Pilot: R (External Pilot), Port Size: 06 (3/4"), Thread: N (NPT), Safety Switch, Wiring: M (M12 Connector, OMRON), Check Valve, External Pilot Only: None

Pilot: External Pilot, Port Size: 3/4", Thread: G, Safety Switch, Wiring: M12 Connector, OMRON, Check Valve, External Pilot Only: None

Pilot: External Pilot, Port Size: 3/4", Thread: NPT, Safety Switch, Wiring: M12 Connector, OMRON, Check Valve, External Pilot Only: Applicable Tube O.D. ø5/16"

Pilot: External Pilot, Port Size: 3/4", Thread: NPT, Safety Switch, Wiring: M12 Connector, Rockwell Automation, Check Valve, External Pilot Only: Applicable Tube O.D. ø5/16"

Pilot: External Pilot, Port Size: 1", Thread: Rc, Safety Switch, Wiring: M12 Connector, OMRON, Check Valve, External Pilot Only: None

Pilot: External Pilot, Port Size: 3/4", Thread: Rc, Safety Switch, Wiring: M12 Connector, OMRON, Check Valve, External Pilot Only: None

Pilot: External Pilot, Port Size: 1", Thread: G, Safety Switch, Wiring: M12 Connector, OMRON, Check Valve, External Pilot Only: None

Pilot: External Pilot, Port Size: 1", Thread: Rc, Safety Switch, Wiring: M12 Connector, OMRON, Check Valve, External Pilot Only: Applicable Tube O.D. ø8

Pilot: External Pilot, Port Size: 1", Thread: Rc, Safety Switch, Wiring: M12 Connector, Rockwell Automation, Check Valve, External Pilot Only: Applicable Tube O.D. ø8

Pilot: External Pilot, Port Size: 3/4", Thread: NPT, Safety Switch, Wiring: M12 Connector, OMRON, Check Valve, External Pilot Only: None

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

Made to Order

CQ2 series Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A B + Stroke S2 L B + Stroke S1 L B + Stroke S2 L L B + Stroke S1 A + Stroke (S1 + S2) A + Stroke (S1 + S2) Note) In the case of bore sizes 12 to 25 with auto switch, port directions are different.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10, 15-S CDRBU2W20, 30-S CRB2 CRBU2 CRB1 2 x S2 2 x S1 2 x S1 MSU 2 x S2 CRJ Rotary actuator CRA1 CRQ2 2 x S1 2 x S1 2 x S1 2 x S1 Rotary actuator MSQ (34.5: Connector type) MSZ A port B port CRQ2X MSQX 2 x R A port B port 2 x R MRQ 1 Auto switch Auto switch 2 5 20.5 (26.5: Connector type) 1.

1

Series CQ2 Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B + Stroke S2 B + Stroke S1 B + Stroke S2 B + Stroke S1 A + Stroke (S1 + S2)

SV

S2 R1 R2 SG FG 24 V 0 V S1 S2 SG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V Ground either the reception side or the transmission side of the shielding wire shield.

Pilot: Internal Pilot, Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Port Size: 04 (1/2), Thread: Rc, Passage: B (Normally Open)

Pilot: Internal Pilot, Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Port Size: 04 (1/2), Thread: N (NPT), Passage: B (Normally Open)

Pilot: Internal Pilot, Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Port Size: 06 (3/4), Thread: Rc, Passage: B (Normally Open)

Pilot: Internal Pilot, Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Port Size: 06 (3/4), Thread: F (G), Passage: A (Normally Closed)