3 Port Air Operated Valve

689 674 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 stations Station n L1 L2 1572 Air Operated Valve Common Exhaust Type 41 /Individual Exhaust Type 42 VPA300/500/700 Series VPA700 Series/Dimensions Type 41/Common exhaust: VV3PA7-411-04 Stations 127 40 24 2 x 8.5 (For mounting) N.C.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

This could cause an auto switch malfunction. 0.3 35.7 37 5.5 5.5 10 K 21 NA x M5 x 0.8 thread depth 6.5 5.5 10 KA 21 M 30 3 x M6 x 1 thread depth 10 5H9 ( ) depth 5 +0.030 0 14 2 N 1 x F 6.5 41 4 x M5 x 0.8 thread depth 7 12.5 (Extension end adjuster) F 3.5 49 1 24 14.5 24.5 24.5 28 29 58 6 Retraction end adjuster 5H9 ( ) depth 5 +0.030 0 11 5.5 N x M5 x 0.8 thread depth 6 Note 1) Note 2

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

9 4 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 8.5 9.5 10.5 10.5 -0.004 -0.012 0 -0.043 12 5 15.5 0.5 M3 x 0.5 34 25 9 18 1.5 6 10 29 3.5 M3 x 0.5 21 3 29 36 48 11 10 11.5 11 -0.004 -0.012 0 -0.043 14 6 17 0.5 M4 x 0.7 42 34.5 10 20 1.5 7 10 36 4.5 M4 x 0.7 26 4 36 44 59 M5 x 0.8 14 13 D12 13 -0.005 -0.014 0 -0.043 16 8 1 4.5 17.5 M5 x 0.8 50 47.5 13 22 2 8 12 43 5.5 M5

RLQ

RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75 RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l

CQS

M5 X 40 l M5 X 45 l M5 X 50 l M5 X 55 l M5 X 60 l M5 X 65 l M5 X 70 l M5 X 75 l M5 X 80 l M5 X 85 l 40 45 50 55 60 65 70 75 80 85 M3 X 30 l M3 X 35 l M5 X 40 l M3 X 45 l M5 X 50 l M3 X 55 l 30 35 40 45 50 55 6.5 8.5 Note 1) The appropriate plain washer must be used for through-hole mounting.

Compact Cylinder with Air Cushion and Lock Series RLQ

Model C D Mounting bolt M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l M6 x 130l M6 x 140l M6 x 165l M6 x 190l M8 x 125l M8 x 135l M8 x 145l M8 x 170l M8 x 195l RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75

CL

50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.

MXS

Model *1) * A B C D E E1 F G H K L M N J P Q MGF MXS 8 MXS12 MXS16 MXS20 MXS25 MXS-BT 8 38 23 12.5 14 40.8 5 8 12 1.4 16.6 7 15.5 14.6 M8 X 1 M3 X 12 M3 X 16 MXS-BT12 45 31 18 14 40.8 6 8 12 1.4 20.5 10 15 18.5 M8 X 1 M4 X 8 M4 X 15 CY1 MXS-BT16 55 37 23.5 16 46.7 7 10 14 1.4 23 12 18.5 21 M10 X 1 M5 X 10 M5 X 18 MXS-BT20 70 47 29 23 67.3 11 12 19 12 27 13 25.5 25 M14 X 1.5 M5 X 12 M6 X 25

PA300/500/700

Series VPA700 2.9/3.1 3.5/3.3 3.5/3.5 3.8/4.0 0.18/0.23 0.19/0.18 0.27/0.27 0.26/0.28 14/14 15/16 12/12 15/14 VPA744 (Base mounted) 0.71 Note 1) In the case of body ported type, the valve is without bracket.

Auto Switch Guide

mounting screw M5 x 0.8 x 16 l 1.

Auto Switch Guide

mounting screw M5 x 0.8 x 16 l 1.

Auto Switch Guide

mounting screw M5 x 0.8 x 16 l 1.

Aluminum High Vacuum Angle Valve

Rc1/8 Pilot port size XLAV M5: Port 1(P), Port 3(R) Rc1/8: Port 1(P), M5: Port 3(R) XLA 0.25 0.45 1.1 1.6 2.9 5.0 10.6 18.5 Weight (kg) XLAV 0.29 0.49 1.14 1.64 2.96 5.06 10.7 18.6 Note 1) Conductance is the value for an elbow with the same dimensions.

VP300/500/700

7.4 9.0 7.5/7.7 8.8/9.3 12 14 14/14 15/16 Cv 0.86 0.88 0.80/0.86 1.0/1.0 2.0 2.4 1.9/2.1 2.3/2.4 3.1 3.8 3.5/3.5 3.8/4.0 C [dm3/(sbar)] 2.9 3.2 2.9/3.0 2.7/3.6 6.9 8.8 7.9/7.4 9.2/8.8 12 15 14/13 15/15 Cv 0.83 0.92 0.83/0.83 0.86/0.88 1.7 2.2 1.9/1.8 2.1/2.0 3.1 3.7 3.2/3.2 3.6/3.7 C [dm3/(sbar)] 3.5 4.4 3.5/3.5 4.1/3.9 7.5 9.3 7.4/7.3 9.2/9.1 13 16 14/14 15/15 Cv 0.93 1.1 0.89/0.89 1.0/

Auto Switch Guide

CP95 Auto switch mounting screw M5 x 0.8 x 16 l 1.

CXWM/CXWL

For dimensions of 25 stroke, refer to page 8-26-16. 8-26-15 14 Series CXWM 10 With End Lock: CXWM1025 Stroke R 2 x 2-M4 x 0.7 thread depth 8 2 x 2-4H7 depth 5 +0.012 0 2-M8 x 1.0 Adjusting bolt Socket 4-3.2 through 2-M5 x 0.8 hexagon socket head cap plug 2-M5 x 0.8 4-6.5 counterbore depth 3.3 (Cylinder port) Cylinder port 2-M5 x 0.8 plug (M-5P) (Cylinder port) 2-RB0805-X552 shock absorber

Series IDG

Page 41 Precautions .

3 Port Solenoid Valve Series SYJ300/500/700

M5 x 0.8 (A port) 14 5 10 2-3.2 (For mounting) 26.4 17 3 2.5 Manual override A 11 G: Approx. 300 H: Approx. 600 (Lead wire length) 48.6 [50.8] (Light/surge voltage suppressor) 41.5 [48.5] + M5 x 0.8 (X port) 35.6 28.5 26.1 X R P 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 17.5 23 L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (W0): SYJ34-W0-M5 Approx. 300 (Lead

Round Type Hydraulic Cylinder

12 19 23.5 B 13 15 14 19.5 A 14.5 12.5 19.5 24 B 13.5 15.5 14.5 20 B 7.5 9.5 8.5 14 B 10.5 12.5 11.5 17 B 7 9 8 13.5 20 25 32 40 Note) When setting an auto switch, be sure to check its operation before adjusting.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

42 C 100 A B C D E F G H Y 63 65 14.5 26 41 63 103 154 3.5 Model ZPX63HJ25-01-A18 ZPX63HJ50-01-A18 ZPX63HJ75-01-A18 ZPX80HJ25-01-A18 ZPX80HJ50-01-A18 ZPX80HJ75-01-A18 63 65 14.5 26 41 63 136 189 3.5 40 ZPX40HJ75-01-A18 42 171 222 63 65 14.5 26 41 63 172 225 3.5 50 ZPX50HJ25-01-A18 52 100 151 80 82 16.5 28 43 65 105 156 4.5 50 ZPX50HJ50-01-A18 52 135 186 80 82 16.5 28 43 65 138 191 4.5 50