CLA

ZZ StrO ke ~ 131 71 339 65 12.5 80 ~ 148 72 358 65 14.0 81 367 P PG PH PL PW S W X V oLD LH LS LT LX LV r 40 7/16 20 27 50 30 63 % 16 31 80 37 81 51 244 43 11.2 59 F 90 58 266 52 11.2 66 ~ 'f, 106 58 290 52 11 .2 66 'I, 42 11 20 45 153 8 27 13 9 40 207 3.2 42 70 'I, 46 10 21 50 168 0 27 13 9 45 222 3.2 50 80 'I, 48.5 13 23 60 182 0 34 16 11.5 50 250 3.2 59 93 \I, 55 15 23 70 208 0 44 16

4/5 Port Air Operated Valve Series SYJA3000

Station n L1 L2 Station 2 77 49 Station 20 419 391 3 96 68 4 115 87 5 134 106 6 153 125 7 172 144 8 191 163 9 210 182 10 229 201 11 248 220 12 267 239 13 286 258 14 305 277 15 324 296 16 343 315 17 362 334 18 381 353 19 400 372 1-5-69

HRX-OM-X071

9.4.1 HRR050-A-20. 9-11 9.4.2 HRR050-W-20. 9-11 9.4.3 HRR050-A-40. 9-12 9.4.4 HRR050-W-40. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow (for water-cooled type) . 9-15 9.7.1 HRR050-W-20. 9-15 9.7.2 HRR050-W-40. 9-15 9.8 Types of Hazard Labels

Cylinder with Lock Series MNB

19.5 12 13 54 32 to 500 22 17 6 1/8 8.5 10 46 97 45.5 12 32.5 83 13 13 30 27 16 13 63 40 to 500 30 22 8 1/8 10 14 52 104 52.5 12 38 91 14 16.5 35 32 20 14 75 50 to 600 35 27 11 1/4 12.5 18 65 120.5 58.5 15 46.5 104.5 15.5 19 40 32 20 14 90 63 to 600 35 27 11 1/4 17.5 18 75 134.5 68 12 56.5 119.5 16.5 23 45 37 25 20 102 80 to 750 40 32 13 1/4 22 22 95 169 81 18 72 150 19 33 45 37 30 20 116

Compact and Lightweight

22.23 37.1 NPT3/8 ZH18DA-11-N03-13 39 ZH20DA-11-N04-13 23.81 44.1 NPT1/2 ZH -X267 Inch ZHP ZU Screw-in connection VQD-V H1 H3 Connection thread 1 Connection thread 3 SUP.

Pin Clamp Cylinder Series CKQ/CLKQ

Applicable hole diameter D (Guide pin diameter) SR (The radius of the tip of the guide pin) A (Arm length) T (Arm thickness) 12.5 12.7 14.5 14.7 15.5 15.7 17.5 17.7 19.5 19.7 24.5 24.7 4.5 13 6 9 31 189 29 187 4.6 5.5 15 7 31 11 189 29 187 5.6 6 16 7 11 31 189 29 187 6.1 7 18 8 36 12 194 34 192 7.1 8.5 20 8 36 13 194 34 192 8.6 10.5 25 8 36 15.5 194 34 192 10.6 P (Port thread size) Nil G1

MXS Series Air Slide Table

3H9 2.5 deep +0.025 0 5 M 0.5 18 20 Z ZZ (NN-1) x H G H 11 5.5 5.5 11 A B 3.2 6.5 7 7 12 4 NN-M4 x 0.7 thread 8 deep A B 3H9 2.5 deep +0.025 0 3H9 2.5 deep +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 GA 11 21 31 43 41 HA 20 20 20 30 48 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 Z 41.5 51.5 61.5

3 Port Air Operated Valve Series SYJA300

(80 mesh) Series SYJA700 Base mounted: SYJA74-01 02 Body ported: SYJA72-01 (-F) 2-3.2 25 25.5 (For manifold mounting) 12 1.5 13 A 18 1 23.5 11 M5 x 0.8 48.7 (Bracket) (Pilot port) (Pilot port) 2-3.2 M5 x 0.8 (For mounting) 2-4.5 Manual override (Non-locking) Manual override (Non-locking) (External pilot port) (For mounting) (For solenoid valve) 12 23.5 11 A (44) (36) 21 28 29 25 27 34 18

SZ3000

Weight (g) 17.6 19.9 24.4 28.9 33.4 37.9 22.1 26.6 31.1 35.6 10 11 12 13 14 15 16 17 18 19 No. Terminal no.

