HRX-OM-T004

5-5 5.4 Communication sequence. 5-11 5.5 Message configuration . 5-12 5.5.1 Message format . 5-12 5.5.2 Message example . 5-14 5.6 BCC . 5-15 5.7 Command . 5-15 5.8 Command explanation . 5-16 5.8.1 Command:PV1 Circulating fluid discharge temperature . 5-16 5.8.2 Command:SV1 Circulating fluid set temperature (R) . 5-17 5.8.3 Command:SV1 Circulating fluid set temperature (W) . 5-18 5.8.4 Command

HRX-OM-R028

sequence .5-11 5.5 Message configuration.5-12 5.5.1 Message format .5-12 5.5.2 Message example.5-14 5.6 BCC .5-15 5.7 Command .5-15 5.8 Command explanation .5-16 5.8.1 Command:PV1 Circulating fluid discharge temperature.5-16 5.8.2 Command:SV1 Circulating fluid set temperature (R).5-17 5.8.3 Command:SV1 Circulating fluid set temperature (W).5-18 5.8.4 Command:LOC Key-lock setting (R) .5-19

Digital Flow Switches

View A 1 2 3 4 5 6 7 8 Analog output 1 to 5VDC 8 7 6 5 4 to 20mADC 5 20 Analog output [mA] Analog output [V] 1 4 Max. measured flow rate value Real-time flow rate [l/min] Min. measured flow rate value Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Standard condition Standard condition Basic condition Basic condition Minimum measured Maximum measured

C95

switch Grommet Diagnostic indication (2-color) Z76 Z73 Z80 F59 F5P J51 J59 F59W F5PW J59W F5BAL IC IC 3-wire 5 V Yes AC 100 100 V or less 12 V 5 V, 12 V Relay, PLC No PLC 24 V 2-wire Terminal conduit 12 V Yes 100 V, 200 V Relay, PLC DIN terminal 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC 24 V 100 V, 200 V 2-wire 12 V 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC Diagnostic indication (2

F

Japanese N ...North American No Of Needle Revolutions 10 Turns / 8 Turns (AS1001F) Applicable Tube Material Nylon, Soft Nylon, Polyurethane A P P L I C A B L E T U B E OD B O D Y S I Z E mm 23 32 04 4 06 6 08 8 10 10 12 12 Inch 01 1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 100 ...M5 (04, 06) 200 ...1/8 (04, 06) 205 ...1/4 (06, 08) 300 ...3/8 (06, 08, 10, 12) 400 ...1/2 (10, 12) W I

VSA4

position exhaust center Option 0 Sub-plate side ported 1 Sub-plate bottom ported Port size Nil None 00 Without sub-plate 4 Without sub-plate (For manifold) PA Non-locking manual override 04 06 Rc 1 2 Rc Option 3 4 Caution Refer to pages 5-11-2 to 5-11-6 for Safety Instruction and Solenoid Valve Precautions. 5-3-35 6 Construction 2 position single: VSA4140 2 position double: VSA4240 3 position

Table of Contents - Tubing

Inch Sizes Metric Sizes * 1/4 3/8 1/2 5/8 4mm (5/32) 6mm 8mm (5/16) 10mm 12mm 0.7 11 13 15 04 06 08 10 12 Colors Color Red White Yellow Color Black Blue Green Natural Symbol B BU G N Symbol R W Y * * Coming soon Note: 4mm tubing is suitable for use with 5/32 SMC One-Touch fittings as are 8mm tubing and 5/16 fittings PEAPP08 8 (5/16) 5 38 PEAPP12 12 9 63.5 PEAPP66 6 4 31.8 PEAPP10 10 5 51

XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

ZX

Electrical entry Nil L Grommet (0.6 m) (5) Digital vacuum switch unit Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector L L plug connector Voltage 21 C 0X ZSE3 D 1 3 100 VAC 50/60 Hz 110 VAC 50/60 Hz 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC Applicable to plug connector. (Connector assembly with rectifier is attached.)

ISO Standard Hydraulic Cylinder

Note 3) For mounting types FY, FZ, or TA, indicate port position with the symbol B. 5 V, 12 V Water resistant (2-color indicator) M9PA 3-wire (PNP) 2-wire M9BA 12 V F59F 4-wire (NPN) 5 V, 12 V IC circuit Diagnostic output (2-color indicator) Z76 Z73 Z80 A54 5 V 3-wire (NPN equiv.)

Applicable Auto Switch Model

D-Y7NW(V)/Y7PW(V)/Y7BW(V) D-Y7BAL BU-1 BU-1 BU-1 BU-1 A B A B Reed switch D-A90(V)/A93(V)/A96(V) Solid state switch D-F9N(V)/F9P(V)/F9B(V)/F9NW(V)/ F9PW(V)/F9BW(V)/F9BAL How to mount and move the auto switch How to mount and move the auto switch Note) Use a watchmaker driver whose grip dia. is 5 to 6mm when tightening the auto switch mounting screw.

