15

socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 1 1 1 1 (for hub fixing)* 1 1 1 1 1 Ring spacer 1 1 1 1 Hexagon socket head cap screw (for motor flange fixing)* 2 2 * For screw sizes, refer to the hub mounting dimensions. * For screw sizes, refer to the hub mounting dimensions.

Clamp Cylinder with Lock Series CLK1

D-G5NTL 75 + 50 (n-2) 15 75 30.5 38 43 50 A B 0 (1) 0.5 2 2 D-A3 D-G3, D-K3 100 + 100 (n-2) 35 + 30 (n-2) 35 100 D-B5, D-B6 33.5 23.5 25 25 Approx. Hs 25.5 (28.5) 38 43.5 50.5 D-A4 35 + 30 (n-2) 50 + 50 (n-2) 35 55 A B 0 2 3.5 3.5 D-G5NTL 27 25 26.5 26.5 Approx. Hs 33.5 38 43.5 50.5 A B 0 1.5 1.5 D-A3 D-G3, D-K3 23 24.5 24.5 Approx.

Cylinder with Lock Series MNB

9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.

MB1

When replacing brackets, use the hexagon wrenches shown below. ) m m ( e z i s e r o B t l o B s t a l f s s o r c a h t d i W e u q r o t g n i n e t h g i T 0 4 , 2 3 7 4 2 1 C 8 4 2 3 B M 4 1 . 5 3 6 , 0 5 9 4 2 1 C 8 4 0 5 B M 5 1 1 0 0 1 , 0 8 t o o F 1 5 2 1 C A 8 4 0 8 B M 6 5 2 r e h t O 1 5 2 1 C B 8 4 0 8 B M 32 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK ASIA CHINA

CNS

(Different sides, Same side), 1 25 135 125 (n 2) 2 (n 4) 2 (n 4) 2 25 + 55 135 + 55 125 + 55 n = 4, 8, 12, 16 n = 2, 4, 6, 8 n (Same side) n = 4, 8, 12, 16 2 (Different sides, Same side), 1 155 35 145 D-F5NTL (n 4) 2 (n 4) 2 (n 2) 2 155 + 55 35 + 55 145 + 55 n (Same side) n = 4, 8, 12, 16 n = 2, 4, 6, 8 n = 4, 8, 12, 16 2 Different sides 110 35 Same side 110 100 D-A3 D-G39 D-K39 Different

Sine Cylinder Series REC

0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

Sine Cylinder Series REC

0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

12 2 x 2 x M6 x 1.0 effective depth 10 2 x 5.4 through 52 12 1 28 40 Flat washer 10 10 7 7 28 42.5 + Stroke 5 40 47.5 + Stroke Note 1) Standard strokes available in 5 mm increments.

51

Different surfaces Different surfaces Same surface Same surface (n 2) 2 55 + 35 (n 2) 20 + 35 D-M9 5 15 Note 1) 40 Note 1) (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 55 + 35 (n 2) 20 + 35 D-M9W 15 Note 1) 40 Note 1) 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 60 + 35 (n 2) 25 + 35 D-M9A 25 40 Note 1) 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 50 + 35 (n 2) 15 + 35

smcmaintenancepartslist

Caution 1-2.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

P 2 B P 1 2 B 2 B 2 B 2 B Applicable tubing O.D.: 12, 3/8" [1(P), 3/5(R) port] One-touch fitting 1 P 2 B P 1 2 B 2 B 2 B 2 B -+ -+ : 12 : 10, 3/8" Applicable tubing O.D.: 8, 5/16" [4(A), 2(B) port] One-touch fitting [4(A), 2(B) port] 1/4,3/8 -+ -+ One-touch fitting Applicable tubing O.D.: 6, 1/4" (X: External pilot port) Applicable tubing O.D.: 6, 1/4" (PE: Pilot EXH port) One-touch fitting

ZP

Dimensions: Pad Unit ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU 4 4 4 4 3 3 3 3 2 2 2 2 1 1.5 1.5 1 1.5 1 1.5 1 4 4 4 4 0.5 0.5 0.8 0.8 1.4 1.4 1 1 5 4 2 3.5 5.8 4.8 2.4 3.8 ZP2-B06MU ZP2-B08MU Adapter Mounting Dimensions 8 7.5 If an adapter will be made by the customer, design the adapter with the dimensions shown below. 6 6 4 4 Applicable pad B02MU/B035MU/B04MU/B05MU 1.2 2 2 0.8 2 2 6.5 7

ZP

2 !0 !1 Component Parts o No.

•

-::-t-D~ F50W 25+55 1 n 2) 12S + 5S ln ;,l) 135+55(n;:4) W~tl, pes (Dlflerenl surfaces. 90 95 '5 Same surface). Wiin 1 pc DM90AVL 15+30(n.=.1}2 9O + 30 ~2 95 + 30 (n 2 4 4) With n pes. 2 ~-u~~rr~_~~ ( " 2~. 4 6~~~__~__~_ 4 ,--8 ' 2 .c..; 1~ "'~__ ("~_ 8 .~~2~' .. .) _ _ ~~=-= ~.~.S.. -) ( " =~ ~.~~ 6_ ) +-_~ = 4 ~.~ 1 . ~6 ,--,L g:~~~A6U With 2 pes. (DrHerent surface-so 25 125 135 gj.

Hydraulic Cylinders

(built-in magnet) Nil S n 2 pcs. 1 pc.

CP95

of auto switches Auto switch Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.

CP95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

CG1

1 !2 !3 !4 !5 !6 !7 !8 !

VQZ1000/2000/3000

) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.