CG5-S

12 6 14 4 M14 x 1.5 44 1/8 93 143 50 to 1200 109 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 1/4 167 63 to 1200 109 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 1/4 167 80 to 1400 130 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth 22 10 22 7 M22 x 1.5 80 3/8 201 100 to 1500

C76

) 12 (9) 7.5 (5.5) 12.5 (9.5) 15 (12) 13 (10) 13 (10) 11 (8) 5 (3) 11 (7) Aim at this number ( ) For air cushion type Auto Switch Mounting Height (mm) D-F7/J79 D-F7W D-J79W D-F7BAL D-F79F D-C7/C80 D-H7 D-H7W D-H7BAL D-H7NF D-A7 D-A80 D-A7H D-A80H D-C73C D-C80C D-A73C D-A80C D-H7C D-A79W D-J79C Bore Hs Hs Hs Hs Hs Hs Hs Hs Hs 32 28.5 31 30.5 28 30 36 31.5 31.5 34.5 40 32.5 35 35 5 34.5 40.5

C76

) 12 (9) 7.5 (5.5) 12.5 (9.5) 15 (12) 13 (10) 13 (10) 11 (8) 5 (3) 11 (7) Aim at this number ( ) For air cushion type Auto Switch Mounting Height (mm) D-F7/J79 D-F7W D-J79W D-F7BAL D-F79F D-C7/C80 D-H7 D-H7W D-H7BAL D-H7NF D-A7 D-A80 D-A7H D-A80H D-C73C D-C80C D-A73C D-A80C D-H7C D-A79W D-J79C Bore Hs Hs Hs Hs Hs Hs Hs Hs Hs 32 28.5 31 30.5 28 30 36 31.5 31.5 34.5 40 32.5 35 35 5 34.5 40.5

Basic Type/Direct Mount Type

400 50 300 200 100 10 5 Usable range 20 30 40 50 Usable range 1 0 1 2 3 4 5 6 10 0 1 2 3 4 5 6 Distance from cylinder shaft center Lo (cm) 7 8 9 10 11 12 13 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Usable range 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 Distance from cylinder shaft center Lo (cm) 1464 Model Selection CY3B/CY3R Series

MG

MGPM, MGPL Common Dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW 12 16 20 25 42 29 6 8 5 26 11 7.5 58 M4 13 13 18 M4 x 0.7 10 M4 x 0.7 4.3 8 4.5 M5 x 0.8 13 8 18 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 8 8 5 30 11 8 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8

IDX-OM-W026

M 11-1 . 11-1 11-2 . 11-2 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 12-5 . 12-2 13 T 13-1 . 13-1 13-2 . 13-1 13-3 . 13-1 13-4 . 13-2 13-5 . 13-2 13-6 . 13-3 14 14-1 . 14-1 2 IDX-OM-W026 i i i-1 () 3 i 1 1 3 IDF Series i-1 i-1 IDX-OM-W026 i i-2 5 i 2 1 IDF Series i-2 i-2 IDX-OM-W026 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDF

RHC

D-C7 D-C80 10 15 50 50 + 45 (n2) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65 9 9 9 15 + 50 ( ) n2 2 65 + 50 (n2) D-G5

CXS

6.6 +0.2 0 + 0.2 0 10 0 0.2 CXS25 +0.019 +0.001 0.05 0.15 +0.3 0 6 M6 x 1.0 12 8.5 9.5 C0.7 6.2 2 12 11.5 7 10 35 0.1 M8 x 1.25 12 2 11 6.6 Made to Order +0.4 0 +0.019 +0.001 13 +0.2 0 0 0.2 CXS32 + 0.2 0 0.05 0.15 8 M8 x 1.25 12.5 11 13.5 C0.7 8.2 2 16 15.5 8 13 44 0.1 M10 x 1.5 16 3.5 14 9 Notes) Dimension tolerances that are not indicated in the table above are based on JIS B 0405 Permissible

Best Pneumatics Vol. 14

9 4.6 88 3 264 43 20 186 20 11 50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11 20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

HRX-OM-Y098

Circulating fluid flow rate [Flow PV]. 5-11 Circulating fluid flow rate [DI PV]. 5-11 Independent pump operation [Pump] . 5-12 Operation mode [MODE] . 5-12 RUN/STOP display . 5-13 Run/stop operation . 5-13 5.4.2 Menu . 5-14 5.4.3 Status screen . 5-15 5.4.4 Information screen . 5-17 Alarm reset . 5-18 HRL Series HRX-OM-Y098 Contents Alarm name .5-18 Alarm log record.5-19 Display of alarm/

Micro Mechanical Valve Series VM1000

, across flats 27 Min. 3 Max. 11 M5 x 0.8 (Pilot exhaust port) Symbol (B) 2 (A) 4 12 14 3 (EB) 1 (P) 5 (EA) 0.5 MPa supply 3.5 mm T.T. 2.0 mm O.T. 1.5 mm P.T. 20 N F.O.F. 3 x 4.5 mounting hole 5 x Rc 1 4 Roller plunger VFM250-02-06 VFM250-02-06S Panel mounting hole 15 polyacetal or head steel roller M18 x 1 Hexagon nut thick 11, across flats 27 Min. 3 Max. 11 M5 x 0.8 (Pilot exhaust port