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record display Log entry display Display setting (Easy/Normal mode) Language setting (Japanese/English) Backlight setting LCD contrast setting Beep sound setting Max. connection axis Distance unit (mm/inch) TB setting Easy/Normal Language Backlight LCD contrast Beep Max. connection axis Password Distance unit TB setting Reconnection of axis Reconnect Reconnect Dimensions 34.5 w 102

JA/JAH/JB/JS

4400 9000 9000 14000 22000 22000 22000 55000 12 16 16 19 19 19 22 22 25 32 32 70 90 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 18 24 24 30 30 30 34 34 42 48 48 54 74 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 8 10 10 12 12 12 16 16 20 24 27 27 33 44 52 52 67 67 67 82.5 82.5 98.5 123 123 155 213 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 48 38 44 44 57.5 57.5 57.5 71.5 71.5 86 107 107 102

Floating Joint

80 80 88 116 8 9 9 13 13 13 15 15 18 24 24 24 42 19 25 25 30 30 30 38 38 47 58 58 69 89 44 52 52 67 67 67 82.5 82.5 98.5 123 123 155 213 12 16 16 19 19 19 22 22 25 32 32 70 90 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 18 24 24 30 30 30 34 34 42 48 48 54 74 8 10 10 12 12 12 16 16 20 24 27 27 33 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 48 38 44 44 57.5 57.5 57.5 71.5 71.5 86 107 107 102

48

Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Number of auto switches Bore size 12 (10 x 2) 16 (12 x 2) 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) D-M9V 1 5 2 5 D-M9 1 51 5 2 101 10 D-M9W 1 52 2 102 10 D-M9WV D-M9AV 1 52 2 10 D-M9A 1 52 2 102 1 Confirm that it is possible to secure the min. bending radius of 10 mm of the

Compact 5-Port Solenoid Valve

EX250 ZK2 combination manifold Flat ribbon cable Lead wire EX245 EX260 D-sub Connector, Flat Ribbon Cable [IP20/40/67] How to Order p. 21 Dimensions Type 10/Side Ported: Common Dimensions (External Pilot, Built-in Silencer/Mixed Size, Straight Port Type) p. 97 Manifold Exploded View [By Wiring] p. 101 D-sub Connector/Flat Ribbon Cable (IP40/Connector Entry Direction Adjustable) p. 102

Slider Type Ball Screw Drive/11-LEFS Series

or less (No condensation) Cleanliness class Note 5) ISO Class 4 (ISO 14644-1) LER Grease Ball screw /Linear guide portion Low particle generation grease Motor size 28 42 Motor output [W] 30 36 LEH Electric specifications Motor type Servo motor (24 VDC) LEY -X5 Encoder Incremental A/B (800 pulse/rotation)/Z phase Rated voltage [V] 24 VDC 10% 11LEFS 11LEFS Power consumption [W] Note 6) 63 102

LEC-T1_C

.** .101 (9) TB .102 (9-1) TB . 102 (9-2) TB . 103 (9-3) TB . 103 (10) .104 3 - (10-1) . 104 6.4 .105 1.105 11. 105 2.106 21. 106 3.107 31. 107 7. /.109 8. /.110 8.1 .110 8.2 .111 8.3 .112 8.4 .113 8.5 .114 8.6 .114 9. .115 9.1 /.115 9.2 .115 9.3 .117 9.4 .117 9.5 .118 9.6 .118 9.7 .118 10. .119 .121 .121 1TB Ver1.**.121 2TB Ver2.**.123 4 - LEC-T1 Series/ (ISO/IEC)(JIS) *1) *2) *1) ISO

JXCx-OMT0005CN

2 12-13 2byte *1 *2 1 100 Get/Set 32 No.0 14-15 2byte *1 *2 16-17 2byte *1 *2 18-19 2byte *1 *2 20-23 14byte *1 *2 24-27 24byte *1 *2 28-31 4byte *1 *2 64 100 Get/Set 32 No.63 0-1 2byte *1 *2 28-31 4byte *1 *2 *1 *2 21(P.85 19 - 2IO Class 68h /IO IO IO DeviceNet 0Eh Get_Attribute_Single 10h Set_Attribute_Single Attribute Access Size Name Semantics of Value 100 Get 2 101 Get 2 102

Compact Guide Cylinder

Compact Guide Cylinder 12, 16, 20, 25, 32, 40, 50 A ball bushing bearing type has been added. (16, 32) Existing model MGPM32 MGPK32 Max. 28% reduction Volume Height: 3 mm shorter 538 cm3 390 cm3 Compared with the MGPM, 32, 25 mm stroke 45 mm Max. 41% reduction Weight 102 mm 85 mm 0.32 kg 0.19 kg Width: 10 mm shorter Compared with the existing model (MGPM), 16, 10 mm stroke Overall length

CQS

16 89 104 120 136 152 167 183 199 215 231 20 127 146 166 186 206 227 247 267 287 308 25 Minimum Operating Pressure Unit: MPa Weight/With Auto Switch(Built-in magnet) Unit: g Bore size(mm) 12 16 20 25 Stroke (mm) Bore (mm) Min. operating pressure 0.07 0.07 0.05 0.05 5 10 15 20 25 30 35 40 45 50 Allowable Kinetic Energy Unit: J Bore size(mm) 46 54 62 70 77 85 12 12 16 20 25 60 71 81 91 102

Lubrication Equipment

Regulator Series AR Circuit ALD600 ALD900 Pressure differential and mist generation Min. flow for pressure differential setting ALDU600 ALDU900 How to read graph When the primary pressure is 0.5MPa, a flow rate that is greater than 102 l/min(ANR) will be necessary to set the pressure differential to 0.05MPa.

