5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VP7 285.5 21 273 No.

Speed Controller with One-touch Fittings

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tubing O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

VK300

: Body ported (A port top ported) Applicable solenoid valve VK332--M5 VK332--01 Applicable blanking plate assembly VK300-42-1A VV3K3 05 21 A port: Rc 1/8, M5 x 0.8 Thread type Valve stations 01 1 station Nil Rc G NPT NPTF 00F 00N 00T 20 20 stations P port: Rc 1/8 R port: Rc 1/8 4-5-3 4 Series VK300 Combinations of Solenoid Valve, Manifold Gasket and Manifold Base 3 port body ported: VK332

Table of Contents

analog Nil 21 22 23 24 P kPa Applicable to plug connector.

SZ3000

Double wiring specification Double wiring specification Connector entry direction 04 05 09 10 4 stations 9 stations 1: Vertical connector 2: Horizontal connector 5 stations 10 stations Specified wiring (up to 19 solenoids possible) Specified wiring (up to 9 solenoids possible) ... ... ... ... 09 19 9 stations 19 stations Note 1) Double wiring specifications: Single, double and 3 position

Vacuum System Peripherals:

Section code 13-14-20 20 ZX ZR ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF ZP ZCU AMJ Misc. 13-14-21 Date issued: 21 Photo copying this page is recommended.

5 Port Solenoid Valve Series SQ1000/2000

position 4 position One-touch fitting Effective area mm (Cv factor) Single/Double Double (Latching/ Double solenoid) Pressure center Exhaust center Series Closed center C3 C4 C8 C6 Dual 3 port valve (3.2) (4) (8) (6) Single SQ130 Metal seal SQ131 Rubber seal SQ230 Metal seal SQ231 Rubber seal 3.2 (0.18) 4.5 (0.25) 11.7 (0.65) 14.8 (0.82) 18 Series SQ1000/2000 How to Order Manifolds SS5Q 3 (-00T

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

-07SD AS321F-03-08SD 1/4" 13.2 27.8 39.3 17 41 29.5 18.5 8 15.2 79 77 R 3/8 19 23 9.8 1.2 47.4 19.8 52.6 AS321F-N03-09SD AS321F-03-10SD NPT 3/8 19 23 9.8 1.2 47.4 5/16" 15.2 29.5 41 18.5 43.3 31.8 21 10 18.5 81 79 19.8 52.6 AS321F-N03-11SD AS321F-03-12SD 3/8" 44.3 17.9 31.8 43.3 21 32.8 22 12 20.9 83 81 AS421F-N04-11SD AS421F-04-10SD 3/8" 17.9 33.6 47.9 21 47.9 33.6 21 10 18.5 141 141 24

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

-11SD 6 17.9 31.8 43.3 21 3/8" 12.8 39.3 17 27.8 AS321F-03-08SD AS321F-N03-07SD 8 15.2 41 18.5 29.5 1/4" 13.2 27.8 39.3 17 53.7 23 9.8 47.4 R 3/8 1.2 19 20.9 AS321F-03-10SD AS321F-N03-09SD 10 18.5 43.3 NPT 3/8 19 23 9.8 20.9 53.7 1.2 47.4 21 31.8 5/16" 15.2 29.5 41 18.5 AS321F-03-12SD AS321F-N03-11SD 12 20.9 44.3 22 32.8 17.9 31.8 43.3 21 3/8" AS421F-04-10SD AS421F-N04-11SD 10 18.5 47.9 21

VM

Panel mounting hole Push button (Extended) VFM350-02-32R/B/G/Y (Pilot exhaust port) JIS Symbol 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F. (EXH port) 2-4.2 mounting hole (SUP CYL port) 1.7 mm O.T. 6.5 mm T.T. Panel mounting hole Push button (Flush) VFM350-02-33 (Pilot exhaust port) JIS Symbol 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Thread type 1(P), 3(R) port Nil Rc 00N NPT 00T NPTF 00F G Dusttight/Low Jetproof Type (IP65) DIN terminal is available with dusttight/low jetproof (IP65) type.

