Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
Series: 7000 (SY7000), Port Size: 2 (SY7000 3/8 inch, SY9000 1/2 inch), Thread Type: F (G)
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
SI Unit: E (EtherNet/IPâ„¢), End Plate: 4 (M12 power supply connector, IN/OUT, A-coded, Pin arrangement 1), I/O Unit Stations: None, Electro-pneumatic regulator stations: 2 (2 Stations), P, E Port Entry: F (Both Sides, Built-in Silencers), Mounting and Option: D (DIN Rail Mouting, with DIN rail)
NEW SY3000 NO SIZE RATING. 0.20613 lb. 2F.
VQZ2000 NO SIZE RATING. .27060 lb. 2F.
VQ5000 BASE MT NO SIZE RATING. 1.40013 lb. 2F.
SY5000 NO SIZE RATING. 0.22046 lb. 2F.
.: 10), Voltage/Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 2F (48VAC; DIN Terminal w/Surge Voltage Suppressor & Light), Other Options: B (NPT Thread)
SY7000 NO SIZE RATING. 0.26565 lb. 2F.
SY NO SIZE RATING. .22780 lb. 2F.