Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

+ 118 11 to 20 stations: W = 22n + 140 2 to 10 stations: W = 47n + 156 11 to 20 stations: W = 47n + 190 Note 1) For more than 11 stations, supply pressure to P port on both sides and exhaust from R port on both sides.

VQZ1000/2000/3000

(5) 10.5 U side D side Stations 1 2 3 n ( 9.5) 45 65.5 ( 9.5) 22 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 7 (59.5) 58 20.5 Residual pressure release Manual override (33) (41.5) 1.5 C8: One-touch fitting assembly for 8 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 C8: One-touch fitting assembly for 8 B B B 2 2 2 A A A 4 4 4 B 25 2 A Dimensions Formula L1 = 22n

VM

One Way Roller Lever/VM220-02-02, VM230-02-02 VM220-02-02S, VM230-02-02S JIS Symbol 2 port 3 port 22N F.O.F. 0.5MPa supply 7mm P.T. 5mm O.T. 12mm T.T.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

release manual override U side D side Stations (5) 10.5 1 2 3 n 22 7 (59.5) 58 20.5 2-Rc(PT)1/8, 1/4, C6, C8 C6: One-touch fitting ass'y for 6 C8: One-touch fitting ass'y for 8 Residual pressure release manual override (33) (41.5) 1.5 2-Rc(PT)1/8, 1/4, C6, C8 C6: One-touch fitting ass'y for 6 C8: One-touch fitting ass'y for 8 B B B 2 2 2 A A A 45 65.5 4 4 4 B 25 2 A Dimensions Equation L1=22n

Metal Seal/Rubber Seal Series VQ Body Ported

manual override (For C6, C8) 22 20.5 7 D side U side Stations 1 2 3 n ( 9.5) 45 65.5 (41.5) (33) (59.5) 58 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting for 6 Residual pressure release manual override C8: One-touch fitting for 8 C8: One-touch fitting assembly for 8 C6: One-touch fitting for 6 2-Rc 1/8, 1/4, C6, C8 B B B 2 2 2 A A A 4 4 4 25 B 2 (1.5) 37.5 17.5 A Dimensions Formula L1 = 22n

0.4

9.5) 45 65.5 Residual pressure release manual override 2 x Rc 1/8, 1/4, C6, C8 C6: 6 one-touch fitting assembly (41.5) C8: 8 one-touch fitting assembly C8: 8 one-touch fitting assembly C6: 6 one-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 B B B Sub-plate Single Unit Safety Instructions Specific Product Precautions 2 2 2 A A A 4 4 4 B 25 2 (1.5) 37.5 A 7.5 L n Dimensions Formula L1 = 22n

Base Mounted Metal Seal/Rubber Seal Series VQ

1 2 3 n (41.5) (33) (59.5) 58 Residual pressure release manual override 2-Rc1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 C8: One-touch fitting assembly for 8 C8: One-touch fitting assembly for 8 C6: One-touch fitting assembly for 6 2-Rc 1/8, 1/4, C6, C8 B B B 2 2 2 A A A 45 65.5 4 4 4 B 25 2 (1.5) 37.5 17.5 A 1 2 3 4 5 6 7 8 10 11 12 L n 13 14 15 16 Dimensions Formula L1 = 22n

0.4

10.5 80 37.5 Residual pressure release manual override (For C6, C8) 22 20.5 7 Stations 1 2 3 n D side U side ( 9.5) 45 (33) (59.5) 58 Residual pressure release manual override 2 x Rc 1/8, 1/4, C6, C8 C6: 6 one-touch fitting assembly (41.5) C8: 8 one-touch fitting assembly C8: 8 one-touch fitting assembly C6: 6 one-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 L n Dimensions Formula L1 = 22n

0.4

(For C6, C8) 22 20.5 7 Stations 1 2 3 n VFR D side U side ( 9.5) 45 65.5 (33) (59.5) 58 Residual pressure release manual override 2 x Rc 1/8, 1/4, C6, C8 C6: 6 One-touch fitting assembly (41.5) VQ7 C8: 8 One-touch fitting assembly C8: 8 One-touch fitting assembly C6: 6 One-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 B B B 2 2 2 A A A 4 4 4 B 2 (1.5) 37.5 A L n Dimensions Formula L1 = 22n

0.4

10.5 80 37.5 Residual pressure release manual override (For C6, C8) 22 20.5 7 Stations 1 2 3 n U side D side ( 9.5) 45 (33) (59.5) 58 Residual pressure release manual override 2 x Rc 1/8, 1/4, C6, C8 C6: 6 One-touch fitting assembly (41.5) C8: 8 One-touch fitting assembly C8: 8 One-touch fitting assembly C6: 6 One-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 L n Dimensions Formula L1 = 22n

N.C. High Vacuum Solenoid Valve, HIGH VACUUM VALVE, L53, 0.41000 lb

Model: 3 (Size 3), Orifice Size: 4 (ø6), Fitting Size: 3 (3/8), Fitting Type: S (Compression Fitting), Voltage: 3 (110 VAC), Electrical Entry: GS (Grommet w/Surge Voltage Suppressor)

Model: 3 (Size 3), Orifice Size: 4 (ø6), Fitting Size: 3 (3/8), Fitting Type: N (NPT Female Thread), Voltage: 3 (110 VAC), Electrical Entry: GS (Grommet w/Surge Voltage Suppressor)

Model: 1 (Size 1), Orifice Size: 1 (ø2), Fitting Size: 1 (1/8), Fitting Type: N (NPT Female Thread), Voltage: 3 (110 VAC), Electrical Entry: GS (Grommet w/Surge Voltage Suppressor)

Model: Size 3, Orifice Size: ø6, Fitting Size: 3/8, Fitting Type: Compression Fitting, Voltage: 110 VAC, Electrical Entry: Grommet w/Surge Voltage Suppressor, Special Electrical Entry: -, Spacer: -

Model: Size 3, Orifice Size: ø6, Fitting Size: 3/8, Fitting Type: NPT Female Thread, Voltage: 110 VAC, Electrical Entry: Grommet w/Surge Voltage Suppressor, Special Electrical Entry: -, Spacer: -

Model: Size 1, Orifice Size: ø2, Fitting Size: 1/8, Fitting Type: NPT Female Thread, Voltage: 110 VAC, Electrical Entry: Grommet w/Surge Voltage Suppressor, Special Electrical Entry: -, Spacer: -

N.C. High Vacuum Solenoid Valve, HIGH VACUUM VALVE, L53, 0.33 lb

N.C. High Vacuum Solenoid Valve, HIGH VACUUM VALVE, 0.33 lb

N.C. High Vacuum Solenoid Valve, HIGH VACUUM VALVE, 0.33 lb