PFxx-OMS0001CN

. / [AC1] [] 09 L 3 (3 ) [P1AH][n1AH] [P1dH][n1dH] [] 1 () -34No.PF-OMS0001CN-A (6 ) [P1AL][n1AL] [P1dL][n1dL] [] 1 OUT1 [CoL] [] ON OFF ON OFF [F 1] OUT1 -35No.PF-OMS0001CN-A d.

4-channel Flow Monitor ( compatible)

32 to 47 CH3: Flow measurement value With symbol 16 bit 48 to 63 CH2: Flow measurement value With symbol 16 bit 64 to 79 CH1: Flow measurement value With symbol 16 bit Bit offset 79 78 77 76 75 74 73 72 71 70 69 68 67 66 65 64 Item CH1: Flow measurement value (PD) Bit offset 63 62 61 60 59 58 57 56 55 54 53 52 51 50 49 48 Item CH2: Flow measurement value (PD) Bit offset 47 46 45 44 43 43 41

HEC-OM-S008

Data of UT and Check Sum Character data 09 A B C D E F ASCII 30H39H 41H 42H 43H 44H 45H 46H UT and check sum 30H39H(ditto) 3AH 3BH 3CH 3DH 3EH 3FH HECR 3-4 Details of Communication Format 4 Details of Communication Format 4.1 Temperature setting (without writing FRAM) The host computer sets temperature of each Thermo-con. In this command, temperature setting data is not written in FRAM.

RS2H-OM0045P

. -1516 D-M9/D-A9 D-M9 D-M9W D-M9AVL D-M9V D-M9WV D-M9AL D-A9 D-A9V A B A B A B A B 50 23.5 9.0 23.5 11.0 23.5 7.0 19.5 10.5 (13.0) 63 25.5 12.5 25.5 14.5 25.5 10.5 21.5 14.0 (16.5) 80 39.5 19.5 39.5 21.5 39.5 17.5 35.5 21.0 (23.5) ( )D-A96 -15 D-P3DW D-P3DW A B Hs Ht 50 14.5 6.5 41 35 63 16.5 10 47 44 80 30.5 17 55 54 D-P3DW BQ6-032S -16 18 - 7-3. 7-3-1.D-M9D-A9 (-) -17 5~6mm

CEx-OMI0064

NO. 19 NO. , 26 , 41 - 10-2 CEU5 , ROM , , ,SMC RAM , ,SMC 2ROM E ,, , , 2ROM E 2ROM 80 E , , ,SMC , 42 -

Type: 41 (Feedback Sensor Type), Bar Length: 1900mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: 3m, One-Touch Fitting: 09 (ø5/16")

Type: 40 (Standard Type), Bar Length: 1780mm, Electrode Cartridge, Needle Material: C (High Speed De-Ionizing Cartrige, Silicon), Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: N (w/o Cable), One-Touch Fitting: 09 (ø5/16"), Bracket: w/o Bracket, Sensor: Type 40: N/A; Type 41 & 42: Built-in Auto Balance Sensor, Option: X10 [Non-standard Bar Length (Not Required

Type: 41 (Feedback Sensor Type), Bar Length: 2500mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: 3m, One-Touch Fitting: 09 (ø5/16"), Bracket: B (Bracket)

Type: 41 (Feedback Sensor Type), Bar Length: 1600mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: 3m, One-Touch Fitting: 09 (ø5/16"), Bracket: B (Bracket)

Type: 40 (Standard Type), Bar Length: 1600mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: 3m, One-Touch Fitting: 09 (ø5/16"), Bracket: w/o Bracket, Sensor: Type 40: N/A; Type 41 & 42: Built-in Auto Balance Sensor, Option: X14 (Electrode Cartridge Drop Prevention Cover, for Standard

Type: 40 (Standard Type), Bar Length: 2020mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: 3m, One-Touch Fitting: 09 (ø5/16"), Bracket: w/o Bracket, Sensor: Type 40: N/A; Type 41 & 42: Built-in Auto Balance Sensor, Option: X10 [Non-standard Bar Length (Not Required with Electrode

Type: 40 (Standard Type), Bar Length: 700mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: Z (10m), One-Touch Fitting: 09 (ø5/16"), Bracket: B (Bracket), Sensor: Type 40: N/A; Type 41 & 42: Built-in Auto Balance Sensor, Option: X10 [Non-standard Bar Length (Not Required with Electrode

Stations: 09, A,B Port: ø1/4" One-touch Fitting, Inch, Thread: NPTF

Stations: 09, A,B Port: N7 (ø1/4" One-touch Fitting, Inch), Thread: T (NPTF)

Fieldbus System

SS5Y3-12S6Q42-05B 1 set (Type 12 5-station manifold base part no.) SY3130-5U1-C6 3 sets (2-position single part no.) SY3230-5U1-C6 2 sets (2-position double part no.)

Manifold Type: Base Mounted, Valve Stations: 9 Stations, A, B Port: M5X0.8, CE Marked: -

Manifold Type: Base Mounted, Valve Stations: 9 Stations, A, B Port: 5/32" One-touch Fitting NPTF, CE Marked: -

Manifold Type: Base Mounted, Valve Stations: 9 Stations, A, B Port: 1/4" One-touch Fitting, CE Marked: -

Manifold Type: Base Mounted, Valve Stations: 9 Stations, A, B Port: ø4 One-touch Fitting, CE Marked: -

Manifold Type: Base Mounted, Valve Stations: 9 Stations, A, B Port: 10-32 Nom, CE Marked: -