High Power Cylinder Series RHC

GA M Effective thread K WH ND H1 MM I C B D E LY 4-LD LH0.2 LT JC Y X JC Y X S + Stroke NF LX LZ LS + Stroke ZZ + Stroke (mm) Bore size (mm) Stroke range (mm) 50 H1 I 11 JC 58 K 75 LD 7 H 11 GA 80 FA 16 EA 23 D 62 C 20 B 53 A 70 E 0 Effective thread length 32 250 to 1000 35 50 0.042 0 250 to 1000 11 72 75 7 11 80 16 23 58 20 60 80 35 32 63 55 0.074 0 250 to 1000 13 89 78 10 13 90 20 23 61

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

[62.3] 79.7 61 [62.3] Pg.7 79.7 Max.10 46 57.1 49.5 67.8 75.3 Applicable cord O.D. [52.5] [63.6] 3.5 to 7 14 Series SY3000/5000/7000 DIN Rail Manifold Exploded View SY3000 Type 60 D side R P R P a DIN rail holding screw U side Replacement parts Part No.

ZQ-OM01401

SY100-30-A A X T6 61 -12 A *x2 23 - No.ZQ-OM01401-B 2 () ZQ-ZSEA M G K-2-A (1) (2) (3)(4) (5) (1) [kPa] EA NPN2 EB PNP2 0 to -100 EC NPN1 + EE PNP1 + FA NPN2 FB PNP2 FC NPN1 + -100 to 100 FE PNP1 + 1) NPN1 + VA 1) PNP1 + VB 1 2) 2) M SI (kPa) 2) 3) (:psi) P 2) (99 10 ) 3) (1) VAVB (3) G 2m) W (2m) 4) (4) (5) (V ) 0 (M5x0.8) 5) K 1 3.2 () 4) 5) (1) VAVB 2 4 () 3 6 (

PSxx-OMV0003CN

IO-Link 1 IO-Link IO-Link IO-Link DC1830 V COM IO-Link IO-Link IO-Link IO-Link ( ) 2 COM IO-Link IO-Link 1 Operate IO-Link 3 COM (61 ) 4 1IO-Link V1.0 -80No.PS-OMV0003CN-G 7F.S. 1 1F.S.

17

A 65 82 98 B2 53 64 76 B3 78 88 108 C1 14 20 22 C2 39 44 54 F 96 111 131 E1 1 1 1 E2 1 1 1 MY-J25 MY-J32 MY-J40 MYAJ25 MYAJ32 MYAJ40 63 73 93.5 61 72 88 30.5 36 44 40 46 55 73 84 104 14 14 19 6 6 8 Note) Floating brackets consist of a set of right and left bracket.

Prevents Micro-Bubbles

T) W Model LVC20 LVC30 LVC40 LVC50 LVC60 (mm) Dimensions 64 S T Model LVC3 LVC4 LVC5 90 24 49.5 110.5 29 54.5 147 34.5 60.5 156 Suck back (Single type) Suck back (Unit type) 50 3.5 4.5 37 30 44 37 30 44 4-3.5 20 (Max. 11.5) 51 51 (Max. 11.5) M5 x 0.8 M5 x 0.8 M5 x 0.8 45 12.5 45 30 SMC SMC SMC A B A B 12.5 61 4 4 30 (110) (78) 17-5-12 10 Series LVC Manifolds Manifold Specifications LLC5A

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Refer to page 17-6-3 for Safety Instructions and 17-5-59 to 17-5-61 for High Purity Chemical Valve Precautions.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

49 98 65 14 23 55 55 55 103.5 10.5 19 58 58 58 103 17.5 40 25 36 25 46 63 50 101 68 14 23 61 61 61 111 The figures in parentheses are the normally open type. 22 23 Series VX21/22/23 For Water, Oil, Steam/Manifold Dimensions: Manifold/Base Material: Brass, Stainless Steel Normally closed (N.C.): VVX21/VVX22/VVX23 Normally open (N.O.)

V

17.5 16.6 15.2 9.5 ZFB200-08 8 ZFB300-08 8 57 30 69.5 27 14.5 29.5 21 17 65 21.5 18 18.5 11 ZFB300-10 10 (N)ZFB101-05 53 24 17.5 316" 48 26 22.5 12.5 15 50 15.5 14.4 12.8 8.5 (N)ZFB101-07 54 24.2 17.7 14" APPLICATION T O E J E C T O R S Y S T E M Inch size (N)ZFB201-07 52 28 65 24.5 13.5 27.2 19.7 16 61 17.5 16.6 15.2 14" 9.5 (N)ZFB301-11 57 30 70 27 14.5 30.2 21.7 17 65 21.5 8 18.5 38"

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Cover dia 1.5 Cross section 0.23mm2 Indicator light 3.5 to 7 : AC 61 53.5 35.5 M plug connector (M): VQZ3l2(R)-lMl-C6, C8, C10, 02 300 (Lead wire) 94.5 Cover dia 1.5 Cross section 0.23mm2 Indicator light 82.5 83.5 37 42 : AC 2.10-10 3 Port Solenoid Valve VQZ100/200/300 Manifold Body Ported Plug Lead Unit Connector kit How to Order Manifold VQZ100 SY SYJ C D VV3QZ 1 2 08 VK VZ DIN rail mount

