Prevents Micro-Bubbles

A (OUT) port A A LLH2A-03-02-C 1 set 1 set Manifold base part no. Non-locking Locking LVH20A-02-C 2 sets 2 sets Valve part no. (stations 1 & 2) LVH20AL-02-C 1 set 1 set Valve part no.

I

ZSE5-02-27L Two Output NPN Open Collector 30V, 80mA ZSE5-02-67L Two Output PNP Open Collector 80mA ISE5-02-26L None (Analog Output) 1~5V(5%F.S.)

3 Port Air Operated Valve Series SYJA300

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

HRX-OM-M090

Cooling capacity Product of 45oC Altitude [m] coefficient Product of 40oC (High temperature type [Optional]) Less than 1000m 40 45 1.00 Less than 1500m 38 42 0.85 Less than 2000m 36 38 0.80 Less than 2500m 34 35 0.75 Less than 3000m 32 32 0.70 Bevelled place. Location where the product is affected by strong vibrations or impacts.

E-P HYREG

sub-plate ITVH 02 14 03 38 04 12 4 ITVX A M5 M5 (3) (3) 1 01 18 (3) (3) 02 14 PVQ 3 02 14 03 38 04 12 VY1 VY1 VBA VBAT Body ported 5 04 12 VY1B0-X39 (5) 06 34 10 1 AP100 7 10 1 1 14 12 1 14 9 14 1 12 2 20 2 Note 3) Only bracket or foot may be mounted.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

C6, C8, C10, 02 C6: One-touch fitting for 6 C8: One-touch fitting for 8 75.5 300 (Lead wire length) C10: One-touch fitting for 10 60.5 2-4.5 mounting hole 02: Rc 1/4 41.8 22 23.4 mounting hole 28.5 20 A 4 13 18 SMC 38 2 Cover dia.1.6 Cross section 0.34 mm2 46.5 R3 28.6 7.1 Manual override (For C6, C8) M5 X 0.8 external pilot port 10.5 (Only external pilot style (R)) (For C10) (For 02) 38.5

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 510.5 EXH port silencer Silencer is installd in the EXH port. 63 38 22 Dimensions 13 Silencer P/N Model VQZ100 VQZ200 VQZ300 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 2.10-17 Series VQZ Body Ported Option Inch Size One-touch Fittings and Optional Thread

VCC

mountable number 3 port valve mountable number 00 02 04 00 02 04 No 2 port valves used 2 pcs.

CG1

) 26 (38) A HS A A A B 19.5 (27.5) 19.5 (27.5) 20.5 (28.5) 23 (32) 27.5 (39.5) 27.5 (39.5) A HS A HS B 15 (22.5) 15 (22.5) 15.5 (23.5) 18 (27) 22.5 (34.5) 22.5 (34.5) 31 (45) 31 (45) 30 24.5 27 27.5 29 24 27 25.5 27.5 20 30 27 27 27.5 29 24 29.5 25.5 30 25 31 30.5 28 28.5 30 25 33 26.5 33.5 32 35.5 35 32.5 33 34.5 29.5 37.5 31 38 40 43 40.5 40 40.5 42 37 43 38.5 43.5 50 43 47.5 40 40.5 42

NCQ8

Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Clevis (1) RCS-015 RCS-02 RCS-03 RCS-04 RCS-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 Clevis (1) RCD-015 RCD-02 RCD-03 RCD-04 RCD-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2"), 250 (2-1/2") 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2

SZ3000

PG: Flat cable (20 pins) PH: Flat cable (10 pins) Valve stations F: D-sub connector P: Flat cable connector (26 pins) Symbol 02 Note Note Symbol 02 Stations Stations 2 stations 2 stations Double wiring Note 1) ... ... ... ...

