Aluminum High Vacuum Angle Valve

65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

thread depth N 2 x M5 thread depth N G CS: Conduit D F K 500 NPT1/2 C H J E IN 2 x Port size 1(IN), 2(OUT) port A B G 2 x M5 thread depth N [mm] Size Port size A B C D E F G H N 20 1/8 14 30 69.2 36 9 18 15 17.5 6.4 1/4 19 40 67.7 22.2 22.2 7.6 3/8 22 48 70.7 11 19 20.6 6 30 1/4 19 40 76.7 42 9 21 22.2 22.2 7.6 3/8 22 48 79.7 11 19 20.6 6 Size Port size Grommet Grommet with PCB Conduit

MGP

7.5 8 8.5 9 M4 X 0.7 10 12 13 15 M4 X 0.7 4.3 4.3 5.6 5.6 M5 X 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 8 8 10 10 13 15 18 21 18 13 15 18 21 5 5 6 6 18 22 24 30 12 16 20 25 26 30 36 42 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 X 0.8 M5 X 0.8 M5 X 0.8 15 10 19 MGC 53 37 10.5 M5

Series KP/KPQ/KPG

KPQU04-M5 KPQU04-01 KPQU04-02 KPQU06-M5 KPQU06-01 KPQU06-02 KPQU08-01 KPQU08-02 KPQU10-02 KPQU10-03 KPQU12-03 KPQU12-04 38 38 42 41.5 41.5 45.5 49.5 54.5 58 55 60.5 63.5 41.7 44.2 48.2 44.9 47.4 51.4 55.5 60.6 63.8 61.3 67 71.4 10 11 20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection

Series KP/KPQ/KPG

KPQU04-M5 KPQU04-01 KPQU04-02 KPQU06-M5 KPQU06-01 KPQU06-02 KPQU08-01 KPQU08-02 KPQU10-02 KPQU10-03 KPQU12-03 KPQU12-04 38 38 42 41.5 41.5 45.5 49.5 54.5 58 55 60.5 63.5 41.7 44.2 48.2 44.9 47.4 51.4 55.5 60.6 63.8 61.3 67 71.4 10 11 20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection

One-touch Fittings Series KQ2

Nylon Urethane KQ2W23-M5 30 8 31 10 M5 0.8 8 9.6 37 43 10 17.5 15.5 38 42 19 2.8 2.4 41 1 8 KQ2W23-01S KQ2W23-02S 10 14 3.2 1 4 KQ2W04-M5 KQ2W04-01S 8 18 30 37.5 32 38.5 M5 0.8 11 3.0 3.0 8 10.4 1 8 4 16 4.0 4.0 23 14 10 10 1 4 KQ2W04-02S 43.5 42.5 38 11 26 KQ2W06-M5 KQ2W06-01S 30.5 40 33.5 42.5 M5 0.8 8 3 3 8 1 8 10 6 17 12.8 20 1 4 10 KQ2W06-02S 46 46.5 17 14 10.9 10.9 41 3 8 KQ2W06-03S

Floating Joint

41 50 59.5 59.5 66 96 36 48 38 44 44 57.5 57.5 57.5 71.5 71.5 86 107 107 102 144 13 17 17 22 22 22 27 27 32 41 41 41 55 0.09 0.18 0.18 0.36 0.36 0.36 0.61 0.61 1.09 2.03 2.03 4.1 10 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 9 9 11 11 11 11 11 14 16 16 14 22 24.5 28.5 28.5 35.5 35.5 35.5 44.5 44.5 53 65 65 56 78 1148 JA Series Made to Order: Individual Specifications Please contact SMC

Modular F.R.L. Unit

AC40B AC40B-06 AC50B AC55B AC60B 71 11 25 56 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 7 4.5 20 27 25 28 0 26 13.5 4.5 2.8 40 89 114 26.5 40 83 5.5 12 33 24 41.5 30 2 Note 1) 65 29.5 5.5 3.2 50 2.5 132 143 28 50 110 7 14 55 35 41 28.5 64 13 7 4 71 0 184 146 31 50 110 7 14 35 55 41 30.5 10 66 7 4 71 187 3.5 183 36 75 145 18 9 40 50 72.5 35 74 12 9 4 88 222 3.5 185

Series KG Stainless Steel One-touch Fittings

Nylon Urethane KGW04-M5 KGW04-01 8 M5 0.8 32 38.5 18 30 37.5 11 3.0 3.0 8 10.4 1 8 4 16 23 M5 0.8 14 10 10 4.0 4.0 1 4 KGW04-02 43.5 42.5 38 11 26 KGW06-M5 KGW06-01 33.5 42.5 30.5 40 8 3.0 3.0 8 1 8 10 6 17 20 12.8 10 1 4 KGW06-02 46 46.5 17 14 10.9 10.9 41 3 8 KGW06-03 48 48 67 1 8 1 4 KGW08-01 KGW08-02 47 51 43.5 49.5 12 30 47 8 14 18.5 20.5 14.2 15.2 12 23 3 8 KGW08-03 17 51.5 52.5 74

