E-P HYREG ® Series VY1 1

size Rc Option Symbol P/A port R port B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) 00 M5 00 M5 01 00 01 02 00 02 03 04 Symbol Mounting Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Base mounted 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol Note) A M5 01 02 02 03 04 04 06 10 10 12 14 20 Note) M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 Note) Note) 3 Body ported 5

E-P HYREG

sub-plate ITVH 02 14 03 38 04 12 4 ITVX A M5 M5 (3) (3) 1 01 18 (3) (3) 02 14 PVQ 3 02 14 03 38 04 12 VY1 VY1 VBA VBAT Body ported 5 04 12 VY1B0-X39 (5) 06 34 10 1 AP100 7 10 1 1 14 12 1 14 9 14 1 12 2 20 2 Note 3) Only bracket or foot may be mounted.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

SYJ322-l-M3 SYJ322M-l-M3 How to Order SS3YJ3--20-05 -A Port M3 X 0.5 Stations Bracket Applicable blank plate ass'y SYJ300-10-1A 2 stations 02 Without bracket R Port With bracket F ... ...

SZ3000

Symbol 02 Stations Symbol 02 Stations 2 stations 2 stations Connector mounting position Double wiring specifications (1) Double wiring specifications 10 02 11 02 10 stations 11 stations Mounting position Symbol D 2 stations 2 stations Specified layout (2) (Up to 21 solenoids possible) D side Specified layout (Up to 22 solenoids possible) 20 20 20 stations 20 stations PG: Flat ribbon cable

JXCx-OMX0009

to 0 Alarm 1 7 F to 0 Pushing force F to 8 Alarm 2 8 7 to 0 Alarm 3 8 F to 0 Trigger LV F to 8 Alarm 4 9 F to 0 Sub Function 9 F to 0 Pushing Occupation speed 10 F to 0 Address 10 F to 0 Moving force area 11 F to 0 Address 11 F to 0 Area 1 12 F to 0 DATA(H) 12 F to 0 Occupation (always 0) area 13 F to 0 DATA(L) 13 F to 0 Area 2 14 F to 0 Occupation 14 F to 0 area 15 F to 0 15 F to 0 In position

Thermo-chiller/Rack Mount Type

0 5 10 15 20 25 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] HRR050-A-20, HRR050-W-20 0.5 Circulating fluid pressure [MPa] Outlet: 60 Hz 0.4 0.3 Outlet: 50 Hz Return port Return port (Option Z) 0.2 Allowable operating range 0.1 0 0 10 20 30 40 Circulating fluid flow rate [L/min] Required Facility Water Flow Rate 012 018 024 030 HRR -W HRR010-W-20 30 20 Facility

Electric Actuators

Refer to pages starting with 181 for mounting. 95 95 100 8(4)-6.2 B () () (170) A 110 20 95 95 () () (150) A B A B 100 200 300 400 500 600 Stroke Model LG1H212SC-700-F-X10 LG1H212SC-800-F-X10 LG1H212SC-900-F-X10 LG1H212SC-1000-F-X10 LG1H212SC-1200-F-X10 Stroke Model LG1H212SC100-F-X10 LG1H212SC200-F-X10 LG1H212SC300-F-X10 LG1H212SC400-F-X10 LG1H212SC500-F-X10 LG1H212SC600-F-X10 580 680

3 Port Air Operated Valve

Type 41/Common exhaust VFA VFRA Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF VPA4 SYJA VZA Port size Stations 02 Symbol Port size Applicable series 1/4 3/8 1/2 VTA 02 03 04 VPA300 VPA500 VPA700 2 stations VGA 20 20 stations VPA VPA VPA3 VV3PA 3 3 42 04 02 Type 42/Individual exhaust Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF Port size

JXCx-OMT0062

force F to 8 Alarm 2 8 7 to 0 Alarm 3 8 F to 0 Trigger LV F to 8 Alarm 4 9 F to 0 Sub Function 9 F to 0 Pushing speed Occupation area 10 F to 0 Address 10 F to 0 Moving force 11 F to 0 Address (always 0) 11 F to 0 Area 1 Occupation 12 F to 0 DATA (H) 12 F to 0 area 13 F to 0 DATA (L) 13 F to 0 Area 2 14 F to 0 Occupation 14 F to 0 area 15 F to 0 15 F to 0 In position 108 - 22.

