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Max. air flow rate (m3/min (ANR)) JIS Symbol P . 14-20-55 Inlet pressure (MPa) Caution Be sure to read before handling.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Bore size (mm) 12 16 20 25 C1 H1 L1 X CQ2 9 10 12 15 10.5 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 14 12 15.5 RQ 14 18.5 17.5 22.5 Basic Style MU Bore size (mm) Stroke range (mm) E2 F H I S K U L W M N A O B C D E E1 D12 16 20 25 6.5 depth 3.5 14 17 19 22 14 17 21 24 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 32.5 37.5 41.5 47 5 6 8 10 19.5 22.5 24.5 27.5 27 32 36 41.5 Note) External dimensions

CQ2

Bolt M3 X 40 l 2 pcs.

KJ

17 14 17 19 14 17 19 17 19 Connection thread 4 14 11 13 15 11 13 14 14 15 13.1 10.4 17 12 6 1 8 1 4 3 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 26.1 18.0 14 8 18.5 KQ2F16 Applicable tubing 17 41.5 29.5 21 10 Connection thread 19 14 12 58.3 46.1 22 19 18 15 19 24 81 (81) 113 (96) 24 25.7 16 24 25 Note 1) D2: Max. diameter Note 2) ( ): Values for soft nylon 15-2-14 6 One-touch Fittings Series KQ2

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7 4 5 19 18 11 10 6 MVGQ 15 17.5 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20 20.5 7 32 5 M3 x 0.5 11 32 10 3 M5 x 0.8 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 M4 x 0.7 20.4 39 Rc1/8 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

CATALOG

/2 (N)AS4200-04 M3 M3x0.5 M5 M5x0.8 01 18 02 14 03 38 04 12 Courtesy of Steven Engineering, Inc. !

CRB2/CRBU2/CRB1

Q1 M3 5.5 to 8 Y-1 10 15 X-3 7.5 to 14 M3 Y = M3, M4 7.5 to 9 Y-1.5 L2 = L1(3 x P) C2 = C 15 20 X-4 M3, M4 10 to 18 9 to 10 Y-1.5 M3, M4, M5 X = 20 30 12 to 20 X-4.5 M3, M4, M5 11 to 13 Y-2 M3, M4, M5, M6 L1 = Q2 = M 30 40 14 to 22 X-5 14 to 15 Y-4.5 M3, M4, M5, M6 M3, M4, M5, M6, M8 24 Simple Specials Series CRB2 Axial: Top (Long-shaft side) Axial: Bottom (Short-shaft side) Symbol: A10 Symbol

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Example) Bolt M3 x 35l 2 pcs.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Model Tightening torque Thread size 10-SY3000 M2 0.8Nm 0.16Nm 10-SY5000 10-SY7000 10-SY9000 M3 M4 M3 1.4Nm 0.8Nm 491

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) (mm) Q1 = M Q2 Y L2 max Size C1 = C L2-(3 x P) Q1 X L1 max Size 10 M3 5.5 to 8 Y 1 10 M3 X 3 7.5 to 14 Y = 15 M3, M4 7.5 to 9 Y 1.5 15 M3, M4 X 4 10 to 18 L2 = X = C2 = C 20 M3, M4, M5 9 to 10 Y 1.5 L1-(3 x P) 20 X 4.5 12 to 20 M3, M4, M5 30 11 to 13 Y 2 M3, M4, M5, M6 M3, M4, M5, M6 L1 = 30 Q2 = M X 5 14 to 22 M3, M4, M5, M6, M8 14 to 15 Y 4.5 40 11-2-28 28 Simple Specials

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(mm) (mm) Q1 = M Q2 Y L2 max Size C1 = C L2-(3 x P) Q1 X L1 max Size 10 M3 5.5 to 8 Y 1 10 M3 X 3 7.5 to 14 Y = 15 M3, M4 7.5 to 9 Y 1.5 15 M3, M4 X 4 10 to 18 L2 = X = C2 = C 20 M3, M4, M5 9 to 10 Y 1.5 L1-(3 x P) 20 X 4.5 12 to 20 M3, M4, M5 30 11 to 13 Y 2 M3, M4, M5, M6 M3, M4, M5, M6 L1 = 30 Q2 = M X 5 14 to 22 M3, M4, M5, M6, M8 14 to 15 Y 4.5 40 11-2-28 28 Simple Specials

