Table of Contents

Note 1) Current consumption (No load) Weight Note 2) Port size (Rc, NPT, G) Detection type Display PF2 1.7 to 17.0 l/min 1.7 to 17.0 l/min 2 to 16 l/min 0.1 l/min 0.1 l/pulse 3% F .S. or less 2% F .S. or less 0.35 to 4.5 l/min 0.35 to 4.5 l/min 0.5 to 4 l/min 0.05 l/min 0.05 l/pulse 3.5 to 45 l/min 3.5 to 45 l/min 5 to 40 l/min 0.5 l/min 0.5 l/pulse 7 to 110 l/min 7 to 110 l/min 10 to 100

KP/KPQ/KPG

) (M5) Applicable tubing O.D. mm Connection threads R Note 1) Weight g M L2 D2 L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 17 21 25 18.5 23.5 27.5

Series KP/KPQ/KPG

Male Branch "Y": KPU Effective area mm Note 1) D Model L TPH TPS A H (width across flats) P Connection threads R Weight g Applicable tubing O.D. mm 2-Applicable tubing P M D KPU04-01 KPU04-02 KPU06-01 KPU06-02 KPU08-01 KPU08-02 KPU10-02 KPU10-03 KPU12-03 KPU12-04 7 8 9 10 15 17 23 25 29 30 41.5 43.5 45.5 46.5 52.5 55.5 59 61.5 63.5 65.5 12 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 45.4 49.4

Series KP/KPQ/KPG

Male Branch "Y": KPU Effective area mm Note 1) D Model L TPH TPS A H (width across flats) P Connection threads R Weight g Applicable tubing O.D. mm 2-Applicable tubing P M D KPU04-01 KPU04-02 KPU06-01 KPU06-02 KPU08-01 KPU08-02 KPU10-02 KPU10-03 KPU12-03 KPU12-04 7 8 9 10 15 17 23 25 29 30 41.5 43.5 45.5 46.5 52.5 55.5 59 61.5 63.5 65.5 12 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 45.4 49.4

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

[107.8] Manual override (Non-locking) G: 300 H: 600 3-Rc(PT)1/4, 1/8 (P, A, B port) (Lead wire length) 41 54 60 [66.5] 57.1 47.6 25.5 20 11.5 12 10 22 22 63 18 2-Rc(PT)1/4 (R1, R2 port) [ ] for AC 01 02 01 02 L plug connector (L): SYJ7240-lLllM plug connector (M): SYJ7240lMll(Mounting holes) 2-4.3 (Mounting holes) 2-4.3 34 8.5 8.5 34 B B A A B 27 34 A A 27 34 B R2 R1 P R2 R1 P 108 [110.6

KR

Connection thread 17 15.2 1 4 KGU08-02 18.5 8 15.2 3 8 KGU08-03 2-applicable tubing 1 4 KGU10-02 40 28.4 30 40 65 61 62 65 19 18.5 3 8 KGU10-03 21 10 18.5 1 2 KGU10-04 22 1 4 KGU12-02 64.5 65.5 68.5 57.4 45.4 32 40 65 3 8 KGU12-03 20.9 22 20.9 12 22 1 2 KGU12-04 Note) D: Max. diameter Reference dimensions after R thread installation.

Table of Contents

Without auto switch L 16 60 5 L CVJ5 L 5 L J79W 16 60 CDVJ5 With auto switch Number of auto switches Rod extended/retracted when energized Built-in magnet 2 pcs. 1 pc. n pcs.

ZP

2 F G H J K L M N P Vacuum inlet direction q Pad dia.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

D1 M M A L1 D1 D2 L2 H Connection threads Male Branch: KPQU, KPGU (M5) Effective area mm D Model L TPH TPS A H (width across flats) (M5) 2-Applicable tubing Note1) Connection threads R Applicable tubing O.D. mm Weight g M P P M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPQU04-M5 KPQU04-01 KPQU04-02 KPQU06-M5 KPQU06-01 KPQU06-02 KPQU08-01 KPQU08-02 KPQU10-02 KPQU10-03 KPQU12-03 KPQU12-04

modular-press-e

-260S AR20P-260S AR30P-260S y AF10P-260S AF20P-260S AF30P-260S AF40P-260S Round type Note 2) Standard G27-10-R1 G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L G27-10-R1 Note 3) G27-10-R1 Note 3) 0.02 to 0.2 MPa setting Standard G27-10-R1 y IN OUT Round type Note 2) Pressure gauge u r t i (with color zone) 0.02 to 0.2 MPa setting Standard GC3-10AS [GC3P