SZ3000

(up to 24 solenoids possible) 20 20 20 stations 20 stations Connector mounting position Mounting position Symbol D PG: Flat cable connector (20 pins) PH: Flat cable connector (10 pins) D Side Note Symbol 02 Note Symbol 02 Stations Stations 2 stations 2 stations ... ... ... ...

VQC

For example, changing from F Kit (D-sub connector) to S Kit (serial transmission) is achieved by simply changing the kit piece. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram) Printed circuit board patterns between connectors are shifted at every station

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Note Note Symbol 02 Symbol 02 2 stations 2 stations Note 1) Connector mounting position Double wiring specification Double wiring specification ... ... ... ... ... ... ... ... 10 02 11 02 11 stations 10 stations Symbol D Mounting position 2 stations 2 stations D side Specified layout Note 2) Specified layout (up to 22 solenoids possible) (up to 21 solenoids possible) 20 20 20 stations 20

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

D NPN Analog 4 to 20 mA E PNP Analog 1 to 5 V Analog 0 to 10 V*3 + ZS-33-D F PNP Analog 4 to 20 mA *3 1 to 5 V or 0 to 10 V can be selected by pressing the button.

VCL

Direct Operated 2 Port Solenoid Valve For Oil Series VCL Series VC How to Order Valves (Single Unit) VX2 VXD VC L 2 1 1 G 2 02 VXZ VXE For oil Option VXP None Foot type bracket Nil F VXR Bracket is packed in the same container as the main body.

Air Fittings & Tubing

M D1 D2 L1 Urethane KQ2LF04-M5 KQ2LF04-M6 KQ2LF04-01 KQ2LF04-02 KQ2LF06-M5 KQ2LF06-M6 KQ2LF06-01 KQ2LF06-02 KQ2LF06-03 KQ2LF08-01 KQ2LF08-02 KQ2LF08-03 KQ2LF10-02 KQ2LF10-03 KQ2LF10-04 KQ2LF12-02 KQ2LF12-03 KQ2LF12-04 M5 X 0.8 M6 X 1.0 14.5 8 8 5 3.5 3.5 15.5 21 24.5 15 16 22 25.5 26 4 10.4 16 18.5 1 8 1 4 14 17 13 20 5 6 13 10 4.2 4.2 M5 X 0.8 M6 X 1.0 3.5 3.5 8 8 6 17 1 8 12.8

Direct Solenoid

Poriing No. of Ports 'xx" M84010-02 Ta"NPTFSide l l M84011-02 7a" NPTF Side: Y.r" Bottom A & B 1 3 MB 4210-02 %"NPTFSid(2); % Botlom(5) 7 t 5 Manifolds *(OptionsT & P Only) Part No. Poding No.of Ports "xx" Subplates .

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

(Position for light mounting) Socket Terminal block Shaved part Terminal thread (3 positon) Hook Part No. of DIN Connector (Based on DIN) Without light AXT100-20-1 With light Rated voltage Voltage symbol Part No. 24V DC 12V DC 100V AC 200V AC 110V AC 220V AC 24V 12V 100V 200V 110V 220V AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Circuit with light

Process Pump

Note) One of Nil, F or N is entered as thread symbol.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

-23 (S) 3.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 49.7 48.3 44.2 42.8 13.3 21.5 24 7.8 16.2 23 (24) AS221FSG-02-04 (S) 4 8.2 AS221FSG-02-06 (S) 6 10.4 23.4 32.7 (32.8) AS221FSG-02-08 (S) 8 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FSG-02-10 (S) 10 15.9 26.9 36.2 (36.3) 15.6 25 (26) AS321FSG-02-06 (S) 6 1/4 17 (17.5) 13 10.4 21.8 32.1

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc