7

9 !8 r u !7 @8 @5 @6 @7 @9 CKG1C (Clevis width 12.5) i !2 #1 !3 !5 !0 !1 Component Parts No. Description Material Qty Note No.

IDG

With float type auto-drain With drain guide Port size A B C D E J K L M N F G H Model P IDG3M/3HM/5M/5HM IDG10M/10HM 157 201 226 150 146 56 87 196 162 158 99 1/8, 1/4 5.5 66.5 35 210 196 15 9 IDG20M/20HM 1/4, 3/8 205 201 66 130 209 13 12 223 209 IDG30M/30HM 162 158 87 6 78 40 20 303 IDG30LM 149 145 56 86 196 9 210 196 5.5 7 5.5 70 95 70 35 50 35 15 22 15 IDG50M/50HM 3/8 177 172 80 87 241

SY

1 40 LO Z With indicator light/ surge voltage suppressor (non-polar type) U 1 SY 9 1 40 LOZ For AC: Note) For "Z", only positive COM specification is available.

CG5-S

to 800 1/8 30 19 60 26 16 46 6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 44 93 147 50 32 to 1200 1/4 35 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 109 172.5 63 32 to 1200 1/4 35 27 90 38 20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 69 109 174 80 37 to 1400 3/8 40 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 80 130 208 100 37 to 1500 1/2

CNG

201 to 350 201 to 350 10 (12) 6.5 M5 x 0.8 to 300 20 to 300 96 22 19.5 17 45 103 1/8 57 16.5 10 25 9 7 10 6 31 301 to 400 301 to 400 10 (12) 6.5 M5 x 0.8 to 300 20 to 300 97 22 19.5 17 45 104 1/8 57 20 12 25 9 7 10 6 38 301 to 450 301 to 450 10 (13) 7 M6 x 1 to 300 20 to 300 104 30 27 19 52 112 1/8 65.5 26 16 26 11 7 12 8 47 301 to 800 301 to 800 (mm) Bore size (mm) 20 25 32 40 P K KA M

SYJ3000/5000/7000

0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 SS5YJ7-20 Body ported SYJ72 for internal pilot SS5YJ7-21 SS5YJ7-40 SS5YJ7-41 SS5YJ7-42-C6 SS5YJ7-42-C8 Base mounted SYJ74 for internal pilot Note) Value at manifold base mounted, 2 position single operating How to Order Manifold

Compact Cylinder with Air Cushion

Rc 1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 11 for details on rod end nut and accessories.

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

MTS

9 y !7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w MX MTS MY 12 to 40 CY @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

0.8 (Piping port) M5 x 0.8 (Relief port) 5.5 2 x 5.4 through M10 x 1.25 52 1 12 28 40 Rod end nut 15 Flat washer 19.6 10 17.5 7 7 10 28 32.5 + Stroke 22.5 40 55 + Stroke 17 6 Note 1) Standard strokes available in 5 mm increments.

CG1

Basic Mounting CG1N20SCG120, #1 CG1N25SCG125, #1 CG1N32SCG132, #1 CG1N40SCG140, #1 CG1N50SCG150, #1 CG1N63SCG163, #1 CG1N80SCG180, #1 CG1N100SCG1100, #1 Foot : Add #2 Front flange : Add #3 Rear flange : Add #4 Front trunnion : Add #5 Rear trunnion : Add #6 1.6-9 Series CG1 With Mounting Bracket Clevis (mm) Bore (mm) Stroke range (mm) TH TF TE V RR L CZ CX B CD 20 25 32 40 50 63 80 100 25

Cylinder with Lock Series CNG

201 to 350 201 to 350 10 (12) 6.5 M5 x 0.8 20 to 300 to 300 96 22 19.5 17 45 103 1/8 57 16.5 10 25 9 7 10 6 31 301 to 400 301 to 400 10 (12) 6.5 M5 x 0.8 20 to 300 to 300 97 22 19.5 17 45 104 1/8 57 20 12 25 9 7 10 6 38 301 to 450 301 to 450 10 (13) 7 M6 x 1 20 to 300 to 300 104 30 27 19 52 112 1/8 65.5 26 16 26 11 7 12 8 47 301 to 800 301 to 800 (mm) Bore size (mm) 20 25 32 40 P K KA M

