VQ7-6/7-8

Wiring specification L side R side L R O-ring NBR 4 AXT502-19 Side Bottom A B O-ring NBR 2 AXT502-20 Cylinder port size Plate SPCC 1 AXT502-22-2 Rc1/4 Rc3/8 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting 02 03 C6 Note 1) Gasket NBR 1 AXT502-31 Oval countersunk head screw SWRH3 2 M4 X 8 C8 Note 1) C10 Note 1) Note 1) Side ported only 31 Series VQ7-8 Manifold Exploded View D side

Ejector Valve Unit Series ZYY/ZYX 1

min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) ZY -10S Max. vacuum pressure: 84 kPa Y3 X3 ZY -10L Max. vacuum pressure: 53 kPa Y3 X3 Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics 100 100 100 100 Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR

High Precision Digital Pressure Switch, Series ZSE40/ISE40

Note 5) For ZSE40F (compound pressure) with "psi" indication, zero clear is in the range of 0.01 psi. 22 62 30 70 Set pressure range 100.0 to 100.0kPa 10.0 to 101.3kPa 0.1 to 1.000MPa Setting range 100.0 to 100.0kPa 101.3 to 101.3kPa 1.000 to 1.000MPa Internal circuits and wiring examples ZSE40 (F) ISE40--62 (L)-(M) ZSE40 (F) ISE40--22 (L)-(M) DC (+) (Brown) DC (+) (Brown) Analog output

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Note 5) For ZSE40F (compound pressure) with "psi" indication, zero clear is in the range of 0.01 psi. 100.0 to 100.0kPa 100.0 to 100.0kPa 101.3 to 101.3kPa 10.0 to 101.3kPa 0.1 to 1.000MPa 1.000 to 1.000MPa Internal circuits and wiring examples ZSE40 (F) ISE40-m-22 (L)-(M) ZSE40 (F) ISE40-m-62 (L)-(M) DC (+) (Brown) DC (+) (Brown) Analog output (Gray) Analog output (Gray) OUT1 (Black) OUT2

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Slim line coupler not shown 5/8 27/32 1 1 C6 C2-SL C2 C4 C8 C6 C3 C1 C5 C2 1/2 C7 C3 1/2 Reducing Couplings not shown Note not shown not shown 1 1/8 7/16 Dia. 3/8 Dia. Typ. 3/8 Dia. 5/16 Dia. Typ. 1/4 Dia.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(

Series: VQ21, Body Style: Single Unit, Coil Voltage: 24VDC, Lead Wire: DIN Terminal, Voltage Protection: DC: Light & Surge Suppressor; AC: w/Full Wave Rectifier, Manual Override: Locking Slotted Style, Port Size: ø6 One-touch Fitting, Option: LF [L Type (VQ21 Only) + Bracket]

Series: VQ21, Body Style: Single Unit, Coil Voltage: 100VAC 50/60HZ, Lead Wire: Grommet, Voltage Protection: None (Or w/Surge Suppressor in Case of AC Volts), Manual Override: None, Port Size: ø6 One-touch Fitting, Option: Bracket

Series: VQ21, Body Style: Single Unit, Coil Voltage: 100VAC 50/60HZ, Lead Wire: Grommet, Voltage Protection: DC: Light & Surge Suppressor; AC: w/Full Wave Rectifier, Manual Override: None, Port Size: ø6 One-touch Fitting, Option: Bracket

Series: VQ21, Body Style: Single Unit, Coil Voltage: 110VAC 50/60HZ, Lead Wire: Grommet, Voltage Protection: None (Or w/Surge Suppressor in Case of AC Volts), Manual Override: None, Port Size: ø6 One-touch Fitting, Option: Bracket

Series: VQ21, Body Style: Single Unit, Coil Voltage: 110VAC 50/60HZ, Lead Wire: DIN Terminal, Voltage Protection: None (Or w/Surge Suppressor in Case of AC Volts), Manual Override: None, Port Size: ø6 One-touch Fitting, Option: Bracket

Series: VQ21, Body Style: Single Unit, Coil Voltage: 110VAC 50/60HZ, Lead Wire: DIN Terminal, Voltage Protection: None (Or w/Surge Suppressor in Case of AC Volts), Manual Override: None, Port Size: ø6 One-touch Fitting, Option: LF [L Type (VQ21 Only) + Bracket]

Series: VQ21, Body Style: Single Unit, Coil Voltage: 12VDC, Lead Wire: DIN Terminal, Voltage Protection: DC: Light & Surge Suppressor; AC: w/Full Wave Rectifier, Manual Override: None, Port Size: ø6 One-touch Fitting, Option: Bracket

Series: VQ21, Body Style: Single Unit, Coil Voltage: 12VDC, Lead Wire: DIN Terminal, Voltage Protection: DC: Light & Surge Suppressor; AC: w/Full Wave Rectifier, Manual Override: Locking Slotted Style, Port Size: ø6 One-touch Fitting, Option: Bracket

Series: VQ21, Body Style: Single Unit, Coil Voltage: 24VDC, Lead Wire: DIN Terminal, Voltage Protection: None (Or w/Surge Suppressor in Case of AC Volts), Manual Override: None, Port Size: ø6 One-touch Fitting, Option: LF [L Type (VQ21 Only) + Bracket]

Series: VQ21, Body Style: Single Unit, Coil Voltage: 110VAC 50/60HZ, Lead Wire: DIN Terminal, Voltage Protection: DC: Light & Surge Suppressor; AC: w/Full Wave Rectifier, Manual Override: Locking Slotted Style, Port Size: ø6 One-touch Fitting, Option: Bracket

Series: VQ21, Body Style: Single Unit, Coil Voltage: 12VDC, Lead Wire: Grommet, Voltage Protection: H [w/o Energy Saving, Light/Surge Voltage Suppressor (DC Voltage)], Manual Override: None, Port Size: ø6 One-touch Fitting, Option: Bracket

Series: VQ21, Body Style: Single Unit, Coil Voltage: 12VDC, Lead Wire: Grommet, Voltage Protection: DC: Light & Surge Suppressor; AC: w/Full Wave Rectifier, Manual Override: None, Port Size: ø6 One-touch Fitting, Option: Bracket

Series: VQ21, Body Style: Single Unit, Coil Voltage: 200VAC 50/60HZ, Lead Wire: DIN Terminal, Voltage Protection: None (Or w/Surge Suppressor in Case of AC Volts), Manual Override: None, Port Size: ø6 One-touch Fitting, Option: Bracket

Series: VQ21, Body Style: Single Unit, Coil Voltage: 100VAC 50/60HZ, Lead Wire: DIN Terminal, Voltage Protection: DC: Light & Surge Suppressor; AC: w/Full Wave Rectifier, Manual Override: Locking Slotted Style, Port Size: ø6 One-touch Fitting, Option: Bracket