7.4

O-ring Port plug Body Ported Base Mounted Blanking plug (For One-touch fittings) KJP-02 A L Dimensions [mm] Applicable fitting size d Model A L D Weight [g] 2 KJP-02 8.2 17 3 0.1 3.2 KQ2P-23 16 31.5 5 1 4 KQ2P-04 16 32 6 1 23 KQ2P-04 D Silencer (For manifold EXH port) Body Ported Base Mounted Silencer is installed in the EXH port.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

38 37.5 35 60.5 63.5 62 59 64.5 65.5 29.5 (41.5) 28.5 (40.5) 27.5 (39.5) 24.5 (36.5) 23 (35) 26 (38) 50 43.5 43.5 43 40.5 71.5 74.5 73 70 75.5 76.5 29.5 (41.5) 28.5 (40.5) 27.5 (39.5) 24.5 (36.5) 23 (35) 26 (38) 63 50.5 50.5 50 47.5 73.5 76.5 75 72 77.5 78.5 32.5 (46.5) 31 (45) 34 (48) 80 59 92.5 94 91 32.5 (46.5) 31 (45) 34 (48) 100 69.5 97.5 99 96 ( ): Denotes the values of long strokes

VQC

or less Metal seal VQC2300 Closed center 2-position double (rubber) VQC2000 2.0 2.2 0.28 0.49 0.31 0.60 34 or less 44 or less Rubber seal VQC2301 (A) 4 (B) 2 2.0 2.6 0.15 0.46 0.15 0.60 29 or less 38 or less Metal seal VQC2400 Exhaust center 110 2.0 3.2 0.28 0.49 0.30 0.80 34 or less 44 or less Rubber seal VQC2401 1 (P) 5 (R1) 3 (R2) 2.4 2.0 0.17 0.57 0.18 0.46 29 or less 38 or less Metal

CL

S + Stroke ZZ + Stroke With rod boot l h + l ZZ + l + Stroke Bore size (mm) Stroke range A B1 BC BN BZ C D E GA GB GC GD GK GL GQ GR I J K KA MM NA AL 20 25 32 40 26 31 38 47 4 7 7 8 4 7 7 8 5.5 9 9 11 3.5 4 4 4 54 62 62 67 19 20 21 23 12 12 11 12 85 95 95 103 12 14 18 25 14 16.5 20 26 57.5 69 69 76 91 101 102 111 38 45 45 52 13 17 17 19 24 29 36 44 18 22 22 30 M8 x 1.25 M10 x 1.25 M10 x

HRX-OM-X037

Check operation time screen2 6.Software version screen 6.Software version and type screen 7.CH1 setting screen 38.Electric conductivity setting screen 7.CH1 setting screen Option D1 only 15.Temperature rise/drop 18.Pump operation mode 17.OFFSET (TEMP OFFSET) 16.TEMP READY function 19.

Vacuum

734 78.5 8.7 1 9 7.5 ZPR168 1 8 20 29137.9 54 75 80 9.9 40 43 34 47.l5 U : 76.1 25 102 92 24.4 48 50 53 38 51 t 80.1 106 96 32.4 1 9 lP[ $enies Without Buflen luirens , Pad Diameters @2 . s4 . Q6 ' oB Pad Diameters @10. a13. @16 Flat type Flat type Flat with rib Deep typezPRloD . l6D only Flat type Applicable Tube Male Thrcad/Weight List (sr) Flat type .

Vacuum

:ti Statlons 02-2 stations System type. AEjectors B External Vacuum 'For plug (X) posirioning onty.

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

Plug-in Unit

or less Closed center (A) 4 (B) 2 VQC2000 2.0 VQC2301 2.2 0.28 0.49 0.31 0.60 Rubber seal 34 or less 44 or less 2.0 VQC2400 2.6 0.15 0.46 0.15 0.60 Metal seal 29 or less 38 or less Exhaust center 110 1 (P) 5 (R1) 3 (R2) 2.0 VQC2401 3.2 0.28 0.49 0.30 0.80 Rubber seal 34 or less 44 or less 3 position closed center 2.4 VQC2500 2.0 0.17 0.57 0.18 0.46 Metal seal 29 or less 38 or less Pressure