Magnet: Built-in, Mounting: Basic Style, Bore Size: 10mm, Stroke: 60mm, Cylinder Rod Motion: Normally Retracted, Valve Specifications: 3G [110VAC (115VAC) Grommet], Light & Surge Suppressor: None, Auto Switch: Band Mounting, Number: -

Magnet: Built-in, Mounting: Basic Style, Bore Size: 16mm, Stroke: 30mm, Cylinder Rod Motion: Normally Extended, Valve Specifications: 3G [110VAC (115VAC) Grommet], Light & Surge Suppressor: Light & Surge Suppressor, Auto Switch: Rail Mounting, Number: -

Magnet: Built-in, Mounting: Basic Style, Bore Size: 16mm, Stroke: 45mm, Cylinder Rod Motion: Normally Extended, Valve Specifications: 3G [110VAC (115VAC) Grommet], Light & Surge Suppressor: Light & Surge Suppressor, Auto Switch: Rail Mounting, Number: -

This is a legacy product, and replaced byVFS1120-3G-01T, VALVE SOL/PILOT 110VAC *LQA, VALVE, VFS1000 SOL VALVE 4/5 PORT, CD, VFS1000 BODY PT 1/8NPT (F), 0.41336 lb

This is a legacy product, and replaced byVFS2110-3G, VALVE SOL/PILOT 110VAC *LQA, VALVE, VFS2000 SOL VALVE 4/5 PORT, 2D, VFS2000, 0.572 lb

This is a legacy product, and replaced byVFS2120-3G-01T-F

This is a legacy product, and replaced byVFS2210-3G

This is a legacy product, and replaced byVFS2310-3G-02T

SQ1000/2000

Although there is no problem for normal operations and environments, do not operate in an environment with vibration (3G or more) or strong magnetic field. 4. This valve is shipped with the armature inside the solenoid holding the B side ON position (Reset). However, energize to confirm whether it is holding the A side ON position or B side ON position before operation. 5.

lVFl 10

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

Table of Contents

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

Table of Contents

Body type Plug-in type VVFS2000-20A-1 Non plug-in type VVFS2000-20A-2 Part no. Body type Plug-in type VVFS2000-22A-1 Non plug-in type VVFS2000-22A-2 Part no.

2/3 Port Valve

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

Air Slide Table

For details, refer to page 126. 40 MXQA Series Dimensions: MXQ 20A [Standard] MXQ 20A-mZ Standard type *1 If long bolts are used, they may touch the guide block and cause a malfunction, etc. Use a screw which has an intermediate length between the maximum screw-in depth and minimum screw-in depth.

VFR

Body type Plug-in type Non plug-in type 1 8 Plug-in type Non plug-in type Body type VVFS2000-20A-1 VVFS2000-20A-2 Part no. Body type Plug-in type Non plug-in type VVFS2000-10A Part no.

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

VFS

Body type Plug-in type VVFS2000-20A-1 Non plug-in type VVFS2000-20A-2 Part no. Body type Plug-in type VVFS2000-22A-1 Non plug-in type VVFS2000-22A-2 Part no.

SY

Port size M5 x 0.8 Rc 1/8 Rc 1/4 SY3000 SY3000-39-20A SY5000 SY5000-39-1A SY7000 SY7000-39-1A SY3000 SY3000-38-20A SY5000 SY5000-38-1A SY7000 SY7000-38-1A Rc 1/4 SY9000 SY9000-39-1A Rc 1/4 SY9000 SY9000-38-1A Series Round head combination screw Gasket Note 1) The SUP port can be on the lead wire side or end plate side for SY3000/5000/7000.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Port size M5 x 0.8 SY3000 SY3000-38-20A(-Q) SY5000 SY5000-38-1A(-Q) SY7000 SY7000-38-1A(-Q) E5 5 SY3000 SY3000-39-20A(-Q) SY5000 SY5000-39-1A(-Q) SY7000 SY7000-39-1A(-Q) EXH port (Both sides) 1 8 1 4 SY9000 SY9000-39-1A(-Q) 1 4 1 8 1 4 SY9000 SY9000-38-1A(-Q) 1 4 P1 1 SUP port Note) In case of 20P and 23P, for protection of the wiring unit section from drainage, piping at the EA port should

HRS100/150

HECR Circulating fluid return port Rc3/4 HEC Barrel nipple 20A 144 HEB Y-strainer (40 mesh) 20A HED Flow direction HEA Y-strainer (20A) (Accessory) IDH Barrel nipple (20A) (Accessory) 107 HRS100/150 Series Standard Type Recommended External Piping Flow External piping circuit is recommended as shown below. 7 Thermo-chiller 2 Facility water outlet (Water-cooled refrigeration) Facility water