Dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size B D E F H K L M N A C Model Note) Q V R Q R Q R S Q R S U 22 23 45 44 43 58 40.5 46.5 99 43 66 83 13.5 28 31 56.5 12.5 28 14 12.8 M4 4.5 64 1/8 VCL21 22 23 46 44 44 58 41.5 46.5 99 44 66 86 18 36 31 58.5 12.5 28 18 12.8 M4 6 67.5 1/4 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 99 22 40 36.5 11 15 32 20 19
Projection is not included. 11 Weight when the circulating fluid and facility water (for water-cooled type) is not included.
Static Neutralization Characteristics q Installation Distance and Discharge Time (Discharge Time from 1000 V to 100 V) IZS40/41/42 IZT40/41(-L)/ 42(-L)/43(-L) IZN10E IZF IZG10 ZVB IZD10/IZE11 IZH10 Antistatic Equipment IZG10-mm-01/IZG10-mm-02 Mode setting switch: Continuous blow 1) Number of needle rotations [2] 2) Number of needle rotations [4] 3) Number of needle rotations [6] 5.0 4.5 4.0
Joint 7 9 YB-03 32, 40 11.5 depth 7.5 34 25 12 K ( across flats) H (With locking) 9 11 YB-05 50, 63 42 32 12 14.5 depth 8.5 11 13 YB-08 80 52 38 16 18 depth 12 d2 d1 14 17 YB-10 100 62 50 19 21 depth 14 L UT C UA Bore size (mm) T1 RS Weight (g) T2 V W Part no. Part no.
9 9 10 10 11 11 11 11 11 10 10 10 10 OUT() 2nd terminal 9 9 9 10 10 11 8 9 9 Note) Average value at normal temperature including hysteresis.
11 Series ZX Suction Filter Unit: ZX1-F Specifications ZX1-F Vacuum to 0.5 MPa 5 to 50C 30 m PVF 35 g Unit no.
7 12 8 47 Up to 300 301 to 500 20 to 300 301 to 500 Bore size (mm) 20 25 32 40 K KA MM NA PG PH PL S TA TDe8 TE TF TH TR TZ TS TT TV TW TX TY XA XB P J 0.025 0.047 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 11 8 10 5.5 31 51 40 3.2 47.8 42 26 28 59.6 3 12 M4 x 0.7 0.025 0.047 5.5 8 M10 x 1.25 29 1/8 26.5 2.5 73 151 11 10 10 5.5 37 58 47 3.2 54.8 42 28 28 68 3 12 M5 x 0.8 0.032 0.059 0.032 0.059
94 11 17.5 Rc 3/8 40 to 100 Q RB S U Z Bore size (mm) 63 80 100 34 10.5 93 47.5 19 39 13.5 112.5 57.5 26 43 13.5 132.5 67.5 26 Refer to page 7-7-14 for details on rod end nut and accessories.
(mm) 63 80 100 A B C D E F H I J K L M N OB P 63 55 15 20 77 31 M10 x 1.5 103 7 17 8 60 9 14 Rc 1/4 30 to 100 73.5 63.5 21 25 98 35.5 M16 x 2.0 132 6 22 10 77 11 17.5 Rc 3/8 40 to 100 88 76 27 30 117 40 M20 x 2.5 156 6.5 27 12 94 11 17.5 Rc 3/8 40 to 100 mm Q RB S U Z Bore size (mm) 63 80 100 34 10.5 93 47.5 19 39 13.5 112.5 57.5 26 43 13.5 132.5 67.5 26 Refer to page 11 for details on rod
-F VFA3130-02 2 1 4 3 VFA3430-02-X1 5 1 8 VFA3140-02 2 1 4 (2) 3 VFA3440-02-X1 5 VFA3140-03 2 3 8 3 VFA3440-03-X1 5 Note 1) Port size of the exhaust ports on body ported type are all 1/8.
Note Symbol 1P Common Common 3R Common Individual 1 Type 41 Type 42 VHS 3 VV3PA3-42-053-02 Stations 02 2 stations ... ... 20 20 stations To order valves and blank plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number.
Applicable model HRS-WL003 HRS090-mm-20/40 Parts List q No.
--ry] f+r-q | r + r i | | t-?-!+-<-{ l r l tF)-)-+++--(lr{ I , _ ' I{ANIFOLD BLOCK PART NO. NO. PRESSURE CYLII{OEF " A & 8 " EXHAUST "EA & E8" SIDE aoTTor !OYTOT MSA 1010.02 Yes '/f t2) Yes MBA 10't r.02 11 Yes 't"et t ' l Z YE MAA 4210.02 t6 Y5 v." 11) v.' t2\ t " t2:l t ' l a STATX)flS 2 3 a 5 6 7 I t t0 -1 nm) 5 .
P Bore size (mm) W V U T S Z X Y Q Y R R Q HR HN 20 20 107 (115) 12 (14) 104 11 21 47.5 40 48 82 12 26 157 30 M6 x 1 depth 9 Rc 1/8 25 20 25 107 (115) 12 (14) 25.3 37 104 11 21 48 46 57 100 13 31 175 37 Rc 1/8 M6 x 1 depth 13 32 25 32 110 (118) 12 (14) 28.3 40 106 11 21 49 52 65 114 16 38 201 37 Rc 1/8 M6 x 1 depth 13 40 32 40 121 (130) 12 (15) 31.3 43 123 11 25 53 62 84 138 20 47 238 44
(OptionsT& POnly) ParlNo, Portin9 No. of Ports "xx" sP01 'r 1 %,,NPTFSidE 5 4 1 sP0112 %"NPTFSidE 42 sPot 13 /s' NPTF SidLe (5); %" NPTF Ebtlom 1 0 43 sP0114 Ya" N PTF Bottom 5 44 sP0115 3,6" N PTF Side 5 45 MBA4010-02Y." NPTF Side 2 1 2 MBA40r r -02 %" NPTF Sid; 7." Bottom 1 4 MBA4210-02 %" NPTF Side (2); 7."
S) 42 (-Q) VV5K3-40 (-Q) (S) 41 (-Q) (S) 42 (-Q) VV3K3-20 (-Q) 21 (-Q) VV5K3-20 (-Q) 21 (-Q) Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note1) Mounting direction is fixed, do not mount on opposite side.
Projection is not included. 11 Weight when the circulating fluid and facility water (for water-cooled type) is not included.
Air cooled type only Fig. 8-10 Positions of danger warning label Fig. 8-11 Positions of danger warning label 8.6 Types of Hazard Labels (HRS -40/46) HRS Series 8-16 HRX-OM-S004 Chapter 8 Documents 8.7 Standards This product complies with the standards shown below: Table 8-7 Standards Standard Model CE Mark EMC Directive 2014/30/EU HRS--40HRS--46Machinery Directive 2006/42/EC NRTL E112803(
Q C C Pressure gauge mounting bore 1/8 4-R R 4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN SMC SMC Model Port size A B C D E G H I K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-
Joints 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 K ( across flats) 12 9 32 11 42 14.5, depth 8.5 YB-05 50, 63 H (with locking) 16 11 38 13 52 18, depth 12 YB-08 80 d2 d1 19 14 50 17 62 21, depth 14 YB-10 100 L UT Weight (g) Bore size (mm) C UA RS W T1 T2 V Part no. (mm) 9 50 18 6.5 10 YB-03 32, 40 80 UA C d1 d2 H K L UT Weight (g) Part no.