KP/KPQ/KPG

KPGU04-M5 KPGU04-01 KPGU04-02 KPGU06-M5 KPGU06-01 KPGU06-02 KPGU08-01 KPGU08-02 KPGU10-02 KPGU10-03 KPGU12-03 KPGU12-04 41.7 44.2 48.2 44.9 47.4 51.4 55.5 60.6 63.8 61.3 67 71.4 38 38 42 41.5 41.5 45.5 49.5 54.5 58 55 60.5 63.5 10 11 20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection

Stainless Steel One-touch Fittings Series KG

Nylon Urethane KGW04-M5 KGW04-01 8 32 38.5 18 30 37.5 M5 0.8 11 3.0 3.0 8 10.4 1 8 4 16 23 M5 0.8 14 10 10 4.0 4.0 1 4 KGW04-02 43.5 42.5 38 11 26 KGW06-M5 KGW06-01 33.5 42.5 30.5 40 8 8 3.0 3.0 1 8 10 6 17 12.8 20 10 1 4 KGW06-02 46 46.5 10.9 10.9 17 14 41 3 8 KGW06-03 48 48 67 1 8 1 4 KGW08-01 KGW08-02 47 51 43.5 49.5 12 30 47 8 18.5 20.5 14.2 15.2 14 12 23 3 8 KGW08-03 17 51.5 52.5 74

Table of Contents

(mm) L2 (3 x P) L2 max Q2 Y Size Q1 = M 10 5.5 to 8 M3 Y 1 (mm) C1 = C Y = X Q1 L1 max 15 7.5 to 9 Size M3, M4 Y 1.5 L2 = C2 = C 10 20 5.5 to 14 M3 X 1 9.5 to 10 Y 1.5 M3, M4, M5 L1 (3 x P) 15 7.5 to 18 M3, M4 X 1.5 M3, M4, M5, M6 30 11 to 13 Y 2 Q2 = M X = L1 = 20 9 to 20 X 1.5 M3, M4, M5 M3, M4, M5, M6, M8 M3, M4, M5, M6 40 14 to 15 30 Y 4.5 11 to 22 X 2 11-3-24 59 Simple Specials

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

KPGU04-M5 KPGU04-01 KPGU04-02 KPGU06-M5 KPGU06-01 KPGU06-02 KPGU08-01 KPGU08-02 KPGU10-02 KPGU10-03 KPGU12-03 KPGU12-04 41.7 44.2 48.2 44.9 47.4 51.4 55.5 60.6 63.8 61.3 67 71.4 38 38 42 41.5 41.5 45.5 49.5 54.5 58 55 60.5 63.5 10 11 20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection

Table of Contents

Specifications. 4 4 6 8 8 9 9 10 11 11 12 12 13 14 15 15 15 15 16 17 17 17 18 19 19 20 20 21 22 25 31 31 31 31 35 35 35 39 39 39 41 41 41 43 45 47 47 48 54 63 63 65 67 67 68 69 69 70 71 72 72 73 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions .

ZP

M6 M8 M5 M6 M8 M5 M6 M8 M5 M6 M8 Model ZPY02 to 08 2004 3507 4010 10 to 16 (Thin section series) 15 (11) except 2, 4 15 (11) except 2, 4 15 (11) 15 33 (26) 31 (27) ZPY10 33 (25) 32 (25) 33 (25) 32 (25) 33 (25) 33 () (25) ZPY13 38 (27) 32 (27) ZPY16 ZPY20 38 (30) (30) 38 (29) 38 (30) (30) 38 (29) 38 (30) (30) 38 (28) 38 (30) (30) 38 (29) ZPY25 ZPY32 47 (34) 43 (36) 44 (38) 46 (33

VQZ1000/2000/3000

VQZ2 20 1(R)-G-C4/C6/M5 3 4 5 300 (Lead wire length) 122 54.5 17.3 6 6 R2.5 3.4 B 4 11 15 SMC SMC 2 A Cover diameter 1.6 Cross section 0.34 mm2 24 22.7 mounting hole 66.5 2-C4, C6, M5 Manual override C4: One-touch fitting for 4 C6: One-touch fitting for 6 M3 x 0.5 external pilot port (Only external pilot type (R)) M5: M5 thread 25 10 (For C4, C6) Courtesy of Steven Engineering, Inc.-230

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 4) M5 fittings for M5 thread are attached without being incorporated.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 4) M5 fittings for M5 thread are attached without being incorporated.

Sine Cylinder Series REC

41 8 13 20 NANote) 0 -0.033 0 -0.033 0 -0.039 25 37.5 5.5 8 6 22 19.5 32 13 10.5 10 45 10 17 26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

Sine Cylinder Series REC

41 8 13 20 NANote) 0 -0.033 0 -0.033 0 -0.039 25 37.5 5.5 8 6 22 19.5 32 13 10.5 10 45 10 17 26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.