CV/MVGQ Mounted Cylinder Series CV/MVGQ 10, 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 Series Variations RE A B Standard variations Bore size (mm) Series Action Page REC With air cushion With strong scraper Built-in One-touch fitting With auto switch Built-in magnet CX Series CVJ5 CY 10 16 10-15-4 Double acting MQQ M RHC Series CVJ3 MK(2) Single acting (Spring return) (Spring extend) 10 16 10-15-10 RS Q
[When dew point indicator color is blue: Functioning normally] [When dew point indicator color is pink: Dew point temperature is high (outlet air is moist) Note: Atmospheric pressure dew point is approx. 10C or more] It takes about 1 hour from the start of air flow for the dew point indicator color to change. 2.
Flow rate Q (Nl) Flow rate Q (Nl) Tube 2,000 Tube 2,000 mm 500 mm 6 x 8 pcs. 6 x 8 pcs. 500 mm 500 mm mm 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs. Time T1, T2 (ms) Without tube (VXF2150) Without tube Without tube (VXF2150) PM: Raised up to 0.48 MPa PM: Raised up to 0.48 MPa PA=0.5 MPa 6 x 6 pcs. PA=0.5 MPa A=0.5 MPa 6 x 6 pcs.
A A a B B s j C f g t C0.5 C0.2 C0.2 b d e 45 45 Section A-A p k C0.5 45 C n h i l (d) C0.5 q m O Section B-B r (l) View C (mm) +0.2 0 l i o j k m n p q r s t b e g a c d f h Model 0 0.2 0.05 0.15 + 0.1 0 +0.2 0 3.5 +0.013 +0.001 CXS 6 2.75 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.8 0.5 4 3.5 3 3.5 16 0.1 M3 x 0.5 4 1 5.5 6 +0.2 0 0.05 0.15 0 0.2 + 0.1 0 +0.2 0 5 +0.016 +0.001 CXS10 4 M3 x 0.5 8 5
2 y q e !3 o !0 With auto switch (Built-in magnet) 32 to 63 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !2 r t i !4 y q e !3 o w u !0 !1 M: Rod end male thread Component Parts Replacement Parts: Seal Kit No. Description Material Note Bore size (mm) Kit no.
How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area (mm) P: Differential pressure (P1P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures
1&4 I Spdng-spooltuln xTmtl0 4 Orlng -Slv ARRt6A{14 sltw a3lambt-congEt3 ot spoot end st.v (metchd s6t) end (4) detjt4 6 XT@4 7 Q!!e, axT01&5 I P[ot cotr asrmDty with oprator.
1&4 I Spdng-spooltuln xTmtl0 4 Orlng -Slv ARRt6A{14 sltw a3lambt-congEt3 ot spoot end st.v (metchd s6t) end (4) detjt4 6 XT@4 7 Q!!e, axT01&5 I P[ot cotr asrmDty with oprator.
: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.
CJ1 CJP CJ2 CM2 C85 Component Parts CG1 No. q w e r t y No. u i o !0 !1 !
3 w e q !1 r y o e t !2 For 4 Built-in magnet Without magnet Single acting u i r y o e w i e u !0 Built-in magnet Without magnet Rod end male thread Parts list Replacement parts: Seal kits (double acting) Contents Note No. Description Material Kit no. Bore size 1 Hard anodized Aluminum alloy 4 CUJB4-PS Cylinder tube 2 Above numbers 11, 12, 13 and an exclusive grease pack.
