Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector)

Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector)

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector)

SI Unit: E (EtherNet/IPâ„¢), End Plate: 4 (M12 power supply connector, IN/OUT, A-coded, Pin arrangement 1), I/O Unit Stations: None, Electro-pneumatic regulator stations: 2 (2 Stations), P, E Port Entry: F (Both Sides, Built-in Silencers)

Function: 1 (2 Position Single), Body Option: 00 (Base Mounted Plug-in), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in), Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: 02 (Base Mounted w/Sub-plate 1/4, Body Ported 1/4), Thread: T (NPTF)

Function: 3 (3 Position Closed Center), Body Option: 00 (Base Mounted Plug-in), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in), Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: 02 (Base Mounted w/Sub-plate 1/4, Body Ported 1/4), Thread: T (NPTF)

Function: 1 (2 Position Single), Body Style: 0 (Base Mounted Plug-in), Body Option: 0 (Standard for Base Mounted Type), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in), Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: 03 (Sub-plate Plug-in 1/8, Non Plug-in 3/8, Direct Ported P,A,B Ports 3)

Function: 1 (2 Position Single), Body Option: 00 (Base Mounted Plug-in), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in), Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Port Size: 02 (Base Mounted w/Sub-plate 1/4 Side Piping)

Function: 1 (2 Position Single), Body Option: 00 (Base Mounted Plug-in), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in), Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Port Size: 02 (Base Mounted w/Sub-plate 1/4 Side Piping), Thread: T (NPTF)

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Function: 4 (3 Position Exhaust Center), Body Style: 0 (Base Mounted Plug-in), Body Option: 0 (Standard for Base Mounted Type), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in), Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: 03 (Sub-plate Plug-in 1/8, Non Plug-in 3/8, Direct Ported P,A,B Ports 3), Thread: T (NPTF

Function: 1 (2 Position Single), Body Option: 0 (Base Mounted Plug-in), Direct Manual Override: 0 (Standard), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in), Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side Ported (Or None in Case of w/o Subplate), Port Size: 04 (Sub-plate Plug-in Terminal 1/2, Non Plug-in Standard 1/2), Thread

Function: 3 (3 Position Closed Center), Body Option: 0 (Base Mounted Plug-in), Direct Manual Override: 0 (Standard), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in), Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side Ported (Or None in Case of w/o Subplate), Port Size: 03 (Sub-plate Plug-in Terminal 3/8, Non-plug-in Standard 3/

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Function: 2 Position Single, Body Option: Base Mounted Plug-in, Pilot: Internal Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Port Size: Base Mounted w/Sub-plate 1/4 Side Piping, Thread: -

Function: 2 Position Single, Body Option: Base Mounted Plug-in, Pilot: Internal Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: Base Mounted w/Sub-plate 1/4, Body Ported 1/4, Thread: NPTF, Option: -

Function: 3 Position Closed Center, Body Option: Base Mounted Plug-in, Pilot: Internal Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: Base Mounted w/Sub-plate 1/4, Body Ported 1/4, Thread: NPTF, Option: -

Function: 3 Position Closed Center, Body Option: Base Mounted Plug-in, Direct Manual Override: Standard, Pilot: Internal Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side Ported (Or None in Case of w/o Subplate), Port Size: Sub-plate Plug-in Terminal 3/8, Non-plug-in Standard 3/8, Thread: NPTF

Function: 2 Position Single, Body Option: Base Mounted Plug-in, Direct Manual Override: Standard, Pilot: Internal Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Plug-in, Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side Ported (Or None in Case of w/o Subplate), Port Size: Sub-plate Plug-in Terminal 1/2, Non Plug-in Standard 1/2, Thread: NPTF