Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) (mm) Q1 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Size 30 50 63 80 100 Size 30 50 63 80 100 Symbol: A35 Symbol: A36 Symbol: A37 Machine female threads into the short shaft.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) (mm) Q1 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Size 30 50 63 80 100 Size 30 50 63 80 100 Symbol: A35 Symbol: A36 Symbol: A37 Machine female threads into the short shaft.

Table of Contents

x 0.8, NPTF 1/8, M5 x 0.8 Port size R 1/8, M5 x 0.8 NPTF 1/8, M5 x 0.8 ZX ejector mounted type: M5 x 0.8 Enclosure IP40 Note 1) Instant pressure supply of 0.5 MPa has no influence on the switch.

Table of Contents

1 Hexagon socket head screw Steel M5 x 50 M5 x 50 M5 x 50 !2 Detent assembly AXT510-9 Refer to How to Order Pilot Valve Assembly on page 3-8-86. Pilot valve assembly !

Prevents Micro-Bubbles

Symbol Thread type M5 Rc 1/8 NPT 1/8 Body class 2 3, 4, 5, 6 3, 4, 5, 6 LVH Nil N Variations LVD LVC20 LVC30 Model LVC40 LVC50 LVC60 Orifice diameter LVQ Inch sizes 4 8 10 16 22 Tubing O.D. 03 05 07 11 13 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 Metric 4, 6 6, 8, 10 10, 12 12, 19 19, 25 LQ Inch Valve type 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Symbol Type LVN Basic type N.C.

Table of Contents

Octagon Port size C B T-interface Center of F .R.L. body D A (mm) C 12 D 14 E 8 B 19 A 11 Port size M5 x 0.8 1/8 1/4 1/8 1/4 1/4 3/8 1/4 3/8 3/8 1/2 Model Y110-M5 Y210-01 Y210-02 Y310-01 Y310-02 Y410-02 Y410-03 Y510-02 Y510-03 Y610-03 Y610-04 Applicable model AC10, AC10B AC20, AC20B AC20C AC25, AC25B AC25C, AC30 AC30B, AC30C AC40, AC40B AC40C 32 28 19 42 15 39 30 19 53 15 44 36 24 62 19 AC40

MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL CV P PA PB PW Q 25, 50, 75, 100 71 58 1.5 1.5 11 8 8.5 9 M5 x 0.8 12 13 15 M5 x 0.8 4.3 5.6 5.6 M5 x 0.8 Rc 1/8 Rc 1/8 40 10 16 18 26 64 83 93 8 9.5 9.5 19 8 10 12 M4 M5 M5 4.5 5.5 5.5 8 10 10 15 18 21 5 6 6 15 18 21 30 36 42 22 24 30 16 20 25 78 62 10.5 M5 x 0.8 M5 x 0.8

VQC

For example, changing from F Kit (D-sub connector) to S Kit (serial transmission) is achieved by simply changing the kit piece. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram) Printed circuit board patterns between connectors are shifted at every station

Table of Contents

E-M5 thread depth 10 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 46 76 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch

Stainless Steel One-touch Fittings Series KG

(mm) M5 Weight (g) D A Nylon Urethane M5 0.8 KGS04-M5 KGS04-01 KGS06-M5 KGS06-01 KGS06-02 KGS08-01 KGS08-02 KGS08-03 KGS10-01 KGS10-02 2.7 2.6 8 3.6 2.7 2.7 4.1 2.7 15.5 13 16 19 16.5 9.5 9.8 11.5 11.8 13.8 2.5 19 23 20 4 1 8 3 2.5 M5 0.8 14 3.2 9 15 12 11 24 18 12 10.0 10.0 9.9 1 8 1 4 1 8 1 4 3 8 1 8 1 4 6 4 20 17 24 10.7 17.2 5 24 19.5 21 26 21.5 28 25.5 27.5 30 14 8 18.5 16.2 23.3 6 17

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Data Bore size (mm) Standard stroke range (mm) Long stroke range (mm) A K AL C I KA B1 D E J F GA H H1 13 17 17 19 27 27 32 41 5 6 6 8 11 11 13 16 M4 x 0.7 depth 7 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 16 M10 x 1.5 depth 16 M10 x 1.5 depth 22 18 22 22 30 35 35 40 40 15.5 19.5 19.5 27 32 32 37 37 14 16.5 20 26 32 38 50 60 8 10 12 16 20 20 25 30 26 31 38 47 58

CG5-S

x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 1/8 83 123 32 to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 125 40 to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 44 1/8 93 143 50 to 1200 109 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25

