3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

02 03 Indicator light 300 89.5 (Lead wire length) Cross section 0.23 mm2 Cover diameter 1.5 Pg.7 55 <60> 92.5 Max. 10 Applicable cable O.D. 3.5 to 7 Indicator light < >: AC 78.5 86 M plug connector (M): VQZ35(R)-M02 03 (Lead wire length) Cross section 0.23 mm2 Cover diameter 1.5 62 <67> 300 95 Indicator light 83.5 < >: AC 4-14-32 33 3 Port Solenoid Valve Metal/Rubber Seal, Base Mounted,

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

) 56.5 54.5 26.5 A port 20.5 17.5 11.5 11.5 9 PE port M5 X 0.8 External pilot port (Only external piot style (R)) 19 14 (Rc(PT)1/4) (Rc(PT)1/4) 3-Rc(PT)1/4,3/8 P/A/R port 21 13 (Rc(PT)3/8) (Rc(PT)3/8) DIN terminal (Y): VQZ3l5(R)-lYl02 03 02 03 L plug connecter (L): VQZ3l5(R)-lLlIndicator light 88.5(89.5) 300 (Lead wire) Cover dia 1.5 Cross section 0.23mm2 Pg.7 56.5(60) 92.5 MAX.10 Applicable

CL

CXS Rear flange With rod boot Without rod boot CXT Bore (mm) ZZ 182 198 201 227 ZZ 202 220 223 247 MX 20 25 32 40 MXU Front trunnion/CLG1UN Front trunnion MXS With rod boot Without rod boot Bore (mm) BZ TDe8 TE TF TH TR TS TV TW TX TY TZ Z 46 51 51 62 TT MXQ Z 66 73 73 82 20 25 32 40 0.025 0.047 69.5 31 40 47 47 54 3.2 3.2 4.5 4.5 47.8 42 42 48 56 59.6 8 10 10 10 10 51 26 28 28 36 5.5 5.5

Air Cylinder

to 100 st 101 to 125 st 126 to 200 st 20 46 131 156 181 25 51 136 161 186 211 32 51 138 163 188 213 40 62 155 180 205 230 Bore size 1 to 50 st 51 to 100 st 101 to 125 st 126 to 200 st Z ZZ Z ZZ Z ZZ Z ZZ 20 118 139 143 164 168 189 25 123 144 148 169 173 194 198 219 32 126 150 151 175 176 200 201 225 40 143 171 168 196 193 221 218 246 Constructed of pins, flat washers and hexagon socket

VZS

DXT170-176-2-01 DXT170-176-2-02 100 VAC 200 VAC 100V 200V DXT170-176-2-03 220V 110V 110 VAC DXT170-176-2-04 220 VAC DXT170-176-2-07 DXT170-176-3-51 DXT170-176-3-06 DXT170-176-3-05 DXT170-176-3-53 240 VAC 240V 6VD 12VD 24VD 48VD 6 VDC 12 VDC 24 VDC 48 VDC Circuit with Indicator Light AC Circuit diagram DC Circuit diagram D: Protective diode LED: Emitting diode R: Resister NL: Neon bulb R:

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

SO-04 SO-05 NT-02 NT-03 NT-04 AC-NI-50 8 8 9 11 30 36.9 43.9 47.3 26 32 38 41 5 6 8 10 12.5 16.5 21.0 23 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 20 25 32 40 15.0 19.6 25.4 27.7 20 25 32 40 M22 x 1.5 M24 x 1.5 M30 x 1.5 M33 x 2.0 26 32 38 41 13 17 22 24 10 Series CHN Accessory Brackets (Optional) I-shaped single knuckle joint Bracket for clevis type Material: Cast iron 20: I-02 25: I-03

V

Rc3/8 04 Rc1/2 T03 3/8NPTF T04 1/2NPTF 10 10mm Tube 12 12mm Tube 02 Rc1/4 03 Rc3/8 T02 1/4NPTF T03 3/8NPTF Courtesy of Steven Engineering, Inc. !

Electric Actuator/Slider Type

JZSP-CVH03-03-E manufactured by YASKAWA CONTROLS CO., LTD. Cable for connecting PC and driver when using the setup software (SigmaWin+TM). Do not use any cable other than this cable. Cable for connecting the driver and device when using the safety function.

70astamb1

(Drill through) Note) Dd9 L l d m H B C CJ1 D Cotter pin 3 x 18l 4 x 25l 4 x 35l 0.040 0.076 0.050 0.093 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 CD-M03 CD-M05 CD-M08 10 14 22 32 40 50, 63 80 100 32, 40 50, 63 80, 100 3 4 4 44 60 82 36 51 72 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 4 4.5 5 6 8 11 13 16 17 22 27 32 41 19.6 25.4 31.2 37.0 47.3 16.5 21 26 31 39 CJP CJ2 Note) When

mb1

(Drill through) Note) Dd9 L l d m H B C CJ1 D Cotter pin 3 x 18l 4 x 25l 4 x 35l 0.040 0.076 0.050 0.093 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 CD-M03 CD-M05 CD-M08 10 14 22 32 40 50, 63 80 100 32, 40 50, 63 80, 100 3 4 4 44 60 82 36 51 72 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 4 4.5 5 6 8 11 13 16 17 22 27 32 41 19.6 25.4 31.2 37.0 47.3 16.5 21 26 31 39 CJP CJ2 Note) When

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Part No. d Cotter pin l d H B Dd9 L C D m (Cut through) Note 1) 3 x 18l 4 x 25l 4 x 35l 0.040 0.076 0.050 0.093 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 CD-M03 CD-M05 CD-M08 10 14 22 32, 40 50, 63 80, 100 32 40 50, 63 80 100 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 6 8 11 13 16 17 22 27 32 41 19.6 25.4 31.2 37.0 47.3 16.5 21 26 31 39 36 51 72 4 4.5 5 44 60 82 3 4

NCA1

Description Material 1 Rod Cover Aluminum alloy NCA200-02AQ3609-S NCA200-03-Q3609-S NCA250-02AQ3610-S NCA250-03-Q3610-S NCA325-02AQ3611-S NCA325-03-Q6311-S 2 Head Cover Aluminum alloy 3 Cylinder Tube Aluminum alloy Please See below for How to order Cylinder Tube 4 Piston Rod Carbon steel Available only as an Assembled Item.

5 Port Solenoid Valve, Series VQC

C8 C10 C12 02 03 B CM With 8 One-touch fitting With 10 One-touch fitting With 12 One-touch fitting Rc 1/4 Rc 3/8 Bottom ported Rc 1/4 Mixed Note 1) Numbers inside ( ) indicate the maximum number of solenoids for mixed single and double wiring. The maximum number of stations is determined by the total number of solenoids. In the case of mixed wiring, use the option symbol "-K."

CL

CNA Head Side Flange Style CNS Without rod boot With rod boot Bore size (mm) ZZ 182 198 201 227 ZZ 202 220 223 247 CLS 20 25 32 40 CLQ MLGP Rod Side Trunnion Style Rod side trunnion style: CLG1UN RLQ Without rod boot With rod boot Bore size (mm) BZ TDe8 TE TF TH TR TS TV TW TX TY TZ Z Z TT MLU 8 0.025 0.047 10 0.025 0.047 12 0.032 0.059 14 0.032 0.059 66 73 73 82 46 51 51 62 10 10 10 10 5.5

Fieldbus System

Refer to page 51 for mounting method.

Cylinder

Tel :03-3502-2740 Fax:03-5251-7240 August 1996, 14(RP)

High Vacuum Angle Valve

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2018 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printing WY 9520KS Printed in Japan. D-G

Compact Guide Cylinder

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2016 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing UR printing UR 11030SZ Printed in Japan. D-G

Magnetically Coupled Rodless Cylinder

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2002 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

S Couplers Series KK/KK13

/I.D. mm 8/5 9/6 10/6.5 12/8 12.5/8.5 16/11 Symbol 01 02 03 04 06 Symbol 50 60 65 80 85 110 Symbol 04 06 08 10 12 16 Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Tubing O.D. mm 4 6 8 10 12 16 Construction Description Material Plug Description Material Socket Note Note Electroless nickel plated No. 1 14 15 No. 1 2 3 4 5 6 7