Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 10 Stations, A B Port Size: ø4 One-touch Fitting, P R Port Thread: -

5 Port Solenoid Valve Series SY3000/5000/7000/9000

C6 Symbol Port size Applicable series C4 C6 M C4 C6 C8 M 02 2 stations Single wiring spec.

1

14 14 14 14 14 14 D side U side For the I/O Unit part number mounted, refer to the following pages.

SY

298 310.5 323 335.5 337.5 350 287.5 300 312.5 325 325 192 202.5 213 223.5 234 244.5 255 Manifold spec. sheets 14 15 16 17 11.5 12.5 13.5 178 SY3000/5000 Type 45S2 SY5000: Serial Transmission/Plug-in C4 C6 C8 Scale: 20% SS5Y5-45S2DStations UNote) Dimensions L1 to L4 of C4 C6 C8 C4 C6 C8 C4 C6 C8 C4 C6 C8 SS5Y5-45S2DStations D, SS5Y5-45S2UStations D, and SS5Y5-45S2UStations Uare the same as

SX

A: Orange B: Green 12 13 14 15 16 17 12 13 Stations n 10 stations 11 12 13 14 15 16 stations 298 310.5 323 335.5 335.5 348 360.5 L1 L2 L3 L4 287.5 300 312.5 325 325 337.5 350 (Rail mounting hole pitch 12.5) 192 202.5 213 223.5 234 244.5 255 14 15 16 17 11.5 12.5 13.5 1-6-125 126 SX5000: Serial Transmission Unit/Plug-in C4 C6 C8 SS5X5-45S2DStations UDIN rail release button (Pitch)P = 16 Note

SQ1000/2000

COM COM 25 26 COM COM 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM 1 2 1 2 1 2 COM COM P kit Flat ribbon cable connector (for 26P) J kit Flat ribbon cable connector (20P) PC Wiring System compatible P kit Flat ribbon

Compact 5-Port Solenoid Valve

Connector entry direction SY30M-14-9A1 Upward SY30M-14-9A2 Lateral Series Part no.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

225 250 262.5 275 287.5 300 300 58.1 42.6 7.5 34.5 48.4 L3 91.5 81 102 112.5 123 133.5 144 154.5 70.5 181.5 192 202.5 213 223.5 234 L4 14 13 12 15 16 17 12 13 14 13 14 15 16 17 11.5 Two SUP/EXH blocks are provided for models with 11 stations or more.

CATALOG

Fixed Eye (1.5 to 14) C MP4 Single Detachable Rear Clevis/Male (1.5 to 14) L MS1 Foot Mount (1.5 to 14) S MS2 Side Lug (1.5 to 14) O MS3 Centerline Lug (1.5 to 14) R MS4 Side-Tapped (1.5 to 14) P .MS7 Front Lug Mount (1.5 to 14) J MT2 Cap Trunnion (1.5 to 14) U MT1 Head Trunnion (1.5 to 14) T MT4 Center Trunnion (1.5 to 14) *See below B MX0 Basic/No Mount (1.5 to 14) BA .

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

6 210.5 200 186.5 12 7 235.5 225 202.5 16.5 8 248 237.5 218.5 15 9 260.5 250 234.5 13 10 285.5 275 250.5 17.5 11 298 287.5 266.5 16 12 310.5 300 282.5 14 13 323 312.5 298.5 12.5 14 348 337.5 314.5 17 15 360.5 350 330.5 15 16 373 362.5 346.5 13.5 L1 L2 L3 L4 186 EX500 Decentralized Serial Wiring 10-SV Dimensions: Series 10-SV1000 for EX500 Decentralized Serial Wiring U D B C3, N1 C4, N3 C6

Series SV

For "M" (mixed ports), indicate the port size, such as C3 or C4, instead of a "" in the a section of the station table.

0.4

VQ7 DIN rail clamp screw Stations 1 2 3 n D side U side 2 x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 75 64 53 97 130 152

Series VQ Base Mounted Metal Seal/Rubber Seal

C4 Refer to p.1.10-195 for cylinder port fittings.

SV

13 335.5 325 311.3 12 14 360.5 350 327.3 16.5 15 373 362.5 343.3 15 16 385.5 375 359.3 13 17 410.5 400 375.3 17.5 18 423 412.5 391.3 16 19 435.5 425 407.3 14 20 448 437.5 423.3 12.5 L1 L2 L3 L4 1-2-60 57 Circular Connector Series SV Dimensions: Series SV1000 for Circular Connector U D B C3, N1 C4, N3 C6, N7 Stations (S, R, RS) (-D) Tie-rod base manifold: SS5V1-W10CDWhen P, E port outlets

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

, C6, M5 C4, C6, C8 C8 C10 The total number of stations is tabulated starting from station one on the D-side.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

, C6, M5 C4, C6, C8 C8 C10 The total number of stations is tabulated starting from station one on the D-side.

0.4

Note) Based on JIS B 8375-1981 (Supply pressure: 0.5 MPa) To CYL port VP4 VQ 1/2 VQ 1/2 Dimensions VQ 4/5 Single unit Manifold VQC 1/2 2n x C4, C6 C4: 4 One-touch fitting C6: 6 One-touch fitting 2 x C4, C6 C4: 4 One-touch fitting C6: 6 One-touch fitting VQC 4/5 VQZ M3 mounting hole M2.5 mounting hole SQ VFS VFR VQ7 Residual pressure release manual override DIN rail clamp screw Residual

Vacuum System Peripherals:

Mist separator: Series AM/AFM 13-14-13 Fittings & Tubing 1. Compact One-touch mini: Series KJ 13-14-14 2. One-touch fitting: Series KQ 13-14-14 3. One-touch fitting manifold: Series KM 13-14-14 4. Miniature fitting: Series M3/M6/R 13-14-14 5.Tubing 13-14-15 Flow Control Equipment 1. Speed controler: Series AS 13-14-15 2.

V

M1 Weight AQ240F-04-04 4 9.5 8.9 39.3 5 13.7 23.4 13 5.7 AQ240F-06-06 6 11.5 11 43.9 6 14.7 26.5 14 7.3 AQ340F-06-06 6 11.5 11 45.2 6.3 19.6 31.7 14 12.5 Courtesy of Steven Engineering, Inc. !

VQZ1000/2000/3000

Indicator light 3.5 to 7 Cover diameter 1.5 Cross section 0.23 mm2 < >: AC 61.5 M plug connector (M): VQZ2220 1(R)-M-C4/C6/M5 54 36 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 300 73.5 124.5 147 62 Indicator light 37.5 <42.5> < >: AC 2-7-13 Body Ported 14 14 Series VQZ1000/2000/3000 Dimensions: VQZ2000 3 position closed center/exhaust center/pressure center Grommet (G):