AMB End Plate q t No.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

X For vacuum/ compound pressure ZSE20C X M 02 q w e r t y u i o q Rated pressure range w Output specification u Option 2 * Note that the optional parts that can be used vary depending on the piping direction.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Head Side Trunnion Style Rod end lock/-R Bore size (mm) Z (Head side trunnion) ZZ (Head side trunnion) With rod boot With rod boot Without rod boot Without rod boot 145 + l 124 + l 20 104 125 152 + l 131 + l 25 109 130 Head side trunnion style: CBG1T (Rod end lock -R only) 157 + l 133 + l 32 111 135 175(182) + l 147(154) + l 40 127(134) 155(162) 200(211) + l 168(179) + l 50 148(159) 180(191

Thermo-chiller

W: 5.1 [kW] r Calculate based on the laser output.

Electric Actuators

Nil Standard motor SMC controller Series LC1 compatible L R Left Right Lead screw lead G R Y Matsushita Electric Industrial Co., Ltd.

0.01

IDFA Case material Material Aluminum Stainless steel IDFB Symbol 1 2 Flow Rate Characteristics IDH The flow rate characteristics are the same as the SFD100-02. Refer to Flow Rate Characteristics on page 322. ID Construction IDG SFD101-02 SFD102-02 IDK w q r t e q r e w AMG AFF AM AMD AMH Component Parts Component Parts No. Description Note Material Aluminum alloy No.

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

Model Port size 4 6 8 10 12 ASD One-touch fittings for AS121-M5 AS221-01 AS221-02 AS321-02 AS321-03 AS421-04 M5 x 0.8 AS 1 8 R metal body specifications 1 4 R AS-FE 1 4 Uses flame resistant resin as standard. (UL standard V-0) R 3 8 R KE 1 2 R Note 1) : Brass parts are electroless nickel plated, provided as standard.