Vacuum Pad

Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y

Vacuum Pad

Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y

Hydraulic

+ l LW F NA LW S + Stroke B Air release H 2-Rc P GB NB J R GA MM D E e LH LT Width across flats G 4-CD MA A K Y l C 10 f SS X Y SS + Q + l + Stroke LX ZZ + Stroke Z + Stroke ZZ + Q + l + Stroke M X BB Long stroke (with tie-rod reinforcing ring) RT Bore size (mm) Stroke range (mm) RT RY 32 1401 to 1800 58 28 40 1401 to 1800 65 28 RY 50 1401 to 1800 75 33 63 1501 to 1800 90 43 80 100 Applicable

VFR

1, Metal joint q, w End plate (D) !2, Connection bracket q, w, Gasket e, r, O-ring y, u End plate (D) !2, Connection bracket q, w, Gasket e, t, O-ring y, u Non plug-in type Plug-in type VVF4000-3A-2 !

Booster Regulator/Air Tank

Model VBAT05A-SV-Q VBAT10A-SV-Q VBAT20A-RV-Q VBAT38A-RV-Q Accessory kit Safety valve Drain valve VBAT5A-Y-2 VBAT-S (Set pressure: 2 MPa) VBAT-V1 VBAT10A-Y-2 VBAT20A-Y-2 VBAT-R (Set pressure: 1 MPa) The Accessory Kit is a Set of Nos. q to t. VBAT20A-Y-2 VBAT10A-Y-2 Model Description No.

Air Fittings & Tubing

KQ2U23 to KQU12 KQ2U16 SKQ19, #1 to #6 SKQ21, #16 Different diameter union Y: KQ2U Effective area (mm2) Tube O.D. (mm) a b (1) (1) Weight (g) D1 D2 L1 L2 P Q M1 M2 Part No.

Table of Contents

0 IS1000 No. q w e r t y u i o !

Electric Actuator

w e r t y u i o !

Guide Cylinder Series MGG

M N HR Bracket (Refer to the table below.) 4 x O 2 x P (Rc, NPT, G) Q T B E S W U K L R I AA X AB AP AL A Y + Stroke J V Z + Stroke Non-lock type Lock type 8 x AF AC AD AE Rod end lock Q R Y + Stroke Head end lock Dimensions not marked with an are the same as standard.

Thermo-chiller/Rack Mount Type

Operation Display Panel The basic operation of this unit is controlled through the operation panel on the front of the product. q e o t r !0 !1 w !2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

CRBU

(mm) Y Lmax (mm) X Q X-1.5 X-1.5 X-1.5 X-2.5 (mm) Y Q Y-1.5 Y-1.5 Y-1.5 Y-2.5 Size 10 15 20 30 Size 10 15 20 30 Size 10 15 20 30 Lmax Lmax Y-1.5 Y-1.5 Y-1.5 Y-2.5 M3 M3, M4 M3, M4, M5 M3, M4, M5, M6 M3 M3, M4 M3, M4, M5 M3, M4, M5, M6 2 to 8 3 to 9 3 to 10 3 to 13 15.5 to 14 17.5 to 18 15.5 to 8 17.5 to59 19 to 20 11 to 22 19.5 to 10 11.5to 13 1.2-20 Series CRBU Mode to Order Specifications

Basic type / Direct mount type Series CY3B/CY3R

0 i q o u y !7 r !9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.

LVQ

LQ1 Construction LVN 90 Degree turn type t TL/TIL LQ3 q e A B r w t y Multi-turn type (with indicator) A B A B Description No.

Air Cylinder Series MB

5 u q y e t !2 w i A A' Cylinder tube sectional view A-A !

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-3A-1U t VZ1000-2A-1M SUP/EXH block assembly y Note) Block pin (2 pcs.) is attached for q, e, t, y.

1.1

This operation display panel is common to all models. t w e r y u i o q !0 !1 !2 !3 !4 !5 No. Description Function Displays the circulating fluid temperature. Displays the alarm code when an alarm is active. PV q Digital display PV/SV Displays the set temperature of the circulating fluid.

Proposals for Energy Saving

#1 q i o rt !

Fieldbus System

How to OrderValves (With two mounting screws) SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series y Pilot valve option !

&snac

R e m o v e a n Y b t o c k o n b e n d o n t n e p u r q i n s a l r P i P i n s ' b . P l p i n s f o r p u r g i n g a i r i s r e d u c e o r t o n q e r t h a n s P e c i f i e d l e n q t n ' r e f e r t o P . 2 , 7 f o r c o r r e c t i o n ' c .

Step Motor Controller

Y ellow Light green Light green Gray Gray White White Light brown Light brown Y ellow 31 Series LEC Controller Setting Kit/LEC-W1 Model Selection Step Motor (Servo/24 VDC) Specific Product Precautions How to Order LEC W1 q Controller setting software Controller setting kit (Japanese and English are available.) e USB cable (A-mini B type) w Communication cable Contents HRS q Controller setting