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

5 1 15 (With stroke adjuster at extension end) 2.5 (With stroke adjuster at retraction end) 20 47 50 28 38 16 F 4H9 ( ) depth 3.5 +0.030 0 2 x M5 x 0.8 thread depth 8 N 35 1 x F 2 4 x M4 x 0.7 thread depth 6 4H9 ( ) depth 3.5 +0.030 0 27 M 0.5 30 32 Z ZZ (NN 1) x H G 8.5 18.5 8.5 18.5 H B A 4.2 8.5 9 9 20 1 4H9 ( ) depth 3.5 +0.030 0 5 B A NN x M5 x 0.8 thread depth 10 4H9 ( ) depth 3.5

Compact Cylinder with Air Cushion and Lock Series RLQ

with Air Cushion and Lock Series RLQ Dimensions/63 (Emergency Stop) Foot type/RLQL63 41 55 + Stroke 18 46 91.5 Special cap bolt 5 3.2 95 113 4-11 9 16.2 9 16.2 70 + Stroke 122.2 + Stroke Rod end nut 43.5 Front flange type/RLQF63 60 80 9 92 108 4-9 41 55 + Stroke 18 114 + Stroke Rod end nut 43.5 Rear flange/RLQG63 60 80 4-9 41 55 + Stroke 9 8 113 + Stroke 92 108 Rod end nut 43.5 4-M8 x 1.25

KR

(mm) A Weight (g) L2 M D1 D2 L1 Model Urethane 2-applicable tubing KAY23-M5 15 9.6 28.5 15.5 M5 x 0.8 M6 x 1 8 8 8 15.5 19.5 33 3.4 2.9 9 1 8 KAY23-M6 KAY23-U01 10 3.2 17.5 10 KAY04-M5 KAY04-M6 16 18 18.5 15.5 M5 x 0.8 M6 x 1 8 29.5 6 4.6 4.6 8 10.4 16 4 1 8 KAY04-U01 1 4 KAY04-U02 22 34 34.5 15 20 9 14 10 10 18 6.4 6.4 KAY06-M5 KAY06-M6 16.5 20 20.5 16 M5 x 0.8 M6 x 1 32

RQ

For detailed specifications, refer to page 7-9-1.

VFR

Cable Color List of Each Terminal No. 3 5 7 Red 9 Blue 11 13 2 4 6 8 Red Yes 10 Blue Yes 12 1 Terminal no. Lead wire color Dot marking 1 9 Gray 10 11 12 2 3 Red 4 5 6 Pink 7 Blue 8 Terminal no.

SYJ300/500/700

VKF (A) 2 (A) 2 X X VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN 4-4-55 56 Series SYJ300/500/700 Specific Product Precautions 1 Be sure to read before handling.

High Vacuum Angle Valve, XL Series

pressure to 1 x 10-6 {760 to 7.5 x 10-9} Operating pressure Pa {Torr} Conductance l/s Note 1) 5 14 45 80 160 200 1.3 x 10-10 {1 x 10-9} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s Internal 1.3 x 10-11 {1 x 10-10} at ordinary temperatures, excluding gas permeation {Torr l/s} External Operating time s Note 2) 0.08 0.15 0.35 0.4 0.54 0.7 Flange type KF (NW), K (DN) KF

CXS

3.5 (2) 0.5 (1) 3 (1.5) 5 (3.5) 5 (3.5) C 13 20 28 36 36 46 D 2 5 2 4.5 6.5 6.5 C 5.5 12.5 20.5 28 28 38 D 5.5 2.5 5.5 3 1 1 6 10 15 20 25 32 15.5 22.5 30.5 38 38 48 4.5 7.5 4.5 7 9 9 Lead wire entry is inward prior to shipment.