5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Pressure center Dual 3 port valve Single Double Closed center Exhaust center Pressure center Dual 3 port valve Single Double Closed center Exhaust center Pressure center Dual 3 port valve 78 84 2 position C4 SZ360--C4 4 One-touch fitting 3 position 88 4 position 84 74 81 2 position C6 SZ360--C6 6 One-touch fitting 85 3 position 4 position 81 69 75 2 position SZ360--M5 M5 x 0.8 79 3 position

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VFN 4-14-13 Body Ported 14 Series VQZ100/200/300 Dimensions: VQZ100 VV3QZ12Stations C Grommet (G) (5.5) (35) (11) 27.5 2-4.5 mounting hole n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread (4.5) (7.5) 20 DIN rail clamp screw 5.5 U side n Manual override 5 A 2 A 2 A 2 A 2 4 P = 10.5 (L4) (L3) L1 L2 3 2 1 16.5 Stations Courtesy

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

C6 M5 CM B D D G1 G2 G3 J K N R S With DIN rail (Rail length: Standard) With DIN rail (Rail length: Special) Note 3) Regulator unit with 1 unit Note 4) U side n Regulator unit with 2 units Note 4) L3 8 7 6 5 4 3 2 1 Regulator unit with 3 units Note 4) With ejector unit Note 5) L4 Special wiring specifications (except double wiring) Note 6) With name plate External pilot Note 7) L6 Built-in

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

4 5 6 7 8 n C8: 3(R) port C8: 1(P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 58 43.5 2n-C3, C4, C6, M5 (4(A), 2(B) port) C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread L n Formula: L1 = 11.5n + 55.5, L2 = 11.5n + 73 n: Stations (Maximum 24 stations) Dimensions 24 331.5 349 375 385.5 23 320

SZ3000

SZ Port size 4(A), 2(B) port C4, C6, M5 Made to Order Specifications (For details, refer to page 1-3-38.)

VCC

(for M8 mounting) 3 port valve 2 port valve 64.9 50 8 10.5 Leakage detection port Pilot port C4: 4 One-touch fitting C6: 6 One-touch fitting G1/4 (RETURN port) G1/4 (IN port) 30 31 0.5 to 2 0.5 to 2 10 10 0.5 to 2 0.5 to 2 n-1 5 3 1 1 2 VNA 122.2 <124.2> 142.2 <144.2> VNB 22.6 100 120 80 25 75 SGC SGH VNC n 6 4 2 3 Gate valve Aluminum + hard anodized containing PTFE and POM are used for

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

2(B) Weight (g) Single Double Closed center Exhaust center Pressure center Dual 3 port valve Single Double Closed center Exhaust center Pressure center Dual 3 port valve Single Double Closed center Exhaust center Pressure center Dual 3 port valve 78 84 2 position C4 N3 4, 5/32" One-touch fitting 10-SZ360-C4 N3 88 3 position 84 74 81 4 position 2 position C6 N7 6, 1/4" One-touch fitting C6

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

: VQZ200 VV3QZ25C Port size Station (35) 38 (11) Grommet (G) 24.5Mounting holes (5.5) 30 (7.5) DIN rail clamp screw n-C4, C6, C8, 01 (3.5) 21.5 C4: One-touch fitting for 4 C6: One-touch fitting for 6 U side C8: One-touch fitting for 8 n 01: Rc(PT)1/8 A 2 A 2 Manual override 5 SY SMC 4 (L4) (L3) SYJ L2 L1 P=16 P=16 15.5 3 2 VK 1 18 VZ Station 5 D side VT 22.5 300 50.5 3 70 VT (Lead wire) Cover

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

R P 3.5 to 7 3 1 < >: AC 93.5 86 M plug connector (M) R P (Lead wire length) 3 1 87 300 83.5 98.5 Indicator light Cross section 0.23 mm2 Cover diameter 1.5 69.5 <74.5> R P 3 1 < >: AC Formula L1 = 20n + 8 L2 = 20n + 26 n: Stations (Maximum 20 stations) Dimensions L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 48 66 87.5 98 68 86 112.5 123 88 106 137.5 148 108 126 150 160.5 128 146 175

Model: VDW30, Voltage: 24VDC, Power-saving Circuit: Power-saving Circuit, Electrical Entry Direction: Piping Direction, Orifice Diameter: 1.0 mm, Port Connection Type: One-touch fitting for ø6, Body Material and Coil Insulation Type: PPS Body, EPDM Seal, Class B Coil, Option: Bottom Mounting Insert Type