KJ

(inch) Connection thread R Model H (Width across flats) L2 A M Min. port size <M5> Note) Weight (g) D1 D2 L1 15.3 10 KQ2L01-M5 M5 x 0.8 7 1 8 10 2.5 8.4 12.7 24 13.2 14.3 2.3 KQ2L05-02S KQ2L05-01S 1 8 22.5 26.5 11.4 10 19.5 16.5 3.5 3 16 1 4 3.2 19 18 26 14 12 16.1 KQ2L07-M5 M5 x 0.8 7 13.6 15.1 2.3 1 8 1 4 KQ2L07-01S 23.5 26 10 4.6 10 20 32 12 20 28 23 Applicable tubing 1 4 KQ2L07-02S

CJ2

1 6-3-18 19 19 Series CJ2W Air Cylinder: Standard Type Double Acting, Double Rod Basic Style (B) CJ2WB Bore size Stroke Mounting nut CJ2WB6 Rod cover Piping port 2-M5 x 0.8 Rod end nut CJ1 CJP S + Stroke Z + 2 x Stroke CJ2 Mounting nut CM2 Rod end nut Piping port 2-M5 x 0.8 CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200

V

45.8 39.8 27.4 23.4 19 21 23 ASV310F-02-06S 6 R(PT)1/4 14 16.8 12.8 17.6 71.9 65.9 69.9 63.9 45.8 39.8 31.4 25.4 17 19 30 ASV310F-02-08S 8 R(PT)1/4 14 19.3 15.2 17.6 73.8 67.8 71.8 65.8 45.8 39.8 31.4 25.4 19 21 31 ASV410F-01-08S 8 R(PT)1/8 12 19.3 15.2 24 83.1 75.6 81.1 73.6 52.8 45.3 30.7 26.7 19 21 39 ASV410F-01-10S 10 R(PT)1/8 12 23.3 18.5 24 85.2 77.7 83.2 75.7 52.8 45.3 30.7 26.7 21

•

M5 Modol ~ M6 M8 M5 1M6 M8 M5 M6 M8 M4 IM5 M6 M8 ZPR10g 10 12 12 21 29.9 46 5 6 3 1.7 19 20 i''i: '')I {''::''j ,"i'i 1,;,,1 I 19 1 :P>~2 ZPRIl8 , 20 ZF!R13g 1 3 15 12 21 29.9 46 5 6 3 1.8 '2.~,1 ''2,H 23 22 ZPR13 -,ZPR16g 1 6 18 12.5 21.5 30.' 46.5' 5 6 3.5 1.2 ZPR10 23 22 23 22 22 Deep type (mm) I Model M ,.8 C D E F M:M5xO~J M:M6X1 y G ! G ZPR16 23 22 ZPR20' !

MXS

MXS16 Mounted to table 16.5 M5 X 18 19 M5 X 18 14 5 21 37 12 11 MXS-AS16-X11 15 34.5 M10 X 1 MXS-AS16-X12 25 44.5 Q MXS-AS20 5 27.5 MXS20 M12 X 1.25 21 M6 X 20 24 M6 X 20 17 6 25 13 13 45.5 MXS-AS20-X11 15 37.5 I MXS-AS20-X12 25 47.5 J H MXS-AS25 5 32.5 MXS25 MXS-AS25-X11 15 42.5 25.5 M8 X 25 M8 X 25 19 6 26.5 M14 X 1.5 31 17 16 53.5 MXS-AS25-X12 25 52.5 * Size of hexagon socket head cap

Vacuum System Peripherals:

For vacuum pump servies: Series ZX 13-14-19 3. Series ZM 13-14-20 4.

Series KG Stainless Steel One-touch Fittings

(mm) M5 Weight (g) D A Nylon Urethane M5 0.8 KGS04-M5 KGS04-01 KGS06-M5 KGS06-01 KGS06-02 KGS08-01 KGS08-02 KGS08-03 KGS10-01 KGS10-02 2.7 2.6 8 3.6 2.7 2.7 4.1 2.7 15.5 13 16 19 16.5 9.5 9.8 11.5 11.8 13.8 2.5 19 23 20 4 1 8 3 2.5 M5 0.8 14 3.2 9 15 12 11 24 18 12 10.0 10.0 9.9 1 8 1 4 1 8 1 4 3 8 1 8 1 4 6 4 20 17 24 10.7 17.2 5 24 19.5 21 26 21.5 28 25.5 27.5 30 14 8 18.5 16.2 23.3 6 17

VZ100/300/500

VZ VS VFN 4-6-19 20 Series VZ300 Manifold for Internal Pilot 20-1 How to Order Applicable solenoid valve VZ312--M5 VZ312M--M5 VZ322--M5 VZ322M--M5 Applicable blanking plate assembly DXT200-8-6A VV3Z3 20 05 1 A port P/R port Thread type P port Stations Option 02 2 stations R port F Nil Rc G NPT NPTF Foot bracket 00F 00N 00T Bracket is not mounted. 20 20 stations Note) For more than 6 stations