15

x 0.8 8.5 70 50 4.6 13 60 M3 x 12 1.5 M4 x 12 1.5 14 4.5 NY M4 x 0.7 7 70 50 4.6 13 60 M3 x 12 1.5 M4 x 12 1.5 11 4.5 NW M5 x 0.8 8.5 70 50 4.6 13 60 M4 x 12 2.5 M4 x 12 1.5 9 4.5 NU M5 x 0.8 8.5 70 50 4.6 13 60 M3 x 12 1.5 M4 x 12 1.5 11 4.5 NT M5 x 0.8 8.5 70 50 4.6 17 60 M3 x 12 1.5 M4 x 12 1.5 12 8.5 NM2 M4 x 0.7 8 50 38.2 11.5 60 M3 x 12 1.5 M4 x 12 2.7 10 12 32 NZ M5 x 0.8 9 70 50

Speed Controller with Indicator

-U10-32/23 AS131FSG1-M5-04 4 8.2 11.5 19.8 AS131FSG1-U10/32-04 AS131FSG1-M5-06 6 10.4 20.9 20.4 36.6 8 AS131FSG1-U10/32-06 7.2 M5 x 0.8 10/32UNF 8 9.6 9.4 Inch Size [mm] Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FSG1-M5-01 1/8 7.2 9.4 9.4 11.6 19.4 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FSG1-U10/32-01 AS131FSG1-M5-03 5/32 8.2 19.8

MY1

x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 K 10 12 9.5 16 15 L 80 100 114 140 170 LD 3.5 4.5 5.6 6.8 8.6 HG 13.5 17.5 21 26 33.5 MM M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 (LL) 40 50 53 70 85 LW 60 78 90 110 121 M 7 8 9 13 13 N 20 25 30 37 45 Model MY1H16 MY1H20 MY1H25 MY1H32 MY1H40 P M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 PC 7.5 14.5 14.5 15 20.5 PD 21 27 32 42 37.5 PA 40 50 60

1

3.5 M5 x 0.8 M12 x 1.5 41 46 54 56 62 81 8 10 10.5 13.5 15 18 21.5 28 4.5 4.5 5.5 5.5 7.5 7.5 9 9 22 25 30 23 24 4.3 4.3 5.6 5.6 6.6 6.6 8.6 8.6 10 12 13 15 20 20 22 22 8 8 9.5 9.5 11 11 14 14 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Bore size (mm) DB M5 x 0.8 M12 x 1.5 3.5 M5 x 0.8 Standard stroke (mm) HA Slide FA B C DA FB G GA GB H J K L MM ML OA GC JA JB MC NN MA A

Table of Contents

Refer to page 3-13-4.)

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-/22-MXS12L-10 13-/22-MXS12L-20 13-/22-MXS12L-30 13-/22-MXS12L-40 13-/22-MXS12L-50 13-/22-MXS12L-75 13-/22-MXS12L-100 788 MXS 1322Air Slide Table Dimensions: MXS16 1322Basic 2 x M5 x 0.8 thread depth 5.5 11 3 Vacuum suction port M5 x 0.8 Operating port 2 x M5 x 0.8 J 10 Maximum 13.5 (With stroke adjuster at retraction end) I 5.5 12 6 12 12 9.5 10 5.5 10 5.5 21 K 5.5 KA 21 NA x M5 x 0.8 thread

Vacuum System Peripherals:

ZSE30/ZSE40/ZSE5B 13-14-9 2. ZSE6B/ZSE3/ZSE1/ZSE2 13-14-10 3. PS1100/ZSP1/PSE200/530 13-14-11 Misc. Pressure gauge for vacuum: GZ46 13-14-12 Pressure Gauge for Vacuum Related Products: Air Line Equipment/Modular Type 1. Air filter: Series AF 13-14-13 2. Regulator: Series AR 13-14-13 3. Filter regulator: Series AW 13-14-13 4.

Table of Contents

0.8 VEX NPT 1/8 NPT 1/8, M5 x 0.8 4 One-touch fitting AMR R 1/8, M5 x 0.8 6 One-touch fitting 5/32" One-touch fitting NPT 1/8, M5 x 0.8 ITV 1/4" One-touch fitting JIS Symbol M5 x 0.8 female thread is cut inside the pipe.