Modular F.R.L. Pressure Control Equipment

-260S AR20P-260S AR30P-260S y AF10P-260S AF20P-260S AF30P-260S AF40P-260S Round type Note 2) Standard G27-10-R1 G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L G27-10-R1 Note 3) G27-10-R1 Note 3) 0.02 to 0.2 MPa setting Standard G27-10-R1 y IN OUT Round type Note 2) Pressure gauge u r t i (with color zone) 0.02 to 0.2 MPa setting Standard GC3-10AS [GC3P

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

(LL) 52-SY5140 (R) -LL-02 L 104 (Lead wire length) Insulation: Red (+) Insulation: Black () 0.3 mm2 4.1 34.5 37.2 Cable type (TT) 52-SY5140 (R) -TT-02 Max.10 L 120.8 (Lead wire length) Lead wire marking No.1 (+), No.2 () 0.75 mm2 5.9 14 ATEX Compliant Base Mounted Type Series 52-SY5000 Dimensions 2-position double L plug connector (L) 52-SY5240 (R) -L-02 19 18 9.5 2 x 4.3 (Mounting holes)

Clean Gas Filter

21.5 0.3 MPa 0.01 50 40 IN 0.1 MPa 19 1 22.5 13 0.7 MPa 65 0.001 0.5 MPa 0.0001 100 SFB302-02: TSJ 1/4 (Tube Swage Joint) 0.1 1 10 Flow rate L/min (ANR) 2 x 4.5 (Mounting hole) Bracket 2 x 1/4 TSJ 21.5 50 40 IN 19 1 13 22.5 69 SFB305-02, SFB315-02: URJ 1/4 (Union Ring Joint) 2 x 4.5 (Mounting hole) Bracket 2 x 1/4 URJ 21.5 50 40 IN 19 1 22.5 13 A Model A 79 84 SFB305-02 SFB315-02 308 Clean

Secondary Batteries

min 2 to 16 l/min 5 to 40 l/min 04 20 40 90 Material restriction Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l Thread type Nil N F Rc NPT G Lead wire M12 3 m lead wire with connector Without lead wire Nil N Port size 67 Output specification PNP open collector 2 outputs 4 16 40 Port size Applicable model Flow rate (l/min) Symbol 03 04 06 3/8 1/2 3/4 90-PF2W704, 90-PF2W720

42

: VQ430 -l 3-position exhaust center: VQ440 -l 3-position pressure center: VQ450 -l 3-position double check: VQ460 -l 0 1 0 1 0 1 0 1 0 1 179 106 90 73 50 2 11(12.5) 4(A) port 11(12.5) 2(B) port Indicator light Indicator light 165 179 106 90 2 59 73 50 2 4 48 38 24.6 11(12.5) 2(B) port 11(12.5) 4(A) port B A 14 12 1 5 3 4 2 45 30 38 24.6 A B Manual override 2 x 5.6 Mounting hole 48 B A 14

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

24 (58) VF (C10) (02) VFR VP7 38.5 31.5 24.5 3 VP4 23.4 Mounting holes 48 (58) 15 15 1.5 1.5 VQ P 3 5 1 2-PE port 2-Rc(PT)1/8 R port VQ4 22.2 Die cast hole For manifold gasket positioning Rc(PT)1/4 P port VQZ VQD 3 4 5 3 4 5 0 1 0 1 DIN connector (Y): VQZ3 2 (R)wYwC6, C8, C10, 02 L plug connector (L): VQZ3 2 (R)wLwC6, C8, C10, 02 VZS 155.5 <157.5> 300 (Lead wire length) 71 <72> VFS Indicator

Flow Control Equipment

Controller / 1 4 / 3 8 / 1 2 With One-touch Fittings/Universal / 1 8 20 to 32 20 to 40 40 to 63 63 to 100 AS23l 1FE-01 AS23l 1FE-02 AS33l 1FE-03 AS43l 1FE-04 / 1 4 / 3 8 / 1 2 Port size on piping side Standard/In-line (Metal Body) M3 M5 / 1 8 / 3 4 1 2 1 1 / 1 4 / 1 4 / 1 2 / 3 8 / 1 2 AS2000E-01 AS2000E-02 AS3000E-02 AS3000E-03 AS4000E-02 AS4000E-03 AS4000E-04 20 to 32 20 to 40 32 to 63

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

series 02 03 04 06 10 12 14 20 Caution L (2) Note 1) AS800 is available as special.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Type M5 Port size Elbow Universal 2 3 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 Universal type 01 02 03 04 Applicable tubing O.D.