VFS

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

1

U S Z NS NZ Non-polar r Pilot type Positive common Nil R Internal pilot External pilot !

2/3 Port Valve

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

-r---r r-' !I -,zr n r y'~[ ~ ~I~@ ~ u Ll L4JE ItAII co ... ,,!

0.4

r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ1A01 VQ1B01 4(A) 2(B) 2(B) 4(A) 5

Base Mounted Metal Seal/Rubber Seal Series VQ

(Except L kit) Indicate R for the valve with external pilot.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

y OUT side IN side OUT side IN side Communication cable (With connector on both sides) t u t r EX260 Series EX600 Series Specifications Description Communication cable (With connector on one side) Field-wireable connector Part no.

0.4

Connector for unit (Plug) 5 t r t r EX600-AXA EX600-AYA EX600-AMB End Plate q t No.

42

/set) When supplying two different pressures to one manifold, this is used to shut off between stations with different pressures. 11.8 21.8 R P R R P R R P R SUP/EXH passage blocked EXH passage blocked SUP passage blocked Indication labels to confirm the blocking position are attached.

Process Valve Series VNA

VNA1A -6A, 8A, 10A VNA2 -10A, 15A No.

One-touch Fittings

Rc Round Type Spare Parts 4 Metric Size M, R, Rc Inch Size UNF, NPT Inch Size M, R, Rc Metric Size G Metric Size R, Rc Inch Size NPT Inch Size R Metric Size Uni Inch Size Uni Description Part no.

VFR

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball !2 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

5 Port Solenoid Valve Series VQZ1000/2000/3000

SY3000-44-3A P.941 P.941 Base Mounted Blanking plate assembly VVQZ1000-10A-5 (for VQZ1000) VVQZ2000-10A-5 (for VQZ2000) VVQZ3000-10A-5 (for VQZ3000) Restrictor spacer (Applicable to VQZ2000) VVQZ2000-20A-5 Individual SUP spacer VVQZ1000-P-5-M5 (for VQZ1000) VVQZ2000-P-5-01 (for VQZ2000) VVQZ3000-P-5-02 (for VQZ3000) Individual EXH spacer VVQZ1000-R-5-M5 (for VQZ1000) VVQZ2000-R-5-01 (for

0.

(A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) q w e r q w e r N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

Pilot Operated

50A 10A to 50A 10A to 25A 32A to 50A 10A 15A to 50A 10A to 50A 10A to 50A 10A to 50A 10A to 50A 1 1 Body Body CAC407 CAC407 Stainless steel Stainless steel Brass (C37) Brass (C37) 2 2 Bonnet Bonnet CAC407 CAC407 Nut O-ring O-ring Nut O-ring O-ring 3 4 5 3 4 5 Brass (C37) NBR NBR Stainless steel, NBR Stainless steel, NBR Brass (C37), Ni plated FKM, EPDM FKM, EPDM Brass (C37), Ni plated FKM

2/3 Port Valve

R P A Energized closed (N.O.) R P A Common (C.O.)

VCL

Grommet: G Conduit: C (Q) Approx. 300 Approx. 280 Approx. 300 D D F Q F Q Width across flats H Class H coil Broken line section C C R G1/2 R E E A H A B B 2 x P Port size 2 x P Port size 2 x M, thread depth N 2 x M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6 to 12 F S Q 27.5 34 F (Q) 25 R C U C (44) R E R G1/2 E G1/2 A H D (S) B B A H D 2 x P Port size 2 x P Port size

CC

Move the piston to the stroke end of the side that will be filled with oil, and perform steps q through r in the same sequence as described above. MK/MK2 Environment UAvoid use near fire. UDon't use in the clean room. RSQ/RSG Mounting RSH UInstall the converter vertically. UInstall the converter at a position that is higher than the cylinder.

Fitting Type: Connector, Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: Tube O.D. 1/4", Tubing Size 3/8"x1/4", Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: Male, Thread: R, Rc, Packaging: Standard Packaging Equivalent to Class M5.5

Fitting Type: Elbow, Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: Tube O.D. 3/8", Tubing Size 3/8"x1/4", Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: Male, Thread: R, Rc, Packaging: Standard Packaging Equivalent to Class M5.5