OMU0023

Acquires the information repeatedly until the received 6 Repeat steps 5-6 information shows that the INP is "1". 7 01 10 9103 0002 04 0 1388 01 10 9103 0002 Direct Operation Step Data No. 20 parameters are configured for: Target position 5 mm, Positioning time 0.1 s. 8 01 06 9105 000A 01 06 9105 000A Instruction to hold current position sent. 9 01 10 9100 0001 02 0 01 10 9100 0 (Preparation

Mechanical Valves Series NVM, NVFM, NVZNI

06 E Panel lMounting Panel N4ountrng F.tJ T 1 2 3 5 l b s ( 5 6 k 9 ) P T 0 138 in (3 smm) O T 0 079 in (2mm) T T 0 216 in (5 smm) F O F 12 35 lbs (5.6 ks ) P T 0,138 in (3 5mm) O T 0 079 in (2mm) T T 0 216 in (5 Smm) '75 PSIG (5 Kg{/cm2) "75 PSIG (5 Kgt/cm2) A B c D E F G 4.25 (1 08) 2.20 (56) 1 . 3 2 :33.5 0.91 (231 0.24 (6) 0.81 'DN E 0.39 {10) A B c D E F G 4.O7 10s.5 2.03 t51 .5) 1.32

IIIIIII

06 E Panel lMounting Panel N4ountrng F.tJ T 1 2 3 5 l b s ( 5 6 k 9 ) P T 0 138 in (3 smm) O T 0 079 in (2mm) T T 0 216 in (5 smm) F O F 12 35 lbs (5.6 ks ) P T 0,138 in (3 5mm) O T 0 079 in (2mm) T T 0 216 in (5 Smm) '75 PSIG (5 Kg{/cm2) "75 PSIG (5 Kgt/cm2) A B c D E F G 4.25 (1 08) 2.20 (56) 1 . 3 2 :33.5 0.91 (231 0.24 (6) 0.81 'DN E 0.39 {10) A B c D E F G 4.O7 10s.5 2.03 t51 .5) 1.32

Rubber seal 5 Port Solenoid Valve Series SYJ7000

SYJ7000-22-1 SYJ7000-22-2 V111(T)No. 1 2 3 4 5 6 Aluminum die-casted 1/8 1/4 Body Piston plate End cover Piston Spool valve assembly Spool spring Sub-plate 7 8 Pilot valve How to Order Pilot Valve Assembly V111 5 G V115 5 D Rated voltage Coil specifications Light/surge voltage suppressor 5 6 1 2 24 VDC 12 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 V AC 50/60 Hz] 220 VAC

E-P HYREG

VY1B0-5 VY120-5 1 0 1 2 3 4 5 0 1 2 3 4 5 V V V 0 1 2 3 4 5 A VY1D00-6 VY1B0-6 VY120-6 A 1 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V 0 2.5 5 7.5 10 VY1D00-7 VY1B0-7 VY120-7 1 A 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 2 2 2 VY1D00-8 0 5 10 15 20 VY1B0-8 0 5 10 15 20 VY120-8 0 5 10 15 20 1 3 3 3 A mA mA mA Command signal Command signal Command signal VY1500/1501 VY1400/1401 VY1300

Power Valve: Economy Valve Series VEX5

-20 VEX5504 06 10 VEX57-10 12 14 20 VEX592444 Power Valve: Economy Valve Series VEX5 How to Order How to order pilot valves VEX5 1 06 2 E Z 5 1 B SF4 20 Option Economy valve Light/Surge voltage suppressor None B Nil Bracket G Pressure gauge Electrical entry Rated voltage Light/Surge voltage suppressor (Only with solenoid) Type (Ex.)

1

How to Order X214 2 2 1 01 06 S AS 1FG Body size Option Applicable tubing O.D. Model Port size Control method With One-touch fitting Stainless steel specifications (Stainless steel 300) 15-10-5

IIIIIIIIII

/min. (28 LPM) RECOMMENDED FILTRATION 5 micron Model Number Description V-800-10-W/K 0-10" Hg Vacuum regulator with adjusting knob V-800-10-W/S 0-10" Hg Vacuum regulator with 1/4" adjusting shaft V-800-10-W/OS 0-10" Hg Vacuum regulator with slotted adjusting shaft V-800-30-W/K 0-30" Hg Vacuum regulator with adjusting knob V-800-30-W/S 0-30" Hg Vacuum regulator with 1/4" adjusting shaft V-

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(inch) 1 8 1 2 3 8 5 32 3 16 5 16 1 4 One-touch Inch-size tubing/UNF, NPT thread connection Possible to use in vacuum to 100kPa UNF 10-32 Nylon 1 16 One-touch Mini Series KJ Soft nylon 1 8 Polyurethane Unions Applicable area U.S.A. etc.