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

pilot style(R)) (47.5) 46.5 40.5 A, B port R1 R2 20 14.6 12 10 10 P 7.2 M5 X 0.8 (Not applicable to standard model.) 5-Rc(PT)1/8 (P, A, B, R1, R2 port) 2-PE port 1.1 13.4 13.4 0 1 0 1 L plug connector (L): VQZ125 (R)lLl01 M plug connector (M): VQZ125 (R)lMl01 Indicator light Cover diameter 1.5 Cross section 0.23mm2 (Lead wire length) 300 300 120.5<122.5> 108<110> (Lead wire length) 60<61

ZR

ZR1D1 D2 D3 10.2 SMC PRESURRE SWITCH RESET SET Attachment D Digital pressure switch Suction filter 71.3 (73.3 for D2, D3 types) 81 SMC 61 PV PD Filter block D 78.8 3 Note) 1 Dimensions for mounting bracket A 2 Dimensions for mounting spacer A Bracket A part no. : P3270153 (Standard accessory) Spacer A part no. : P3270156 13-3-19 19 Series ZR Suction Filter: ZR1-FX Specifications ZR1-FX

CLA

lH 61 I Type Single Knuckle Joint Y Type Double Knuckle Joint r\'Id 1'-< t~ m L ~ ~1 -r0 ~ '-' P. _(mm) e ,.

76

In the energy saving operation mode, changing the set dew point can save more energy. 5% reduced 5% reduced Conditions Ambient temperature: 90F (32C) r 40% reduced 40% reduced Inlet air temperature: 104F (40C) Double energy saving function series Power consumption Inlet air pressure: 102 psi (0.7 MPa) t y u 61% reduced 61% reduced Power supply frequency: 60 Hz Power supply voltage: 200 V

reduces flow setting time

12 18.5 29.7 40 34.5 17 50 (51) AS321FS-03-06 (S) 6 1/4 19 16.6 10.4 21.8 32.1 28.7 55.4 54 50.2 48.8 13.3 24.5 28.5 9.3 19.2 38 (39) AS321FS-03-08 (S) 8 13.2 22.7 33 14.2 AS321FS-03-10 (S) 10 15.9 26.7 37 28 15.6 29 (40) AS321FS-03-12 (S) 12 18.5 29.7 40 26.8 17 41 (42) AS421FS-04-10 (S) 10 1/2 24 (23.8) 3/8 19 16.6 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 62 (61

Related Products

Large effective area Low power consumption 1/4 67 111 31 55 40 64 (Max. 73) AVL2000-*02 Manual/Manual solenoid lock out Modular design 1/4 67 20.5 111 31 55 34 40 64 (Max. 73) AVL2000-*02-*DZM 3/8 76 118 36 57 48 64 (Max. 73) AVL3000-*03 How to Order 3/8 76 12.5 118 36 57 34 48 64 (Max. 73) AVL3000-*03-*DZM 1/2 98 133 47 61 52 64 (Max. 73) AVL4000-*04 G 20 00 F DZM R 5 02 AVL 1/2 98

Air-hydro Unit

121.8 156.5 98 35 18 35 109 65 86 45 88 65 1/2 259 3/4 92 139 116 123 61 133.8 185.5 134 40 24 50 140 65 116 66 112 85 3/4 319.5 3/4 144 202.5 180 183 60 133.8 181.5 134 40 24 50 136 93 116 66 108 81 L Dimension (mm) T Model NB Effective oil level stroke W QL S QB NL P 50 100 200 300 400 600 700 800 500 CC63-S1-G CC100-S1-G CC100-L1-G CC160-L1-G CC63-S1-G CC100-1-G CC160-L1-G 11 9.5 30 0

Brake mechanism added

Applicable bore size Dd9 L1 L2 m d Drill through Included split pin Included flat washer Clevis Knuckle 2 x d Dd9 CDP-2A 40 10 0.040 0.076 46 38 4 3 3 x 18 L Polished round 10 L1 L2 m L1 L2 m CDP-3A 50 40, 50, 63 12 0.050 0.093 55.5 47.5 4 3 3 x 18 L Polished round 12 2 x d Dd9 CDP-4A 63 16 0.050 0.093 71 61 5 4 4 x 25 L Polished round 16 L1 L2 m CDP-5A 80 18 0.050 0.093 76.5 66.5 5 4

7

129 + Stroke 110 85 259 + Stroke Hole: 18 +0.027 0 2 x M6 Thread depth 6 Shaft: 18 0.050 0.093 Press-fit spring pin 5 x 40 L 38 17 32 37 48 24 28 +0.5 +0.1 85 61 25 70 90 Double knuckle joint CKPA100 Built-in strong magnet type/with magnetic field resistant auto switch (D-P79WSE) 56 63 56 + Stroke 34 Speed controller needle Top width across flats 4 Cushion valve Top width across flats 4

CNA

Dd9 3 x 18l 0.040 0.076 10 40 50 63 80 100 CDP-2A CDP-3A CDP-4A CDP-5A CDP-6A CDP-7A 40, 50, 63 80 100 Polished round 10 3 4 46 38 3 x 18l 0.050 0.093 12 Polished round 12 3 4 55.5 47.5 4 x 25l 0.050 0.093 16 Polished round 16 4 5 71 61 4 x 25l 0.050 0.093 18 Polished round 18 4 5 76.5 66.5 m l 4 x 25l 0.065 0.117 20 Polished round 20 4 5 83 73 L 4 x 36l 0.065 0.117 25 Polished round