MGG

(mm) Stroke range (mm) Bore size (mm) AP AK AL AJ AI N AH M AG L AB K AA J I V B U T O P S A 20 25 32 40 50 75, 100, 125, 150, 200 25 6.6 9 95 82 45 125 25 112 80 11 60 12 55 30 48 108 82 12 99 M6 x 1 depth 9 Rc 1/8 26 30 9 9 108 92 54 150 35 134 100 13 70 16 65 35 57 130 100 109 M6 x 1 depth 13 Rc 1/8 13 31 75, 100 125, 150 200, 250 300 35 9 9 118 102 60 150 35 134 106 16 80 16 73 40 65

S070

Note 3) With the low vacuum specification, the operating pressure range is 1.33 102 Pa to the maximum operating pressure.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth 8 M4 x 0.7 1 2 3 4 AMC520 102 173.5 193.5 3.2 Depth 8 20 20 30 70 176.5 , 40 70 On the type for the AMC220, an R 1/4 fitting can be attached by removing the drain cock.

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

-11 counter bore depth 6.3 98 96 1 6.3 76 5 75 0.2 44 8 4.1 M8 x 1.25 x 23l and M8 x 1.25 (hexagon bolt) (hexagon nut) 2-M6 x 1 (through) 18 2-M5 x 0.8 Thread depth 8 30 (Z) 8-M5 x 0.8 thread depth 7.5 (same on reverse side) 4-Rc 1/8 thread depth 6.5 (piping port) (same on reverse side) 9 20 Model S ZZ Z SS 19 CXS32-10-XB19 10 122 92 CXS32-15-XB19 15 127 97 10 56 40 CXS32-20-XB19 20 132 102

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

.@ (9r.514.O2 (102) 4.43 (1125) 4.84 (1Al 5.2 (13s.5) (144) 6.08 054.5)06s) 6.91 (175.5) (186) 7.74 096.5) 8.15 (207) 8-56 \217.5) -M5,B3T crommet(c), (H) : l I i e 't rI ; ; TVpe 542,/ Side Ported L Type Plug Connector (L) M Type Plug Connector (M) NVV3J3-542-a*on--M5.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

C4 C6 C4 C6 Stations L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 123 135.5 125 102 16.5 148 148 160.5 150 173 185.5 175 198 210.5 200 112.5 91.5 15.5 137.5 137.5 123 12.5 162.5 144 14.5 187.5 165 16.5 133.5 13.5 154.5 15.5 175.5 17.5 112.5 17.5 Stations SS5Y3-45GUBC4 C6 2 3 4 5 6 7 8 9 10 Stations L1 L2 L3 L4 135.5 125 108 13.5 148 160.5 150 129 15.5 173 185.5 175 150 17.5 185.5 175 198 210.5 200 223

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

Station n L1 L2 Station 2 35.5 28.5 Station 20 224.5 217.5 3 46 39 4 56.5 49.5 5 67 60 6 77.5 70.5 7 88 81 8 98.5 91.5 9 109 102 10 119.5 112.5 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 17 Series SYJ3000 C4 N3 Type 32 Manifold: Side Ported/SS5YJ3-32Stations -M5, [ ]: AC (Lead wire length) 91.7 [96.1] Approx. 300 C4

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Stations L1 L2 3 46 39 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 20 224.5 217.5 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 29 Series SYJ3000 Manifold Drawings Type 31 Manifold: Side Ported / SS5YJ3-31 Station M3 (mm) Grommet (G) , (H) 4-M5 0.8 (P, R port) 52.4(GZ:53.1) [

LEC-OM07605CN

7-26 7.1 . 72 7.1.1 . 72 7.1.2 . 75 7.1.3 . 77 7.1.4 . 78 7.1.5 . 78 7.1.6 . 7-12 7.2 . 7-14 7.2.1 . 7-14 7.2.2 . 7-15 7.2.3 . 7-16 7.2.4 . 7-18 7.3 Tough Drive . 7-21 7.3.1 Tough Drive . 7-21 7.3.2 Tough Drive . 7-23 7.4 SEMI-F47 . 7-26 8 81 8-71 8.1 . 82 8.2 . 87 8.3 . 88 8.4 . 8-50 8.5 . 8-57 8.6 . 8-66 8.7 . 8-71 8 91 95 9.1 . 92 9.2 . 95 10 101107 10.1 . 102