SMC

4 5 H 28 30 20 28 23 28 G 9 12 13 15 20 27 N 4 4 4 4 6 6 HA 20 30 20 28 46 56 KA 82.5 132.5 GA 17 12 33 43 43 83 NA 2 2 2 2 4 4 13-/22-MXS8L-10 13-/22-MXS8L-20 13-/22-MXS8L-30 13-/22-MXS8L-40 13-/22-MXS8L-50 13-/22-MXS8L-75 139 MXS Air slide table 1322Dimensions: MXS12 1322Basic style 2-M4 x 0.7 thread depth 5 Operating port 2-M5 x 0.8 9.5 2 Vacuum suction port M5 x 0.8 5.5 J 8 Max. 11 (With

One-touch Fittings

KQ2 Series Model Applicable tubing Connection thread Part number 3.2 M3 x 0.5 KQ2H23-M3G1 3.2 M5 x 0.8 KQ2H23-M51 4 M3 x 0.5 KQ2H04-M3G1 4 M5 x 0.8 KQ2H04-M51 4 M6 x 1.0 KQ2H04-M61 6 M5 x 0.8 KQ2H06-M51 6 M6 x 1.0 KQ2H06-M61 6 R1/8 KQ2H06-01S1 1/8 10-32UNF KQ2H01-321 5/32 10-32UNF KQ2H03-321 3/16 10-32UNF KQ2H05-321 5/32 NPT1/16 KQ2H03-33S1 1/8 M5 x 0.8 KQ2H01-M51 3/16 M5 x 0.8 KQ2H05-M51

0.4

screw R R B B B B B B B B X X P P 7.7 18.7 A A A A A A A A (12) (7.5) P = 10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

MY1

NH NC DTT UU TT UU Auto switch magnet holder M5 x 0.8 (Port) -X GA GA 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) Cushion needle G G 20GB M5 x 0.8 (Hexagon socket head plug) N A M5 x 0.8 (Port) Data Z + Stroke M5 x 0.8 (WW) (WW) (Hexagon socket head plug) 2 x 2-J depth K M5 x 0.8 (Hexagon socket head plug) XX XX M5 x 0.8 (Port) VV VV 2-M5 x 0.8 (Hexagon socket

Series VQ Base Mounted Metal Seal/Rubber Seal

Note 3) M5 fittings for M5 thread are attached without being incorporated.

ZP3

Form w 1 Material 10 N S U F GN GS 2 10 10 11 2 C ZP3 B 13 13 14 3 16 16 17 A B 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber Construction p. 160 Mounting Bracket Assembly From p. 162 With adapter 10 to 16 w q ZP3 B T N 10 A5 M5 x 0.8 Width across flats 10 e Connection thread (Male thread) 10 3 A5 M5 x 0.8 Model Vacuum inlet

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

-11-102 to 103 13-11-104 to 105 13-11-106 to 110 13-11-106 to 110 13-11-111 to 112 13-11-113 to 116 Buffer stroke Adsorption is possible even on a slanted surface.

VQZ1000/2000/3000

mm2 < >: AC 61.5 54 0 1 M plug connector (M): VQZ212 (R)-M-C4/C6/M5 36 300 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 73.5 92 103.5 62 Indicator light 37.5 <42.5> < >: AC 2-7-12 13 13 Body Ported Series VQZ1000/2000/3000 Plug Lead Unit: Single Unit VQZ2000 2 position double Grommet (G): VQZ2220 1(R)-G-C4/C6/M5 300 (Lead wire length) 109.2 54.5 17.3 6 6 R2.5 VQC 3.4 B

F

14.5 14.5 0.9 2.6 3.2 M5x0.8 KJL23-M5 7 7.8 17 13 14 14.5 2.6/2.2 2.6 3.2 M5x0.8 KJT23-M5 7 7.8 17 13.5 14.5 14.5 3.2/2.7 3.1 3.2 R(PT)1/8 KJL23-01S 10 7.8 17 15 15 14.5 2.6/2.2 6.7 3.2 R(PT)1/8 KJT23-01S 10 7.8 17 15.5 15.5 14.5 3.2/2.7 7.3 4 M3x0.5 KJL04-M3 7 8.9 17.5 13 15 14.5 0.8 2.2 4 M3x0.5 KJT04-M3 7 8.9 17 13.5 15.5 14.5 0.9 3 4 M5x0.8 KJL04-M5 7 8.9 17.5 13.5 15 14.5 3.5 2.7 4

Modular F.R.L. Units

13 13 13 13 13 1 Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).

Rotary Actuator/Vane Type

Q1 = M Applicable shaft type: W Applicable shaft type: W Q2 = M L1 = Y = X = L2 = [mm] Size CRB2, CRBU2 Y L2 max Q2 10 7 to 8 Y-3 M4 15 8.5 to 9 Y-3.5 M5 20 10 Y-4 M6 30 13 Y-5 M8 40 15 Y-6 M10 [mm] Size CRB2 CRBU2 X L1 max Q1 X L1 max Q1 10 9 to 14 X-5 M4 7 to 14 X-3 M4 15 11 to 18 X-6 M5 8.5 to 18 X-3.5 M5 20 13 to 20 X-7 M6 10 to 20 X-4 M6 30 16 to 22 X-8 M8 13 to 22 X-5 M8 Symbol: A5

Table of Contents

x 0.8 For work piece mounting 20 LJ1 LG1 LC1 LX LC6D/LC6C Switches Mounting plate 4-9.5 4-5.2 (4-M5 x 0.8) 5.5 13 21 Work piece mounting dimensions 83 50 20 15.5 10 95 103 80 42 This drawing shows the TSUBAKI CABLEVEYOR with left hand entry.