VM

Panel mounting hole Push button (Extended) VFM350-02-32R/B/G/Y (Pilot exhaust port) JIS Symbol 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F. (EXH port) 2-4.2 mounting hole (SUP CYL port) 1.7 mm O.T. 6.5 mm T.T. Panel mounting hole Push button (Flush) VFM350-02-33 (Pilot exhaust port) JIS Symbol 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F.

PFxx-OMJ0005CN

2 -63No.PF-OMJ0005CN-I PFM7-F02L 2 21 -64No.PF-OMJ0005CN-I PFM7S-F02 21 2 -65No.PF-OMJ0005CN-I PFM7S-F02L 2 21 -66No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7 2 -67No.PF-OMJ0005CN-I PFM7-C4L/C6L/C8L/N7L 2 -68No.PF-OMJ0005CN-I PFM7S-C4/C6/C8/N7 2 -69No.PF-OMJ0005CN-I PFM7S-C4L/C6L/C8L/N7L 2 -70No.PF-OMJ0005CN-I A 54 +0.5 0 74 +0.5 0 1 2R R3 313.2 mm (ZS-33-M) (ZS-33-MS) -71No.PF-OMJ0005CN-I (ZS-

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

SMI_PortConfigList (acquires IO-Link master port parameter: Read) [Request] Data Value Notes Service code 0x32 Class 0x90 Instance 0x01 to 09 Unit No. +1 Attribute 0x65 to 68 Port No. 1 to 4 Data[0] 0x80 Fixed value Data[1] 0x00 Fixed value [Response] Data Value Ack[0] to [3] 0xB20 When reading is succeeded: 0xB20 0: Deactivated 1: IOL_Manual 2: IOL_Autostart 3: DI_C/Q 4: DQ_C/Q Data[0]

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 40 285.5 21 273 No.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

18.5 16 3.5 AS2051F-09-3 AS3001F-10-3 71.6 9.8 33.7 62.5 57.1 21 5/16" 15.2 59.8 8.1 27 54.8 49.4 18 10 18.5 AS3001F-07-3 AS3001F-12-3 76 11 34.9 63.7 58.3 22 1/4" 13.2 59 7.4 31.3 60.1 54.7 17 20.9 12 AS3001F-09-3 AS4001F-10-3 82 11.3 35 69.3 61 21 18.5 64.4 8.2 5/16" 21 15.2 32.1 3.5 60.9 55.5 18 10 18.5 16 27 24.5 21 3.5 AS3001F-11-3 AS4001F-12-3 36 70.3 62 22 70.8 3/8" 17.2 33.3 62.1

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

16 18.5 3.5 AS2051F-09-3 AS3001F-10-3 71.6 9.8 33.7 62.5 57.1 21 5/16" 15.2 59.8 8.1 27 54.8 49.4 18 99 54 10 18.5 AS3001F-12-3 76 11 34.9 63.7 58.3 22 AS3001F-07-3 1/4" 13.2 59 7.4 31.3 60.1 54.7 17 100 84 12 20.9 AS4001F-10-3 77.7 AS3001F-09-3 82.1 11.3 35 69.3 61 21 5/16" 21 15.2 32.1 3.5 60.9 55.5 18 64.4 8.2 167 88 18.5 16 10 18.5 27 21 24.5 3.5 AS4001F-12-3 36 70.3 62 22 AS3001F-11

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

18.5 16 3.5 AS2051F-09-3 AS3001F-10-3 71.6 9.8 33.7 62.5 57.1 21 5/16" 15.2 59.8 8.1 27 54.8 49.4 18 10 18.5 AS3001F-07-3 AS3001F-12-3 76 11 34.9 63.7 58.3 22 1/4" 13.2 59 7.4 31.3 60.1 54.7 17 20.9 12 AS3001F-09-3 AS4001F-10-3 82 11.3 35 69.3 61 21 18.5 64.4 8.2 5/16" 21 15.2 32.1 3.5 60.9 55.5 18 10 18.5 16 27 24.5 21 3.5 AS3001F-11-3 AS4001F-12-3 36 70.3 62 22 70.8 3/8" 17.2 33.3 62.1

Piping: Body Ported, Stations: 9 Stations, A, B Port: NPTF

Piping: Common SUP/Individual EXH, Stations: 9 Stations, Bracket: -