(IEC 60417-5032-1) How to see the serial number Q Z 001 December 2012 Q Z 001 Year Symbol Remarks Month Symbol Remarks Serial no. 2012 Q Repeated from A to Z in alphabetic al order 1 O Repeated from O to Z in alphabetical order, with O for January and Z for December 2013 R 2 P 2014 S 3 Q Fig. 1-1 Position of the product label HRSH Series 1.4 Product Label 1-3 HRX-OM-Q026 Chapter 1 Safety
IDFA Series 6-1 Specifications 6 1 IDX-OM-W016 Air dryer6 References 6-3 Dimensions DRAFT AIR OUTLET IDFA3E B Q A E D AIR INLET VENTILATION WITH LAMP SWITCH AIR OUTLET THERMOMETER EVAPORATION G F C DRAFT AIR INLET DRAIN TUBE (O.D.10 LENGTH:0.8m) VENTILATION (820) J TERMINAL BLOCK N L K M H GROMMET POWER SUPPLY ENTRY(17) P Measuremm Model Thread size A B C D E F G H J K L M N P Q IDFA3E Rc3
(mm) Model M Weight (g) L Q 3-applicable tubing D Note) KRT08-00 KRT06-00 6 10 15 25 29 KRT10-00 KRT12-00 10.6 25.6 40 57.4 6.4 17.7 28.4 45.4 12.8 20 17 15.2 23 18.5 18.5 26.5 21 20.9 28.5 22 5.3 6 6.8 7.5 8 10 12 Note) D: Max. diameter Male Branch Tee: KRT H (width across flats) Effective area (mm 2) FR soft nylon FR double layer Applicable tubing O.D.
: inch (mm) 10mm N 3/8 B Q E D A G C F 1 J 31.5 [820] P L K M N H (L=2800) IDFB4E/6E/8E/11E-11 1. : inch (mm) 10mm N 3/8 A B E D Q G C F 1 J 31.5[800] H N M 4-0.5 (L=2800) [4-13] 6-3 6 3 IDFB Series IDX-OM-W020 6 IDFB15E-11 1. : inch (mm) 10mm N 3/8 E D B A Q G C F (820) K L P N M H J 4-13 (L=2800) (inch [mm]) A B C D E F G H J K L M N P Q IDFB3E 3/8 8.9 16.1 18.6
Y59BL 5m Z (Example) Y69BZ Solid state switches marked with a "p" symbol are produced upon receipt of order. 2 Series MLGP Cylinder Specifications Action Fluid Proof pressure Maximum operating pressure Minimum operating pressure Ambient and fluid temperature Piston speed Cushion Lubrication Stroke length tolerance Double acting Air 1.5MPa (217 psi) 1.0MPa (145 psi) 0.15MPa (22 psi) -10C
. -7- Low Profile 2/3-Port Solenoid Valve SX90/090 Series How to Order SX9 1 5 G 2-port valve q SX090 5 G 3-port valve w e r q Type of actuation w Power-saving circuit e Rated voltage r Electrical entry 1 Normally closed 2 Universal Nil Without power-saving circuit Y1 With power-saving circuit 5 24 VDC 6 12 VDC G Grommet (Lead wire length: 300 mm) Specifications Model SX91 SX92 SX090 Valve
Q=226S P(P2+0.1013) Sonic flow : P1+0.10131.89(P2+0.1013) Q=113S(P1+0.1013) Q : Flow rate [ /min(ANR)] S : Effective area (mm2) P : Pressure differential (P1-P2) [MPa] P1 : Upstream pressure [MPa] P2 : Downstream pressure [MPa] When the air temperature is different, multiply the flow rate calculated with the above formula by the following coefficient for compensation. -20 1.08 -10 0 10 30
How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 +0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min(ANR)] S: Effective area (mm) P: Pressure drop (P1-P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Maintenance Correction for different air temperatures
SX90/090 Series CAT.ES70-59A Low Profile 2/3-Port Solenoid Valve SX90/090 Series How to Order SX9 1 5 G 2-port valve q SX090 5 G 3-port valve w e r q Type of actuation w Power-saving circuit e Rated voltage r Electrical entry 1 Normally closed 2 Universal Nil Without power-saving circuit Y1 With power-saving circuit 5 24 VDC 6 12 VDC G Grommet (Lead wire length: 300 mm) Specifications Model