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) (mm) Q1 = M Q2 Y L2 max Size C1 = C L2-(3 x P) Q1 X L1 max Size 10 M3 5.5 to 8 Y 1 10 M3 X 3 7.5 to 14 Y = 15 M3, M4 7.5 to 9 Y 1.5 15 M3, M4 X 4 10 to 18 L2 = X = C2 = C 20 M3, M4, M5 9 to 10 Y 1.5 L1-(3 x P) 20 X 4.5 12 to 20 M3, M4, M5 30 11 to 13 Y 2 M3, M4, M5, M6 M3, M4, M5, M6 L1 = 30 Q2 = M X 5 14 to 22 M3, M4, M5, M6, M8 14 to 15 Y 4.5 40 11-2-28 28 Simple Specials

Rotary Actuator/Vane Type

[mm] Size A B C D E (g7) F (h9) G1 G2 J K L M N P Q R S T V1 V2 W X Y Q1 Q2 Q3 10 29 15 8 14 40.004 0.016 9 0 0.036 3 1 5 9 0.5 9.5 9.5 24 M3 x 0.5 depth 6 6 M3 x 0.5 14 3.6 30 37 19.8 8.5 14.5 15 34 20 9 18 50.004 0.016 12 0 0.043 4 1.5 6 10 0.5 14 10 29 M3 x 0.5 depth 10 6 M3 x 0.5 depth 5 M3 x 0.5 19 7.6 39.5 47 21 11 17 20 42 29 10 20 60.004 0.016 14 0 0.043 4.5 1.5 7 10 0.5 20 13

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Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF ASV220F-U10/32 1.3 1.3 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

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x 0.5 x 14 l How to Mount and Move the Auto Switch Auto switch mounting bracket Auto switch Auto switch Auto switch mounting screw M4 x 0.7 x 22 l Auto switch mounting screw M3 x 0.5 x 14 l Auto switch mounting band (With bracket) Auto switch mounting band (With bracket) 1.

ZP

Inlet 5 3 2 14 2 3 14 3 2 7 M3 x 0.5 7 M3 x 0.5 3 3 3 M3 x 0.5 14 Vertical 3 3 3 7 0.3 With Buffer: Vacuum Inlet 0.3 0.3 0.8 0.8 0.8 2 3.5 1.5 Lateral 2.5 4 2 With Adapter: Vacuum Inlet 5 5 5 5 5 Lateral Vacuum Inlet Dimensions With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-Y015U;-B3-U4 ZP3-Y02U;-B3-U4 ZP3-Y035U;-B3-U4 ZP3-Y015U;-B3-U2 ZP3-Y02U;-B3-U2 ZP3-Y035U;-B3

MY1

= 38.7 (Nm) M3 = m3 x g x X = 6.525 x 9.8 x 138.5 x 103 = 8.86 (Nm) MTS m3 M3 Load factor 3 = M3/M3max = 8.86/38.7 = 0.23 MY 5.

15

1.5 M6 x 14 5.2 14 4.5 30 M5 x 0.8 8.5 70 50 4.6 13 60 NY M3 x 12 1.5 M4 x 12 1.5 M6 x 14 5.2 11 4.5 30 M4 x 0.7 7 70 50 4.6 13 60 NW M4 x 12 3.6 M4 x 12 1.5 M6 x 14 5.2 9 4.5 30 M5 x 0.8 8.5 70 50 4.6 13 60 NU M3 x 12 1.5 M4 x 12 1.5 M6 x 14 5.2 11 4.5 30 M5 x 0.8 8.5 70 50 4.6 13 60 NT M3 x 12 1.5 M4 x 12 1.5 M6 x 14 5.2 12 8.5 30 M5 x 0.8 8.5 70 50 4.6 17 60 NM1 M3 x 5 0.63 M4 x 12 1.5

Air Slide Table

Through hole L Model Bolt Max. tightening torque [Nm] L [mm] MXQ6 M3 x 0.5 1.1 5.3 MXQ8 M3 x 0.5 1.1 8.3 MXQ12 M4 x 0.7 2.7 11.5 MXQ16 M5 x 0.8 5.4 14.4 MXQ20 M5 x 0.8 5.4 19.3 MXQ25 M6 x 1 9.2 23.5 MXQ6A M3 x 0.5 1.1 8.3 MXQ8A M3 x 0.5 1.1 8.3 MXQ12A M4 x 0.7 2.7 8.5 MXQ16A M5 x 0.8 5.4 12.4 MXQ20A M5 x 0.8 5.4 16.3 MXQ25A M6 x 1 9.2 20.5 MXQ6B M3 x 0.5 1.1 5.3 MXQ8B M4 x 0.7 2.7 4.5 MXQ12B

ZP

13 14 1 ZPY16CT 16 17 Dimensions of D, E are the same.