Symbol: 2-Position, Solenoid: Single, Voltage: 12V DC, Option: -, Port Size: -, Thread: -, Connector: -, Q: -

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 4 (12V DC)

CEx-OMQ0013

(LCD ) 4.DIN 7 1-2 30mm No. 1-3 30mm Err6 1-4 5mm 5-10-15 5mm Err5 4.2 5 10 15 20 1.0 1.0 1.0 1.0 5.8 5mm 30mm Err6: 30 20 50mm/sec100mm/sec :50cm :0.5MPa 2. 2-1 CE2CEU2 8 NO 1 0 0 2 0 0 2 0 0 YES (kgf) (kgf) 1 0 0 8 0 NO 1 0 0 1 0 0 8 0 6 3 6 3 5 0 YES 5 0 0 0 NO 1 0 0 2 0 0 3 0 0 4 0 0 5 0 0 1 0 0 2 0 0 3 0 0 4 0 0 5 0 0 mm/s mm/s YES OK (), ? NO YES NO , , ?

AS

C D E F G H J K L AS100P-04-04 AS200P-04-04 AS200P-06-06 AS250P-06-06 AS300P-08-08 AS300P-10-10 23.9 31.4 31.3 33.6 37 37.5 41.7 51.4 52.3 54.6 60.5 63.5 26.7 36.4 36.3 38.6 42 42.5 38.9 46.4 47.3 49.6 55.5 58.5 26 30 30 32 36 39 9.3 9.3 11.6 12.8 15.2 18.5 17 17.1 18 18 19 22 4 4 6 6 8 10 4 4 6 6 8 10 10 13.6 13.6 17 22 22 12.7 12.7 13.5 16.8 18.5 21 17.4 18.9 19.9 24.1 27 30.5 22.4 25.7

EX510-GMJ1.eng

input and controling GW 24 VDC GW unit 4 2 3 7 8 Accessory No.

HRX-OM-W002

PTSensor PS1 PS2 PS3 PT FL WH WH BK BK DOUT2(temp) DOUT( flow) PM DC(+) DC(-) M M FAN OUT OUT OUT + + + 3 3 3 2 2 2 1 1 1 3 2 3 2 1 1 4 1 2 3 1 4 Model /A /B A E E B 3 2 1 1 BK BL BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL RS232C DIO RS485 FG 13 15 16 12 10 11 14 6 8 9 3 5 7 2 4 1 13 15 16 12 10 11 14 1 1 11 6 8 9 3 8 3 9 6 9 3 6 7 2 5 2 5 7 5 7 2 10 12 13 15 1 4 4 4 14 Thermister T3 t

LECP6_C

C 20m Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 14.2 2 1 (5.5) 14 B1 A1 5 6 17.7 2 1 18 A6 B6 (6.3) 15 16 11 30.7 44 - 113 [5m ] A B-1 2 A A-1 1 L B B-2 6 B A-2 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 S 4 B-1 5 A-1 1 B-3 2 A-3 (8) 14.2 B1 A1 17.7 2 1 14 18

LECA6_C

A 10m GND A-1 13 A B-2 7 B 15m A A-2 6 C 20m B B-3 9 B A-3 8 Z B-4 11 Z A-4 10 3 4 B-1 5 A-1 1 B-3 2 A-3 5.6 23.7 10.5 A1 2 (7.0) 14.2 1 3 2 1 B1 12.7 3 4 A4 B4 B1 (6.7) A1 10.2 2 1 18 A3 B3 (5.7) 15 16 11 30.7 45 - 11.3 I/O No.

Symbol: FG (2-Position), Solenoid: D (Double), Voltage: 3 (24V DC), Option: NM (Indicator Light, Direct Manual Override), Port Size: A02 [Side Piping 1/4 (R Port 3/8)], Thread: Rc (PT) (or w/o Subplate Type), Connector: Connector, Q: Q (CE Approval)

Symbol: FG (2-Position), Solenoid: D (Double), Voltage: 3 (24V DC), Option: N (Indicator Light), Port Size: A02 [Side Piping 1/4 (R Port 3/8)], Thread: Rc (PT) (or w/o Subplate Type), Connector: Connector, Q: Q (CE Approval)

ISO Interface

(2.4x4.4x7.4) 1/4, 3/8, 1/2 1.8 2 VSS8-8 Metal 79x125.5x211 (3.1x4.9x8.3) 3/8, 1/2, 3/4 3.6 3 VSS8-10 Metal 96x137x246 (3.8x5.4x9.7) 1/2, 3/4, 1 5.0 Mounted Interface Valve How to order Valve VS R 86 FG S 1 A03T -V1 -X1 Type of seal Special Options R Rubber S Metal Standard X1 External Pilot Supply Size 6 Size 1 8 Size 2 10 Size 3 Pilot Exhaust Options Pilot Exh. through footprint V1 External

HEC-OM-S008

) . 4-1 4.2 Reading setting temperature . 4-1 4.3 Reading internal sensor . 4-2 4.4 Reading external sensor . 4-3 4.5 Reading alarm status . 4-3 4.6 Offset setting (without writing FRAM) . 4-5 4.7 Reading offset . 4-5 4.8 Temperature setting (with writing FRAM) . 4-6 4.9 Offset setting (with writing FRAM) . 4-7 4.10 Communication Format and Examples of Answers from Thermo-con . 4-8 5 MODBUS

PFxx-OMJ0005CN

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I

JXCx-OMT0032CN

N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 CN4 CN4 No. No.

JXCx-OMT0030CN

N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 CN4 CN4 No. No.

Symbol: 2-Position, Solenoid: Single, Voltage: 24V DC, Option: Direct Manual Override, Port Size: w/o Subplate, Thread: Rc (PT) (or w/o Subplate Type), Connector: Connector, Q: CE Approval

Symbol: 2-Position, Solenoid: Single, Voltage: 24V DC, Option: Indicator Light, Port Size: w/o Subplate, Thread: Rc (PT) (or w/o Subplate Type), Connector: Connector, Q: CE Approval

Symbol: 2-Position, Solenoid: Single, Voltage: 100V AC, Option: None, Port Size: w/o Subplate, Thread: Rc (PT) (or w/o Subplate Type), Connector: Connector, Q: CE Approval

Symbol: 2-Position, Solenoid: Single, Voltage: 24V DC, Option: None, Port Size: w/o Subplate, Thread: Rc (PT) (or w/o Subplate Type), Connector: Connector, Q: CE Approval

Symbol: 2-Position, Solenoid: Single, Voltage: 100V AC, Option: Indicator Light w/Surge Voltage Suppressor, Port Size: Side Piping 1/2, Thread: NPTF, Connector: Connector, Q: CE Approval