Model: 3 (VDW30), Voltage: 5 (24VDC), Power-saving Circuit: E (Power-saving Circuit), Electrical Entry Direction: Piping Direction, Orifice Diameter: 1 (1.0 mm), Port Connection Type: C6 (One-touch fitting for ø6), Body Material and Coil Insulation Type: B (PPS Body, EPDM Seal, Class B Coil), Option: N (Bottom Mounting Insert Type)

VZ100/300/500

R A: 0.19 A P: 0.13 VP VG Grommet (G) Body Ported Base Mounted VZ300 VP S070 M5 x 0.8 0.66 2 3 (A R) VQ L plug connector (L) VKF (Standard) VQZ 100 VAC 50/60 Hz With surge voltage suppressor (G) (L) (M) (D) With light/ surge voltage suppressor (L) (M) (D) VZ500 200 VAC 50/60 Hz 24 VDC VZ VS 2.5 2 3 (A R) (Option) N. C. N. O.

smcmaintenancepartslist

Qty. u Kit no. r (Nominal) 1 1 3 3 5 Element AMF800 AMF801 AMF900 AMF901 AMF1000 AL-61S AL-60S AL-63S AL-62S AL-31S 1 1 3 3 5 1 3 5 1 1 1 1 1 1 1 3 3 5 OD112XID90XT3 e KA00061 1A-G35 63271 63148 OD112XID90XT3 Drain N-3 OD112XID90XT3 251 252 Industrial Filters 1 Indication of replacement of elements, inspection items Actuators Modular F.R.L.

Table of Contents

(mm) 2 to 8 0.8 N 1.2 N 1.0 N 3.0 N 2.0 N 0 stroke Stroke end 5.0 N 10 to 32 40, 50 Weight (g) Refer to 2 to 8 for Thin flat, Thin flat with ribs and Elipse type.

PFxx-OMJ0005CN

1. 2. 3. 4

modular-press-e

25-MLA [ISE35-N-25-M (Switch body only)] ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] AD37 AD38 Square embedded type Note 3) GC3-10AS GC3P-010AS 0.02 to 0.2 MPa setting GC3-2AS GC3P-010AS NPN output/Wiring bottom entry ISE35-N-25-MLA ISE35-N-25-M t ISE35-R-25-MLA ISE35-R-25-M NPN output/Wiring

Modular F.R.L. Pressure Control Equipment

25-MLA [ISE35-N-25-M (Switch body only)] ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] AD37 AD38 Square embedded type Note 3) GC3-10AS GC3P-010AS 0.02 to 0.2 MPa setting GC3-2AS GC3P-010AS NPN output/Wiring bottom entry ISE35-N-25-MLA ISE35-N-25-M t ISE35-R-25-MLA ISE35-R-25-M NPN output/Wiring

Modular F.R.L. Units

25-MLA [ISE35-N-25-M (Switch body only)] 3 NPN output, Wiring bottom entry Digital pressure switch NPN output, Wiring top entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] 3 PNP output, Wiring bottom entry ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] 3 PNP output, Wiring top entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] 3 Float type auto drain 4 N.O.

5 Port Solenoid Valve Series SQ1000/2000

C4, C6 A, B port 43.5 58 P = 11.5 Dimensions Formulae L1 = 11.5n + 55.5 L2 = 11.5n + 73 n: Stations (max. 16 stations) L n 1 67 84.5 112.5 123 2 78.5 96 125 135.5 3 90 107.5 137.5 148 4 101.5 119 150 160.5 5 113 130.5 150 160.5 6 124.5 142 162.5 173 7 136 153.5 175 185.5 8 147.5 165 187.5 198 9 159 176.5 200 210.5 10 170.5 188 212.5 223 11 182 199.5 225 235.5 12 193.5 211 237.5 248 13 205

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

color LCD display LED display 3-color LCD display [Monitor unit 3-color LCD display] The monitor unit values are for the PFG300 and PFMV3. 6 7 C O N T E N T S 2-Color Display Digital Flow Switch PF2M7(-L) Series How to Order. p. 9 Specifications. p. 11 Set Point Range and Rated Flow Range. . p. 13 Flow/Analog Output. p. 13 Pressure Loss (Reference Data): Without Flow Adjustment Valve. p.