Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Station 9 SOL.B 22 SOL.A 10 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Station 10 SOL.B 23 SOL.A 11 Station 11 SOL.B 24 SOL.A 12 Station 12 SOL.B 25 Note) COM. 13 Positive COM spec. Negative COM spec. 1021-VV5Q21 The total number of stations is tabulated starting from station one on the D-side.

KJ

(inch) Min. port size D Note) L Q M2 M1 Weight (g) Model Applicable tubing KQ2T01-03 KQ2T01-07 KQ2T03-05 KQ2T03-07 KQ2T05-07 KQ2T07-09 KQ2T07-11 KQ2T09-11 KQ2T09-13 KQ2T11-13 10.4 13.2 11.4 13.2 13.2 15.2 17.9 17.9 21.7 21.7 18 20.5 19.5 20.5 20.5 23 26 26 29 29 4.5 5.3 4.8 5.3 5.3 6 6.6 6.6 7.8 7.8 16 17 16.5 17 17 18.5 21 21 22 22 5 8 6 8 8 11 17 17 26 28 5 32 2.5 15.5 1 8 1 4 3 16 3

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

-11-102 to 103 13-11-104 to 105 13-11-106 to 110 13-11-106 to 110 13-11-111 to 112 13-11-113 to 116 Buffer stroke Adsorption is possible even on a slanted surface.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

holes) 2-3.2 (Mounting holes) 2-3.2 22 4 22 4 VS B A B A 11 VS7 2.5 17.5 11 2.5 17.5 A B A B (Lead wire length) 50.7 64.3 300 54.7[56] 52.6 [59.1] 300 (Lead wire length) 41.5 [48] 41.5 [48] 33.5 33.5 29.1 22.5 22.5 R2 R1 P R2 R1 P 13 13 5 5 10 10 10 10 5-M5 X 0.8 (Piping port) 5-M5 X 0.8 (Piping port) 14 14 14 14 15 15 [ ] for AC Other dimensions are the same as the grommet style. [ ]

HRX-OM-W002

36 (CN6) 20 34 21 21 12 10 15 16 17 18 19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 24 14 34 2B 1B 1A 3A 2A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21

MNB

19.5 12 13 54 32 to 500 22 17 6 1/8 8.5 10 46 97 45.5 12 32.5 83 13 13 30 27 16 13 63 40 to 500 30 22 8 1/8 10 14 52 104 52.5 12 38 91 14 16.5 35 32 20 14 75 50 to 600 35 27 11 1/4 12.5 18 65 120.5 58.5 15 46.5 104.5 15.5 19 40 32 20 14 90 63 to 600 35 27 11 1/4 17.5 18 75 134.5 68 12 56.5 119.5 16.5 23 45 37 25 20 102 80 to 750 40 32 13 1/4 22 22 95 169 81 18 72 150 19 33 45 37 30 20 116

F

15.5 3.4/2.9 5/32 1/4 KQE03-35 1/2-20 17.46 17.46 31.5 15 14 16 3 4 18 KQE04-01 M12x1 14 14 27.5 11 13 16 5.6 3/16 1/8 KQE05-34 9/16-18 17.46 17.46 28.5 13 15 16.5 3.5 4 14 KQE04-02 M12x1 17 14 31 15 13 16 5.6 1/4 1/4 KEQ07-35 9/16-18 17.46 17.46 30.5 14.5 15 17 4.6 6 18 KEQ06-01 M14x1 17 17 28 11 15 17 13.1 5/16 3/8 KQE09-36 3/4-16 22.23 22.23 35.5 15 20 18.5 6 6 14 KQE06-02 M14x1 17 17

MB

10 17 7.5 8.5 7.5 9.5 9.5 10.5 9 9 10 11 11 11 NCA D-A5/A6 D-A59W D-A3/A44 13 13 13 14 14 15 D9 9 10 11 11 11 10 D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV 7 5.5 5.5 7 7.5 6.5 5.5 -X D-Y7BAL 6 3.5 3.5 3.5 4 4.5 5 20D-F5/J5 D-F5W/J59W D-F5BAL/F5NTL D-F59F 3.5 4 4 4.5 4.5 4.5 5 Data D-G39/K39 D-P5DWL 9 4 9 4 9 4 10 4.5 10 4 11 11 4.5 4.5 These values are given as guidelines including the hysteresis and

Series VQ Base Mounted Metal Seal/Rubber Seal

L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Battery-less

Brown 12 Black 13 Red 7 Black 6 Orange 9 Black 8 Yellow 11 Black 10 Black 3 Robotic cable A B-2 A A-2 B B-3 B A-3 SD+ (RX) B-4 SD (TX) A-4 Signal Connector C terminal no.

HRX-OM-X084

. 9-5 9.2 Outline dimensions . 9-6 9.2.1 HRR010-A-10/20. 9-6 9.2.2 HRR010-W-10/20. 9-7 9.3 Flow Chart . 9-8 9.3.1 HRR010-A-10/20. 9-8 9.3.2 HRR010-W-10/20. 9-8 HRR Series HRX-OM-X084 Contents 9.4 Cooling capacity . 9-9 9.4.1 HRR010-A -10. 9-9 9.4.2 HRR010-W-10. 9-9 9.4.3 HRR010-A -20. 9-10 9.4.4 HRR010-W-20. 9-10 9.5 Heating capacity . 9-11 9.5.1 HRR010-A-10. 9-11 9.5.2 HRR010-W-10. 9-11

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

14 29 39 37 61 HA 19 28 27 31 58 60 I 11 10 12 14 13 12 J 17 28 40 52 78 105 K 23.5 33.5 43.5 53.5 63.5 88.5 KA 82.5 112.5 NA 4 4 4 4 8 8 M 46 56 70 84 109 135 Z 45.5 55.5 69.5 83.5 108.5 134.5 ZZ 71 81 95 109 134 160 13-/22-MXQ8-10 13-/22-MXQ8-20 13-/22-MXQ8-30 13-/22-MXQ8-40 13-/22-MXQ8-50 13-/22-MXQ8-75 Note) Note) 1322Note) Refer to the bottom view of MXQ8-30. 805 MXQ 1322Air Slide Table

MU

-X +0.058 0 +0.058 0 +0.058 0 +0.070 0 18 22 26 32 3 4 5 6 13 14 17 23 9 11 13 16 8 10 10 14 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 8 10 10 16 21 24 27 39 8.5 10 11 16 11 14 15 20 8.5 10 11 16 19.5 24 26 36 CD-MU02 CD-MU03 CD-MU04 CD-MU05 9 11 13 16 20Knuckle pin and snap ring are included.

MU

-X +0.058 0 +0.058 0 +0.058 0 +0.070 0 3 4 5 6 13 14 17 23 18 22 26 32 9 11 13 16 8 10 10 14 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 8 10 10 16 21 24 27 39 8.5 10 11 16 11 14 15 20 8.5 10 11 16 19.5 24 26 36 CD-MU02 CD-MU03 CD-MU04 CD-MU05 9 11 13 16 20Knuckle pin and snap ring are included.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Pair no. of wire Insulation color Dot mark Dot color LEC Y LEC Y 1 1 Orange Red 2 Black 3 2 Light gray 11 6 Orange Red 12 Black 13 7 Light gray 21 11 Orange Red 22 Black 23 12 Light gray Motorless A side Red 4 Black 5 3 White Red 6 Black 7 4 Yellow Red 8 Black 9 5 Pink Red 10 Black Red 14 Black 15 8 White Red 16 Black 17 9 Yellow Red 18 Black 19 10 Pink Red 20 Black Red 24 Black 25 13 White

smcmaintenancepartslist

(FKM can be selected.) 11, 12 and 13 are non-replaceable parts, so they are not included in the seal kit. 11, 12 and 13 are non-replaceable parts, so they are not included in the seal kit. Replacement Parts: Seal Kit Kit no. Contents Bore size (mm) Replacement Parts: Seal Kit Kit no.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

136 128 12 146.5 138.5 13 157 149 14 167.5 159.5 15 178 170 16 188.5 180.5 17 199 191 18 209.5 201.5 19 220 212 Station L1 L2 10-SS5YJ3-32, S32Stations -C4 Station 2 42.5 33.5 Station 20 231.5 222.5 3 53 44 4 63.5 54.5 5 74 65 6 84.5 75.5 7 95 86 8 105.5 96.5 9 116 107 10 126.5 117.5 11 137 128 12 147.5 138.5 13 158 149 14 168.5 159.5 15 179 170 16 189.5 180.5 17 200 191 18 210.5 201.5 19

Proposals for Energy Saving

4 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 No.

42

SOL.A VQC 4/5 10 (+) () White Black 10 stations SOL.B 23 (+) () Gray Red SOL.A 11 (+) () White Red VQZ 11 stations SOL.B 24 (+) () Black White SOL.A 12 (+) () Yellow Red 12 stations SQ SOL.B 25 (+) () White None COM. Note) 13 13 () (+) Orange Red VFS Negative common specifications Positive common specifications Note) There is no polarity. It can also be used as a negative common.

One-touch Fittings

3/8 KQ2T06-03GS1 17 10.4 9.7 12 10 15.5 24.1 24.2 13.3 13.9 11 4.5 27.4 D2 D1 1/8 KQ2T08-01GS 10 13.2 13 10 16.4 18.7 22.2 14.2 14 14 4.5 7.9 H 1/8 3 KQ2T08-01GQS 12 13.2 13 12 17.2 23.5 27 14.2 26.3 18.2 6 11 8 1/4 KQ2T08-02GS 14 13.2 13 12 17.2 25.4 27.3 14.2 26.3 18.2 6 19.4 3/8 KQ2T08-03GS 17 13.2 13 12 17.2 25.5 27 14.2 26.3 18.2 6 26.5 Connection thread (With sealant) 1/8 KQ2T10